Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

2 !3 !4 !5 !6 !7 !8 !

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

SQ1000/2000

2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ2230D Double (double solenoid): SQ2231D e e q w y e e q w y SQ2231D SQ2230D (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1)(P)(R2) (R1) (P)(R2) u u 3 position: SQ2 30 3 4 5 3 position: SQ2 31 3 4 5 SQ2330 SQ2331 (A)(B) (A)(B) 4 2 4 2 y e e q w y e e q w 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ2430 SQ2431 (A)(B) (A)(B) 4 2 4 2

Compact 5-Port Solenoid Valve

5 4 3 2 1 8 7 6 5 4 3 2 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Station 1 Station 1 Station 1 Station 2 Station 2 Station 2 Station 3 Station 3 Station 3 Station 4 Station 4 Station 4 COM. (+) 9 () () Station 5 Station 5 COM. (+) 10 (+) (+) (+) (+) (+) (+) (+) (+) Positive common Negative common Station 6 Station 6 Station 7 Station 7 Station 8 Station 8 * When using a valve with no polarity

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

Modular F.R.L. Unit

Note 2) Without a valve function. Note 3) For thread types M5 and NPT. Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

REA/REB

6 #2 NBR Cushion seal -X Seal kit includes @6 to #2. Order the seal kit, based on each bore size. Replacement Parts: Seal Kit 20Bore size (mm) Kit no. Contents Data REAS10-PS 10 Set of nos. above @6, @7, @8, @9, #0, #1, #2 REAS15-PS 15 10-2-31 31 Series REAS Construction: 20 to 40 @9 !5 @1 !1 @2 @5 @7 @6 @3 N@4 @0 !0 !2 rt ew u y !3!4 i o q !7 !6 !9 !

REA/REB

RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-69 69 Series REBR Construction: 15, 25, 32 !6 !9 i !2 !1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

SY

(See the entry example below.) 1 Quantity 2 3 4 5 6 7 8 Stations or layout Single solenoid 2 position Double solenoid Refer to the entry example.

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

AC

Description Material VER2000 VER4000/4001 VS7-1-A DXT172-8-6 AXT500-13 Metallic painted Body q w e !1 Aluminum alloy VS7-2-A Aluminum alloy Sub-plate r t y u i o !0 !2 !3 !4 !5 !6 Block packing !

One-touch Fittings Series KQ2

Q K 7 1 7 . 1 2 7 1 8 2 8 5 3 6 2 2 9 2 7 2 / 1 8 / 3 S 3 0 3 1 L 2 Q K 0 6 5 . 4 6 6 . 9 8 7 2 / 1 S 4 0 3 1 L 2 Q K 2 2 5 . 6 6 9 6 9 4 1 Branch tee: KQ2T Inch Applicable tube O.D.

Electric Actuator/Slider Type

9 q r !5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

Table of Contents

2 !3 !4 !5 !6 !7 No. q w e r t y u i o !