Stopper Cylinder

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !8 u t @8 #3 @9 $3 $5 $4 #0 $1 $2 $6 Auto switch @6 @4 #1 @3 @5 #6 #5 #7 #8 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 #9 $0 Component Parts Component Parts No. Description Material Note No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5 !

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

x 1.25 M10 x 1.25 M8 x 1.25 42.5 34.5 30 24 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 188 154 152 144 1/8 88 64 62 62 6 6 5 8 8 8 26-0.033 0 11 8 8 16 13 13 1/4 1/8 1/8 26-0.033 0 32-0.039 0 8 10 M32 x 2 Axial Foot (L): 1011-CM2WL, 2122-CM2WL Standard port Relief port (10-, 21-) Vacuum port (11-, 22-) K H1 AL A H G H2 F 2 x P (Rc, NPT, G) K H + Stroke F G AL A 2 x NN 2

Tie-rod Type Hydraulic Cylinder

size 63 21 32 32 22 6 63 all types 80 65 20 30 16 M18 x 1.5 18.3 4 4 x 28AW M D L 80 26 40 36 27 7 80 all types 100, 125 all types 95 78 22 35 16 M22 x 1.5 22.3 4 4 x 36AW 100 34 45 40 32 8 110 90 26 42 20 M27 x 2 27.5 5 5 x 40AW l 45 160 all types 160 43 50 44 36 10 120 100 30 50 22 M33 x 2 34 5 5 x 50AW 10 K C F B A H 0 0.2 Material: Carbon steel Y-type knuckle d (H8) A B C D G L F E K

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

C76

5 !6 !7 !

C76

5 !6 !7 !

Compact Manifold Regulator

0.5 56 28 SMC MPa SMC SMC K K P P C C U U O O S S H H L L 11.5 8 3 5 L2 dimension DIN rail part no.

New

C 110 VAC J 6 one-touch fitting 1/8 3 D 200 VAC K L 13/64 5 Resin E 230 VAC 5/64 2 M N 8 one-touch fitting 1/8 3 F 24 VDC 13/64 5 G DIN terminal 24 VDC With surge voltage suppressor A B D E H 5/32 4 H 100 VAC 1/4 9/32 7 J 110 VAC Aluminum 5/32 4 3/8 K 200 VAC Single 9/32 7 2 Size 2 Unit L 230 VAC 5/32 4 N.C. 8 one-touch fitting J L 9/32 7 M Conduit terminal 24 VDC Resin With surge voltage

SQ1000/2000

(K) (Y) 5 6 5 6 5 6 u 4 For single VQ110LJ2-1 Negative COM: VQ110NJ2-1 5 For double (latching) SQ1C41 SQ1B41 SQ1A41 4 2 4 2 4 2 For double (double solenoid) on A side (K) (Y) 5 6 6 VQ110 (N)J3(B)-1 For 3P, dual 3 port on A side N.C. N.C. N.O. N.O. 1 5 3 1 5 3 N.O.

•

M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

1

NCM Series CG1 Series CQ2 CQS NCA Bore size (mm) With rubber bumper With air cushion Standard type Bore size (mm) G G Th9 Th9 Rod side Head side Rod side Head side D0 0.043 0 0.043 1.5 12 1.5 15 15 20 (2.1) 5 4 3 3 0 0.052 0 0.052 16 1.5 1.5 20 20 25 (2.5) 5 4.5 3.5 3.5 -X 0 0.043 0 0.043 20 2 2 13 13 32 (3.3) 6 5 6 5 0 0.043 0 0.052 0 0.043 25 2 2 15 15 40 (3.9) 7 5 7 5 2032 2 21 50 (4.5

LJ1H

2 3 4 5 2m 3m 4m 5m F R L T B Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.5 200 6.3 300 7.1 400 7.8 500 8.6 5 to 40 (with no condensation) 5 150 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

Series KDM Rectangular Multi-connector

(Panel mounting hole: See Dimensions.) 2 r o t c e n n o C h c n I c i r t e M 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K e u l B 2 3 / 5 3 0 P M D K 4 4 0 P M D K r o t c e n n o C g u l P d e R 4 / 1 7 0 P M D K 6 6 0 P M D K 6 1 / 5 9 0 P M D K 8 8 0 P M D K 8 / 1 1 0 P M D K 2 . 3 3 2 P M D K r o t c e n n o c t e k c o S ) g n i k c a p h t i W ( e u l B 2 3 / 5 3 0 P M D K 4 4

MY1

2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

CRQ2

End of rotation Rotation starting point 5 5 5 5 5 e g R n ot B ra at End of rotation io n n io ra at n ot 5 g R e A B R o 5 t 5 a ti o n B r a End of rotation n Rotation starting point g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

2/3 Port Valve

5 !

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50

energy saving effect

Applicable model Dimension [mm] A B HRSH100---K HRSH150---K HRSH200---K HRSH250-W--K Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port 56 271 609 HRSH250-A--K HRSH300-A--K 372 708 B A Option [K: With fluid fill port] Thread size: G1 1/2 (With cap) Fluid fill port Cap 56 Fluid fill port B A (The figure shows the HRSH250-A-20-K.) 178 Options HRSH Series Option