Series AP3500

slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm Tolerance of metered flow 25 slpm N/A 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa) 2) At 80 psig (0.55 MPa) N2 110 Diaphragm Valve for Ultra High Purity Air operated type (Two Step) Series AP3571 & 4571 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow

OMR0032

L A T C A N X 1 5 2 Made to Order Note3) Card Motor controller Note2) NIL Standard product X152 I/O cable (without shield) Option Parallel I/O NIL Direct mounting [N] NPN D Note1) DIN rail mounting P PNP I/O cable length Note3) NIL Without cable 1 1 m 3 3 m 5 5 m Note 1) The DIN rail is not included, this must be ordered separately.

SMC Electronic Switch Series Variations

[mmHg] to [kPa]. 1 [mmHg] = 1.3332 X 101 1.3332 X 101 X 350 = 46.662 [kPa] Ex.2) Convert the units of 80[kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 X 102[kgf/cm2] 1.01972 X 102 X 80 = 0.81576 [kgf/cm2] 3.14-13

CG1

CG1 Standard N 25 B53 L 100 CDG1 With auto switch Number of auto switches S n With auto switch (magnet) 2 1 n Mounting B L F G U Basic Axial foot Front flange Rear flange Front trunnion Rear trunnion Clevis Rod boot (at one side) Auto switch Without rod boot Nylon tarpaulin Heat resistant tarpaulin J K Without auto switch (Built-in magnet) Refer to the table below for selecting applicable

Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Nil Without auto switch (Built-in magnet) S 1 pc. 6 25 6 mm 25 mm For the applicable auto switch model, refer to the table below. n n pcs. 10 32 10 mm 32 mm 15 40 15 mm 40 mm Adjustment type 20 20 mm Nil With adjusting bolt B With shock absorbers (2 pcs.) Port thread type With shock absorber (With plate A) Installed on side A at time of shipment.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

OMR0031

L A T C A N X 1 5 2 Made to Order Note3) Card Motor controller Note2) NIL Standard product X152 I/O cable (without shield) Option Parallel I/O NIL Direct mounting N NPN D Note1) DIN rail mounting P PNP I/O cable length Note3) NIL Without cable 1 1 m 3 3 m 5 5 m Note 1) The DIN rail is not included, this must be ordered separately.

Electric Actuator / Slider Type 《 AC Servo Motor 》

See the table below Belt tension Size Belt N Part number Bolts LEF25 LE-D-6-2 19.6 pull LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 4. "Pulley plate" is installed. Bolts Size Tightening torque (Nm) M3 0.6310% M4 1.510% M5 310% 8.Troubleshooting When a fault occurs during the operation, the corresponding alarm or warning is displayed.

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Special Specifications:

Series AM, AMD, AMH, AMG 150 CA AM AMD AMH AMG Thread type (3) Nil Rc F G N NPT Body size Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body. C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve.

Compact Guide Cylinder End Lock Type SeriesMGP

40, 50, 63 P P P P P P P P P P P P MGPL Ball bushing Front lock Locking type Series MGP How to Order MGP M H Z73 N 100 32 Compact guide cylinder Number of auto switches Nil S 2 pcs. 1 pc.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 2 3 4 5 2m 3m 4m 5m 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 1 2 F R L T B Axial Right Left Top Bottom Axial entry Right entry Bottom entry Specifications 100 5.4 200 6.1 300 6.9 400 7.7 500 8.5 600 9.3 5 to 40 (with no condensation) 5 24 300 700 10.0 900 11.6 1000 12.4 800 10.8 mm kg C kg N

Table of Contents

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

Cylinder with Lock

) 1 75 80 85 95 100 n 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16)*2 2 (Different surfaces, same surface) 1 55 60 70 75 D-Y69 D-Y7PV D-Y7mWV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16)*2 70 + 30 (n 4) 2 (n = 4, 8,

ISO Cylinder

(n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2) (n = 2, 4, 6) (n=2, 4, 6) (n 2) 2 15 + 50 D-H7C D-C73C D-C80C 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) D-H7C D-C73C D-C80C 10 15 65 50 + 27.5 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 50 (n = 2, 4, 6) (n = 2, 4, 6) D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV

Table of Contents

(mm) 2 to 8 0.8 N 1.2 N 1.0 N 3.0 N 2.0 N 0 stroke Stroke end 5.0 N 10 to 32 40, 50 Weight (g) Refer to 2 to 8 for Thin flat, Thin flat with ribs and Elipse type.

MHZ

Model Opening/ Closing stroke (Both sides) (mm) Gripping force (1) Bore size (mm) Gripping force per finger Effective value (N) Weight (2) (g) Action Model External Internal MHZ2-6D MHZ2-10D (N) MHZ2-16D (N) MHZ2-20D (N) MHZ2-25D (N) MHZ2-32D MHZ2-40D MHZ2-6S MHZ2-10S (N) MHZ2-16S (N) MHZ2-20S (N) MHZ2-25S (N) MHZ2-32S MHZ2-40S MHZ2-6C MHZ2-10C (N) MHZ2-16C (N) MHZ2-20C (N) MHZ2-25C (N) MHZ2

MHZ

9@0@1 Seal kit MHZ2-(N) MHZ2-(N)1 MHZ2-(N)2 MHZ2-3 MHZ2-D MHZ2-S MHZ2-C MHZ2-DW MHZ2-K MHZ2-M MHZ2-E rty!1!3 Mounting screw MHZ-A1002(N)-1 MHZ-A1602(N)-1 MHZ-A2002(N)-1 MHZ-A2502(N)-1 Finger assembly MHZ-A1002(N)-2 MHZ-A1002-3 MHZ-A1602(N)-2 MHZ-A1602-3 MHZ-A2002(N)-2 MHZ-A2002-3 MHZ-A2502(N)-2 MHZ-A2502-3 MHZ-A4003 MHZ-A3203 MHZ-A1003 MHZ-A1603 MHZ-A2003 MHZ-A2503 Piston assembly wo!0!

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I n . .

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !