Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

High Vacuum Angle Valve

(Including w, r, t, u, i, o, !

smcmaintenancepartslist

CBG1A Air cushion type Locking at both ends 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type Locking at both ends 20 25 32 40 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

HRX-OM-X084

Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Aluminum High Vacuum Angle Valve

assembly (Maintenance parts) (Including w, r, t, u, i, o, !

Profi-E

W i t h t erm i nat or( At shi pm ent ) W /O W /O W hen t he product i s connect ed t o t he t erm i nal of PRO FI BU S com m uni cat i on l i ne, be sure t o set i t t o w i t h t erm i nat or . 7 Pressure set t i ng and out put m oni t ori ng Pressure can be set by sendi ng t he i nput dat a, i n w hi ch F.

•

P R across flats 1 2 , oj Iir w w \ M8X 1.25 I . j 0 >-j / ~ P 3.5 I 'A ~.8 Flat type Flat with rib (mm) Flat type . Flat w~h rib (mm) Model . .A .8 C JD ' Model 'A .8 C D E F I:M6x1 I:Ma XI y I I: Ma x l Y E F I r.M6 Xl G c H G H ..JatlFlat1>ilt1 rib I . .

Hydraulic

Hydraulic fluid Compatibility Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible JIS symbol O/W hydraulic fluid Compatible Not compatible Water/Glycol hydraulic fluid Phosphate hydraulic fluid Contact SMC.

Vacuum System Peripherals:

Nil DC: 1 W (With indicator light: 1.05 W) None With light/surge voltage suppressor (Possible only solenoid valve connector type.)

C85

1 w e !3 !

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

Series AP500

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

Table of Contents

0 IS1000 No. q w e r t y u i o !

LEC-OM02904

U U V V M W W (UVW) M U V W U V W PE M P1-P2(11k~12KWP1-P) P1 P2 4 3 4 (C) 200V3.5kW CNP2P-D PC (11.2) (2) (a) DO CN1ON/OFF (b) CN3DC24V (c) CN3SDDOCOM CN3 DOCOM SD 4.1.3 (1) (a) (b) (10.4) (c) (2) 4 4 4 4.2 (1) b01(1) (25) ON 3000r/min (2) 5 No.

LEC-OM02704CN

PD09PD11(MBR) 4 39 4 4.12 (PE)( ) (PE) (di/dtdv/dt) EMCEMC(IB()67303) NFB MC CN2 L1 () L2 L3 L11 U U L21 V V M W W CN3 PE PE (PE) PE .

Free Mount Cylinder

Note 4) Figures in ( ) in the table W are D-A93.

%silltr

E , W E , W M P Work Potential energy Kinetic energy Torque Power Joule = Newton meter Joule Joule Joule Watt J J t ' J w = kg . m2's-2 0.5-m-i = J's-l 3.