100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

P R R P R B B B B B 63.8 (DIN: 65.1) 63 (DIN: 64.3) 122[126.4] 19 19 19 60 31.5 22 A A A A A 13.8 (DIN: 15.1) 1/4 (P, R port) 4-4.5 (For mounting) (Pitch) P = 20 29 Manual override (Station n) (Station 1) (Light/surge voltage suppressor) + + + 73[80] 57.6 A A 10.5 41 30.5 B B 6.5 (Pitch) P = 20 25 1/8 (A, B port) L plug connector (L) M plug connector (M) DIN Terminal (D) M8 connector (WO)

LEKF-OMZ0035

Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.

Stroke Reading Cylinder and Counter

-X 663 CE1 Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9V D-M9V D-M9WV D-M9AV D-A9 D-M9 D-M9W D-M9A 12 to 20 25 U B A 32 to 63 D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV U D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-J7V D-F7BAV 12 to 20 U B A 32 to 63

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

CXWM/CXWL

(mm) Hs Ht Hw 23 Auto switch model Auto switch model D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C Hw 23 Ht Hv D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C D-F7LF 12.5 10.5 15 15 23 12.5 10 23 15 15 22 23 23 24 30 12.5 15 12.5 15 12.5

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

R.

SYJ300/500/700

terminal (D) M8 connector (WO) 63.5 63.5 63.5 63.5 X X X X P P P P 71.3 [73.5] 81.1 [83.3] 66.3 72.8 80.2 R R R R 90.2 Max. 10 91.1 Pg7 78.1 [85.1] Approx. 300 (Lead wire length) 54 71.5 M8 x 1 81.7 51.6 Approx. 300 (Lead wire length) 93 67 [74] 100.5 Refer to page 4-4-61 for dimensions with connector cable.

CJ2

D-F7BAVL Auto switch model D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A7 D-A80 D-A79W Bore size (mm) A 2.5 3 B 2.5 3 A 1.5 2 B 1.5 2 A 3 3.5 B 3 3.5 A 3.5 4 B 3.5 4 A 0.5 1 B 0.5 1 10 16 Auto Switch Mounting Height D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL/F79F D-C7/C80 D-H7/H7W D-H7NF D-H7BAL Auto switch model D-F7V D-F7WV D-F7BAVL D-C73C D-C80C D-H7C D-A7 D-A80 D-A73C D-A80C

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

D-B5, B6 20 to 100 D-G5, K5, G5W D-K59W 20 to 100 Hs Hs 24.5 24.5 B A B A Auto Switch Proper Mounting Position (Detection at Stroke End) (mm) Auto Switch Mounting Height (mm) Auto switch model D-M9 D-M9W D-G5/K59 D-G5W/K59W D-B5 D-B64 D-A9 Auto switch model D-G5/K5 D-G5W D-K59W D-B5/B6 D-M9 D-M9W D-A9 Bore size Bore size A 41 40.5 42 39 46 44.5 A 31.5 31 32.5 29.5 36.5 35 48 47 A 37 36.5

Series CE1

Standard Strokes Stroke (mm) Bore size (mm) Bore size (mm) Mounting bracket Applicable switch Note 50 100 75 125 150 175 200 250 300 400 500 25 Switch mounting screw (M3 X 0.5 X 8 l ) Square nut 12 V V V V V V D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-F7lV D-F7, J7 D-J79C D-F7lWV D-F79W, J79W 12 20 BQ-1 20 V V V V V V V V 32 V V V V V V V V V Switch mounting screw (M3 X 0.5 X 10 l )

Electro-Pneumatic Valve NVEP/NVEF Series

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

CJ2

Bore MM A D L R N W Flat Round TDH10 TZ TY TX TN TW TK TV Part No.

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

CE

Bore size (mm) Applicable switch Note 175 200 250 300 400 500 150 125 100 75 25 50 12 Switch mounting screw (M3 x 0.5 x 8l) Square nut D-A7, A8 D-A7H, A80H D-A73C, A80C D-A79W D-F7V D-F7, J7 D-J79C D-F7WV D-F79W, J79W 12 20 BQ-1 20 32 32 40 50 63 40 Switch mounting screw (M3 x 0.5 x 10l) Switch spacer Switch mounting nut 50 BQ-2 63 Contact SMC regarding non-standard strokes.

OMR0032

controller PP+B7 1k PPB8 Current limit resistor R NP+B9 1 k NPB10 Current limit resistor R (b) Upper level equipment is PNP type Power supply for pulse train signal Positioning Unit side Inside the controller PP+B7 1k PP-B8 Current limit resistor R NP+B9 1k NP-B10 Current limit resistor R 27 - ii.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

C D B A 89 Standard Motor Slider Guide Series LJ1S20 Motor Output Slide Screw 100W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1S202 1 F 2 SC Cable entry direction Top entry Cable length Power supply voltage Cable entry direction Left entry 1 2 F R L T B Axial Right Left Top Bottom 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry

ITV

The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling