5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ 0.45 0.6 (A) 4 VQD VZS 1 (P) 5 (R) Except for VQZ1000 N.O.

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.

Series KV2 Fittings

m m m m R p m m m m m m m p p m m m m p m m m m p p m p m R M R R m p p m m R R m p p p m m p M M m p p m p p m p M m m m p p M m p p p M m p p p M R p R R p M p p R m M m p m m p m M p m m m m m m p m R m R p m m m M m p m m p m M p m m m m m m p m R m R p m m p R M R m m m p M M m p m p m R m m p p p p p p m p p R p p m m m m M m m m m p R m m m m R p m m m p M R R R p 26 Series KV2 27

Heavy Duty Stopper Cylinder

Transfer direction Transfer direction P R Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

Refrigerated Air Dryer

1 (male) R 11/2 (male) NPT 1 (male) NPT 11/2 (male) NPT 2 (male) Thread symbol and size AMG Symbol Nil R 2 (male) Symbol N 3/8 inch Drain tube O.D.

CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

Vacuum Filter AFJ Series

] 8 8 AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

GB Cushion needle 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 1/8 1/4 MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5

o

(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

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(H) M3X0.5 n ports trotes 8 3 P 10-32 Nom (M5)4 ports a c e l i o r l i r::i:i:l:::r.:.:r:r:::r:::r::r:r:::ri:i:r:rrr:,:i:t:irl:i:r:r:l r'rt: -,., ,.. L .

Free Mount Cylinder

Applicable bore size (mm) d H1 B1 C1 Width across flats L 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 5.5 6.4 2-P through 4-T counterbore M4 x 0.7 2.4 7 8.1 H + Stroke A' Auto switch M5 x 0.8 4 8 9.2 M6 x 1.0 5 10 11.5 M8 x 1.25 5 13 15.0 M10 x 1.25 6 17 19.6 (mm) Bore size (mm) A P A' Q QA B R C T D V E GA GB H J K L MM NN 6 10 16 20 25 32 M3 x 0.5 depth

MGC

-X 20Front mounting flange Data 2-P R Y + Stroke Y R P Bore size (mm) 20 88 14 Rc 1/8 25 88 14 Rc 1/8 32 90 14 Rc 1/8 40 101 15 Rc 1/8 50 116 16 Rc 1/4 Dimensions other than the above are the same as those on pages 8-22-14 to 8-22-25. 8-22-7 8 Series MGC Slide Bearing Allowable End Load and Deflection MGCM20Stroke -R MGCM25Stroke -R MGCM32Stroke -R (Slide bearing type) (Slide bearing type

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

CG5-S

R V Front flange type (F)/CG5FNS X165US inch rod option dimensional changes GA GB FT 2-Rc P H1 Width across flats B1 Dim.

IDX-OM-W020

FM1,2 1 2 PE OLR TB PTC PTC PE 1 2 ILS PRS S TB P CM FM P IDFB4E / 6E / 8E S R GFCI CM FM1,2 OLR V PTC PTC ILS PRS TB GFCI EDV 6-4 6 5 IDFB Series IDX-OM-W020 6 IDFB11E S R CM FM12 OLR ILS PRS V TB MC GFCI EDV PC IDFB15E S R CM FM15 V OLR C1 ILS PRS TB12 RY MC GFCI EDV PC 6-4 6 6 IDFB Series IDX-OM-W020 6 6-5 IDFB3E-11 IDFB4E 15E

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Sine Rodless Cylinder Series REBR Direct Mount Type

-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

20 to 600 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 11 M8 x 1.25 63 Up to 600 20 to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 11 M10 x 1.25 80 Up to 750 20 to 750 40 37 102 32 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 13 M12 x 1.75 100 Up to 750 20 to 750 40 37 116 41 140 1/4 1/4 92 30 52 14 124 21 31 76 25 19 16 M12 x 1.75 Bore size [mm] K KA LZ M MM N P PG