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Red (+) Insulation: Black () 0.3 mm2 4.1 51.2 48.5 (92) Cable type (TT) 52-SY9240 (R) -TT03 04 Max.10 L 217.6 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 (108.8) 21 ATEX Compliant Base Mounted Type Series 52-SY9000 Dimensions 29 30 3-position closed centre/exhaust centre/ pressure centre L plug connector (L) 17.5 52-SY9440 (R) -L03 04 3 5 123 51.2 86.5 Manual override

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

How to Order w q e r ZK2 A A N0 N N 12 08 t y q Body/Exhaust type r Connector w Nominal nozzle size For pressure switch for vacuum: 2 m (Lead wire with connector) Pressure sensor assembly: 3 m (With lead wire) Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Note Silencer exhaust Silencer exhaust1 A Y V Cannot be selected when e is N Refer to page 18

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

57.2 45.2 9 18.1 Q2 Q2 Round type P D 4 to 12 2 x N Q1 2 x O 3 x Applicable tubing *1: D is maximum diameter.

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

(mm) 10 to 16 1.0 N 3.0 N Note) Pads are exclusively ball joint type and are not interchangeable with other pads. 20 to 50 2.0 N 5.0 N Pad Type Ball joint type Pad form 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

2.0 N Spring reactive force Full Stroke Full Stroke 3.0 N 5.0 N Non-rotating specification Without non-rotating (J), With non-rotating (K) Weight (g) Vacuum entry port Pad dia.

N Symbol Electroless nickel plated Control type If more than one option is required, write option part numbers in the order of S, N.

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000

(mm) Model Model Accessory TM-04 TM-06 TM-08 2 x 6 TM-04 TM-06 TM-08 TM-10 TM-12 4 6 8 10 12 2.6 x 8 4 TM-10 3 x 8 TM-12 Dimensions: Multi-tube Holder N x D (Pitch) N x holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

Metric size Inch size With One-touch fitting 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 Stainless steel specifications (SUS303) AS Thread type ASP Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230FG ASD330FG ASD430FG

OUT IN SMC 8 x 18 S F D Q Grommet (with surge voltage suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5

Type 3 Universal Applicable tube outside diameter Metric size Inch size With One-touch fitting 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Stainless steel specification (SUS303) Thread type Nil Metric threads (M5) Unified threads (10-32UNF) R(PT) NPT Port size M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 N Needle Valve/Flow Rate Characteristics

04 0 5 VK Thread type Series VP 5 port solenoid valve Manifold Nil Rc VZ G F N NPT Base size NPTF T VF Common EXH 5 6 3 4 A/B Port size 1 VFR Symbol Port size 04 06 10 M Note) 1 Mixed VVP460 VVP450 1 2 3 4 VP4 Porting specifications Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for