Modular Design with Uniform Body Style

With drain guide With drain cock With drain guide With drain cock With drain guide Model B B B B B B A C1 AF20-D 91.4 87.4 93.9 40 50.6 AF30-D 123.9 122.2 117.8 122.3 137.8 142.3 53 54.3 AF40-D 155.6 153.9 149.5 154 169.5 174 70 58.3 AF40-06-D 157.6 155.9 151.5 156 171.5 176 AF50-D 228.6 226.9 222.5 227 242.5 247 90 64.3 AF60-D 242.6 240.9 236.5 241 256.5 261 901 64.3 1 For the type

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

CL

positions l S + Stroke ZZ + Stroke h + l ZZ + l + Stroke Stroke range (mm) Long stroke range (mm) 40 50 55 65 80 90 90 90 Bore size (mm) A AL B B1 BF BX BY C D BP EA EB F FD FT FX FY FZ Without rod boot With rod boot 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 30 35 35 40 40 50 50 56 59 44 52 64 78 92 115 128 144 27 32 32 37 37 47 47 53 69 16 20 20 25 30 36 36 40 32 40 40 52 52 59 59 59 60 70 86 102

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

Air Cylinder

CM3 Auto Switch Proper Mounting Position (Centralized piping type, With end lock) CG1 (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF CG3 D-C7l D-C80 D-C73C D-C80C D-G39A D-K39A D-A3lA D-A44A D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-B5l D-B64 D-B59W JMB MB A B A B A B A B A B A B A B A B Bore size MB1 20 10.5 (8) 9.5 (7) 6.5 (4) 5.5 (3) 0.5 () 0 () 6 (4) 5 (3) 2.5 (0.5) 1.5

CHKD/CHKG

, 95 DDimensions CHKDB--XC63 Stroke Bore size (mm) 32 55, 60, 65, 70 80, 85, 90, 95 A B A B 136 126 40 140 130 165 155 50 146 135 171 160 63 155 142 180 167 80 170 153 195 178 B 100 197 171 222 196 A Note) Dimensions other than those highlighted above are standard.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

entry Oil-free option JSXD91 B N 50 1 G None F 2 GS D E 3 DN 4 CS 5 WN 6 7 8 B J JSXD91 Specific Product Precautions 48 JSXD30, 40, 50, 60, 70, 80, 90 Series Table of UL-compliant Products Refer to the table below for UL-compliant products.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

26 214 162 188 15 90 120 25 MX Pivot Bracket for Double Clevis MXU MXS MXQ MXF MXW MXP MG MGP Rotation Angle MGQ Bore size (mm) A B A+B+90 40 to 100 MGG 12 60 162 Note) The dimensions above are for reference.

CRQ2

68 53 81.5 B 17 26.5 22 34.5 38.5 57.5 49 72 57 85.5 A 6.5 9.5 9.5 13.5 22 28 29 37 34 43.5 CRB2 90 180 90 180 90 180 90 180 90 180 12 63 3 10 CRBU2 69 (32) 9 52 3 15 A CRB1 56 (25) 9 41 4 B 20 MSU 43 (20) 7 32 3 30 CRJ 36 (17) Operating range at proper mounting position (Lm/2) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

CLS

A K N N F FT FX FZ H BY S + Stroke RLQ ZZ + Stroke MLU BW With rod boot 180, 200, 250 ML1C BV DBZ e -X BG BE 20l f 15 Data h + l 4-MA Effective thread depth MB (To attach eyebolt) ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 A BA BB BC BD BE BG BF BZ BV BW BP D EA FY FZ GA GB GC H K BY AL C E F KA B FA M FD J FT FX 107 145 75 18 145 110 136 115 90 90 90 115 115

A

M B O L S NAF2000 40 97.5 11 40 17 30 27 22 5.4 8.4 40 2.3 40 120.5 Differential pressure NAF3000 53 132.5 14 53 16 41 40 23 6.5 8 53 2.3 56 158 Float NAF4000 70 168.5 18 70 17 50 54 26 8.5 10.5 70 2.3 73 194 Float NAF5000 90 247.5 24 90 23 70 66 35 11 13 90 3.2 90 273 Float NAF6000 95 261.5 24 95 23 70 66 35 11 13 90 3.2 95 287 Float Courtesy of Steven Engineering, Inc. !

Table of Contents

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

ISO Cylinder

A B Hs Hs Hs Hs Hs Hs Hs Hs Hs Hs D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9lV D-M9lWV D-M9lAV D-A9lV 17 B A A B D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-F7l D-F7lW D-J79 D-J79W D-F7BA D-F79F D-A7lH D-A80H 17 A B A B D-F7lV D-F7lWV D-F7BAV D-A7l D-A80 D-A79W D-H7C 17 A B A B D-C73C D-C80C D-J79C D-A73C D-A80C 17 Auto Switch Made to Order B A B A 102 C85/C75 Series Auto Switch Proper Mounting

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 LE-CP-3-B 360 LE-CP-5-B 590 LE-CP-8-B 1060 LE-CP-A-B 1320 LE-CP-B-B 1920 LE-CP-C-B 2620 Robotic cable Connector B terminal no.

CRJ

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r c e k t n w u i s o e c B port A port e c s l o i w c k Basic type For 90 and 100 For 180 and 190 Single flat Single flat +8 0 +10 0 90 0 or 10 B port A port B port A port t f fla or t f le fla ng si le ng of e si ng of ra n ge io +8 0 at an ot R

V100

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

15

300 200 Lead 8: LEY32DB 200 100 Lead 16: LEY32DA 100 Lead 20: LEY32A 0 60 30 120 90 0 60 30 120 90 Ratio to rated torque [%] Ratio to rated torque [%] * When using the force control or speed control, set the maximum value to be no more than 90% of the rated torque.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5