RSH/RS1H

RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

0 1000 2000 3000 (mm) (mm) 4000 Support spacing (l) Support spacing (l) 8-12-22 Proper Auto Switch Mounting Position (Detection at stroke end) Note) The operating range is a guide including hysteresis, but is not guaranteed.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

Electric Actuator/Slider Type

Positioning pin (Mounting reference plane) Model Distance LEFS25 H 4100 km LEFS25 A 2500 km LEFS25 B 1200 km Model Distance LEFS32 H 6000 km LEFS32 A 4000 km LEFS32 B 2000 km Positioning pin (Mounting reference plane) Positioning pin (Housing B bottom) Model Distance LEFS40 H 6000 km LEFS40 A 4000 km LEFS40 B 2000 km Body mounting reference plane Positioning pin The traveling parallelism

90

Flow Rate Characteristics Relief Characteristics IR3020-04-A Supply pressure: 0.7 MPa IR3020-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

High Speed Pilot Operated

Manual Override DXT1215T 5W U 01 (-X1) Warning Cable length [mm] Symbol Cable length [mm] 1 300 2 500 3 1000 4 2000 5 3000 6 4000 7 5000 The manual override is used for switching the main valve regardless of the valves electric signal. As the connected actuator will start operating due to this manual operation, be sure to confirm that it is safe to do so beforehand.

99

Pre-rinsed with ultrapure water (0.2 m version only) Resistivity recovery characteristics Applicable fluids Filtration area: 4000 cm 2 [Measuring conditions] Element used: ED801S-X20 Element size: 70 x L247 Classification 0.2 m 0.4 m Fluid: Ultrapure water (resistivity value 17.9 Mcm) Flow rate: 10 L/min DI water (Deionized water), ultrapure water, ion-exchange water, distilled water Water

Thermo-chiller

When deionized (pure) water is used, the electric conductivity should be 0.5 S/cm or higher (Electric resistivity: 2 Mcm or lower). 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% to the capacity of the main breaker of this product) HRLE090 28 A HRLE Series Specific Product Precautions 4 Be sure to read this before handling the products.

HRS100/150

Operating time 20 s 30 s HRZ 10 s Voltage HRZD 5 s Min. 2 s HRW 1 s 0.5 s dV dt HECR = Voltage increase ratio 0.2 s 0.1 s dV HEC 0.05 s 0.02 s Time HEB 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 dt HED Current (% for chiller main breaker volume) < For option B [With earth leakage breaker]> 3.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Clean series Electrical entry W1, WA1: Cable length 300 mm W2, WA2: Cable length 500 mm W3, WA3: Cable length 1000 mm W4, WA4: Cable length 2000 mm W7, WA7: Cable length 5000 mm W5, WA5: Cable length 3000 mm W6, WA6: Cable length 4000 mm M8 Connector Caution Ex. 1) Cable length: 300 mm 10-SY312-5W1ZE-C4 1.

With Factory Installed

If removal of residual pressure is needed, please contact SMC. 0.25 '" -0.5 t-'-. 0.2 oj " ::;; " ~ ~ a. 0 0.4 ::> "' f~ Q) ~ ID 0.3 ~ Ci " '3 0.2 0 " -~ 0.1 " -f ~ 0 0.15 ~ 0 o 0.2 0.3 0.4 0.5 0.6 0.7 00 1000 2000 3000 4000 5000 08 0.9 1 Flow rate t /m in IAN Ri Inlet pressure MPa 3 Regulator Series AR e Construction I Parts List Symbol AR2001 AR2501 . 3001 . 4001 IN OUT ..

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 526 Series AS Speed Controller: Standard Type In-line Type Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

Speed Controller: Standard Type Series AS In-line Type 1

Note 2) AS1000, AS2000 are not applicable. 8 3 2 1 Bore size 2 1 Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 AS1000 AS1000 AS2000 AS2000/3000/4000/5000 AS3000/4000/5000 AS4000/5000 Thread type Nil Metric thread (M3, M5) Rc NPT G N F Caution Be sure to read before handling.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX500 is capable of controlling up to 64 solenoids, and is compatible with SV1000/2000/3000/4000, VQC1000/2000/4000 valves. The EX500 makes it possible to connect up to 4 valve manifolds with up to 16 solenoids each.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.

Serial interface unit EX500 is capable of controlling up to 64 solenoids, and is compatible with SV1000/2000/3000/4000, VQC1000/2000/4000 valves. The EX500 makes it possible to connect up to 4 valve manifolds with up to 16 solenoids each.

Serial interface unit EX500 is capable of controlling up to 64 solenoids, and is compatible with SV1000/2000/3000/4000, VQC1000/2000/4000 valves. The EX500 makes it possible to connect up to 4 valve manifolds with up to 16 solenoids each.

Serial interface unit EX120 controls up to 16 solenoid outputs and is compatible with series SV1000/2000/3000/4000, VQ1000/2000, SX3000/5000 and SY3000/5000 valves.