Thermo-chiller/Rack Mount Type

-inch rack (EIA standards1). 1 19-inch Rack Standards Standard EIA (Electronic Industries Alliance) 500 mm Standard no.

CXS

Table 1.

reduces flow setting time

16.4 29.1 20.2 38.7 15 AS231FS1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FS1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FS1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FS1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FS1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FS1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5 13.3 24.5 19.2 49 AS331FS1-

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

-01-07 (S) 1/4 11.2 10.2 16.4 29.1 20.2 38.7 15 AS231FSG1-01-09 (S) 5/16 13.2 30.1 21.5 40 14.2 16 AS231FSG1-02-03 (S) 5/32 7.2 9.6 12 1/8 13 (12.7) 24 AS231FSG1-02-07 (S) 1/4 11.2 19 33.8 21.4 43.9 26 AS231FSG1-02-09 (S) 5/16 13.2 34.9 23.5 46 14.2 27 AS231FSG1-02-11 (S) 3/8 15.9 20.9 38.1 24.7 47.3 15.6 28 AS331FSG1-02-07 (S) 1/4 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 63.1 61.7 57.9 56.5

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

PSxx-OMR0001CN

3 () 1 DC(+) 2 N.C. 3 DC(-) 4 OUT1 ZS-31-B() ZS-31-C() -35No.PS-OMR0001CN-J 3 ISA-19-() 4 1 3 2 ISA-19-2/3(5 ) ISA-19-4/5/6(8 ) M12 -36No.PS-OMR0001CN-J 3 () ISA3-N DC+ OUT1 N.C.

Modular F.R.L. Unit

E Port size Octagon C T-interface B Center of F.R.L. body A D Model Port size A B C D E Applicable model Y110-M5 M5 x 0.8 11 19 12 14 8 AC10, AC10B Y210-01 1/8 15 42 32 28 19 AC20, AC20B AC20C Y210-02 1/4 AC25, AC25B AC25C, AC30 AC30B, AC30C Y310-02 1/4 Y310-01 1/8 15 53 39 30 19 Y410-02 1/4 19 62 44 36 24 AC40, AC40B AC40C Y410-03 3/8 Caution in Mounting Y510-02 1/4 19 66 46 44 24 AC40-06

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output signal BUSY2 Busy

VQZ1000/2000/3000

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

HRX-OM-X071

HRX-OM-X071 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

JXCx-OMT0005CN

Size Name Byte Semantics of Value 0-1 2byte *1 *2 2-3 2byte *1 *2 4-7 4byte *1 *2 8-9 2byte *1 *2 10-11 2byte *1 *2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h /IO IO IO DeviceNet 0Eh Get_Attribute_Single

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

03-SD Rc 3/8 19 22.5 R 3/8 24.3 9.8 30 52.6 19.7 1.2 47.4 128 AS420-N04-SD NPT 1/2 23.8 NPT 1/2 AS420-F04-SD G 1/2 AS420-04-SD Rc 1/2 24 27.5 R 1/2 28.5 12.4 38.5 62.9 25.8 1.2 55.8 222 Reference thread dimensions after installation. 751

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

Rotary Actuator

S 1 pc.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

23.1 16 27.1 12.7 20.4 14.3 31.1 36.1 27.5 3.2 9.3 1/4" 12 12 32.1 13.5 R 1/8 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 4 9.3 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 13.5 20.4 13.4 27.5 6 11.6 5/32" 14.2 13.4 27.1 30.2 35.2 12 32.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 23.1 12.7 30.2 19 18.5 35.2 25.3 32.1 30.2 32.4 8 15.2 3/16" 11.4 27.1 16.5 14.2 AS221FG-01

AS-FG/ASD-FG

AS221FG-02-10 AS221FG-N02-07 36 21 33.9 43.2 18.5 10 13.2 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 27.2 36.4 AS321FG-02-06 AS221FG-N02-09 60 17 27.8 39.3 12.8 6 15.2 5/16" 20 21 36 33.9 43.2 AS321FG-02-08 AS221FG-N02-11 63 18.5 29.5 41 15.2 8 17.9 3/8" R(PT) 1/4 23 43.8 48.8 21.8 19 42.8 37.8 27.8 39.3 AS321FG-02-10 AS321FG-N02-07 67 21 31.8 43.3 18.5 10 13.2 1/4" 17 60 NPT 1/4 19 21.8 29.5

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

CQS

0 17 5.5 5.5 4.5 Bore size (mm) 6 4 16 20 25 4 6 10 11 0 3.5 5.5 2 [4.5] 21 24.5 26.5 0 3.5 5.5 19 22.5 24.5 6 10 11 CUJ 1.5 [1] 3.5 [1] 2.5 0.5 7.5 9.5 7.5 9.5 7 7 CU Long Stroke 12 7 17 1 19.5 11 5 9 11 9 7 5 [2.5] 5 CQS 16 6 19 0.5 21.5 10.5 5.5 9.5 10.5 9.5 6 4.5 [2] 5.5 Bore size (mm) 20 11.5 22.5 6 25 16 9 13 16 13 11.5 10 [7.5] 9 CQM 25 13.5 24.5 8 27 18 10 14 18 14 13.5 12 [9.5]

MHZ2/MHZJ2

0.5 0.5 1 0.4 0.5 1 0.5 0.5 1 0.4 0.4 0.8 0.5 0.4 0.8 0.5 __ 0.5 0.4 0.8 1 0.5 0.5 1 0.4 0.8 0.5 Note) Auto switches are not applicable to blank sections in the table.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

color 76 41.5 29.5 12 3.2 12 14.2 L type: Black color 76 41.5 29.5 12 3.2 12 14.2 1 8 82 44.5 30.5 12 4.2 12 17.2 86 44.5 30.5 12 4.2 12 17.2 94.5 54 39 14 4.2 17 19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc