ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

VHK

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

VHK

H L1 L2 L3 L4 L5 L6 M1 M2 Q Model C D J E F G K 1(P)2(A) 2(A)3(R) 18 1(P) 2(A) 4 4 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 1 27 22 16.5 26 41 3.5 VHKl-04F-04F VHKl-06F-04F 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-06F-06F 24.3 16.8 7.2 VHKl-08F-06F 18 8 6 8 41 50.5 52.4 26.2 24.3 16.5 3.5 18.7 16.8 11 9 1.2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

240

L4 [mm] L4 [mm] L4 [mm] L4 [mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1

Integrated Controller

[mm] L4 [mm] L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30

Fluoropolymer Piping Equipment

H2 1/4 M2 LVW B side LQ1 LQ1 (E2) 2 x B L2 LQ3 F C side A side LVN L4 L5 G LQHB L1 L3 Class 2 to 5 Type T3 TL TIL Metric Size Model A side (Left) B side (Center) C side (Right) B E1 E2 E3 F G H1 H2 H3 L1 L2 L3 L4 M1 M2 M3 Min. port size Applicable tubing O.D.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] L4 [mm] L4 [mm] L4 [mm] m Me L4 600 600 1000 1000 X Motorless 400 400 500 500 200 200 LAT 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 LC3F2 800 800 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5

Support Guide/11-LEFG Series

[mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6

Rotary One-touch Fittings Manifold Series KM

D1 Port B min. port size Weight (g) D2 L1 L2 L3 L4 P Q1 Q2 M1 M2 4 4 6 KM16-06-06-3 12.8 4 6 KM16-04-04-3 16 17 17 KM16-04-06-3 6 16 16 17 19 18 3 4.5 18 4.5 12.8 68 20.9 16 11 14.5 50 10.5 65

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

[mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg]

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

Series KC Self-seal Fittings

L4 Weight (g) A L3 L1 L2 D1 D2 D3 Part No.

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon and Carbon Dioxide

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration

Ejector Valve Unit Series ZYY/ZYX 1

= 13.75 mm U side D side Solenoid valve Supply/Exhaust block Ejector valve End plate assembly L End plate assembly R L4 DIN rail 5.25 5.5 8 16.5 16.5 27 16.5 10.5 L3: Manifold overall length L2: Mounting screw length L1: Rail overall length 13-8-20

Cylinder with Lock

TR Screw size R2 TG/2 32 L5032 7 32 10 4.5 24 48 15 32.5 32 M6 x 16L 40 L5040 10 36 11 4.5 28 55 17.5 38 36 M6 x 16L 50 L5050 10 45 12 5.5 32 68 20 46.5 45 M8 x 20L 63 L5063 10 50 12 5.5 32 80 22.5 56.5 50 M8 x 20L 80 L5080 12 63 14 6.5 41 100 22.5 72 63 M10 x 20L 100 L5100 14.5 71 16 6.5 41 120 27.5 89 75 M10 x 20L AH AT AB E TR AU AO * Supplied with 4 mounting screws Flange (F, G) [mm] L4

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

D20Y= L4= L2= W2= (mm) Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y W2 8.5 to 25 10 to 36 11 to 41 13.5 to 50 17 to 60 L4 max 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L2 2 L2 2 L2 2 L2 3 L2 4 11-7-39 40 Series CRA1 Made to Order Specifications: -XC7 to -XC64 How to Order B P D C S 50 RA1 F59 C 90 X C59 C62 -X10 -X16 Built in magnet Nil D None Built-in magnet Simple specials, Made-to-order

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

D20Y= L4= L2= W2= (mm) Size 30 50 63 80 100 L2 max Y 2 Y Y Y Y Y W2 8.5 to 25 10 to 36 11 to 41 13.5 to 50 17 to 60 L4 max 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L2 2 L2 2 L2 2 L2 3 L2 4 11-7-39 40 Series CRA1 Made to Order Specifications: -XC7 to -XC64 How to Order B P D C S 50 RA1 F59 C 90 X C59 C62 -X10 -X16 Built in magnet Nil D None Built-in magnet Simple specials, Made-to-order