SMC Corporation of America
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resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Consistent clean room production Cleaned, assembled, inspected, and sealed in double packaging in a Class 10,000 environment Manufacturing process Applications Pressure feed of chemicals Parts assembly Precision clean regulator SRP Degrease cleaning Clean air Super mist separator Odor removal filter Clean gas filter Assembly Inspection N2 blow Precision clean regulator SRP Interior purge

) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 110 + 50 (n 4) 2 Different sides D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n

N2 purge port Option Cooling capacity: Max.30 kW 1. Normal operation Option Customers machine Circulating fluid outlet Up to 30 kW cooling capacity achieved.

Applicable fluids are air, N2 ,water and steam. Please consult with SMC if using other fluids. (4) When it is used with water, the fittings or tubing may be damaged depending on the surge pressure. (5) Surge pressure must be under the maximum operating pressure.

blow to prevent lead frame oxidation, N2 blow to prevent detection camera blur Prevents traces of water droplets.

If the fluid also generates corrosive gas, perform N2 supply and exhaust (N2 purge) inside the heat exchanger. 3. Caution for the use of deionized water If deionized water is used, bacteria and algae may grow in a short period. If the Chemical Thermo-con is operated with bacteria and algae, the performance of the heat exchanger may deteriorate.

How to Order (Inlet) (Outlet) AP 3 S FV4 FV4 M 571 2PW 050 Size Code Cv 0.29 0.5 Metered flow 3 4 Metered adjusted flow in slpm Code Metered adjusted flow in slpm at 80 psig (0.55 MPa) N2.

) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 90 100 110 20 90 100 110 75 90 100 110 10 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 (n 4) 2 n = 4, 8, 12, 16 110 + 50 (n 4) 2 Different sides D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com n 75 + 50 (n2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n2) n = 2, 4, 6, 8 Same side 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides 2 Same side n = 2, 4, 6, 8 20 + 50 (n 2) 2 n = 4, 8, 12, 16 90

Only dry air, N2, CO2 and Ar are applicable. Flow error Set value Bracket There is a flow of 5% or more in the wrong direction. Ensure the flow is in the correct direction. Hysteresis P_1 Flow [L/min] Bracket mounting Mount the bracket using the mounting screws supplied. The required tightening torque is 0.50.05 Nm.

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system. Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.

Only air and N2 are applicable. Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system. If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident.