Vacuum Unit

Symbol Note L V V Cannot be selected when e is N L1 None V L2 V None Cannot be selected when e is P or T L3 None None 4 For the connector length other than 300 mm, order the connector assembly on page 32 separately. t Vacuum (V) port y Option5 (For details on the Function/Application, refer to page 42.)

Compact

[mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [

One-touch Fittings

M A L3 L2 D2 D1 H Connection thread Release button dimensions X Y Male Run Tee: KQ2Y-G (Sealant) Connection thread R Model H (Width across flats) 2 x Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 L3 A2 M Applicable tubing O.D.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1) (Station n) (Station 1) (Station n) (Light/surge voltage suppressor) (Light/surge voltage suppressor) + + + + + + + + 54.1 [61.1] 54.1 [61.1] 38.7 38.7 25.5 25.5 A A A A (Pitch) P=16 19.5 (Pitch) P=17 M5 x 0.8 (A port) 8.5 1/8 (A port) 8.5 19.5 Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 Station 20 350 341 335 369 360 354 3 78 69 63 80 71 65 4 94 85 79 97 88 82 5 110 101 95

Slider Type Ball Screw Drive/11-LEFS Series

[mm] L3 [mm] L3 [mm] L3 [mm] m 1000 1000 1000 1000 25AL3 Z 500 500 500 500 LEC 0 0 0 0 LEC S 0 10 20 30 40 50 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 2000 2000 2000 2000 1500 1500 1500 1500 LEC Y L4 [mm] L4 [mm] L4 [mm] L4 [mm] L4 1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40

Uniaxial Electric Actuator Series LJ1

10 0 10 20 30 0 20 40 60 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L4 1.12-48 VQZ1000/2000/3000 Base Mounted VQZ2000 VV5QZ25 C Station Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9 18

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

(1) Model d Weight (g) D1 D2 L1 L2 L3 (1) Max.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A3 Mp Mr Static moment Dynamic moment My W W W L2 A2 L3 A3 L1 A1 Mp Mr My W W W W Mey Mep We We L3 A3 L2 A2 W Note) It is not necessary to consider load factor when using this device vertically perpendicular.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.

VFS

(MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194 1(P), 3(R2), 5(R1) port L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5 3-8-48 49 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS2000 Manifold Specifications Dripproof Manifold (Equivalent to IP65) VV5FS2-01WTBU D VV5FS2-01W Common terminal box Attachment plug lead wire VFS200

VM

(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

LJ1S10 30 a = 500 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a = 1000 a L1 (mm) 20 a = 2000 Pitching Mep m m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) 10 L1 0 1 2 3 4 5 Transfer load m (kg) 30 L2 20 L2 (mm) Mer m Rolling Yawing 10 L2 0 1 2 3 4 5 Mer Transfer load m (kg) m 30 a = 1000 a = 500 20 L3

MXW Series Long Stroke Slide Table

=50 {mm} L2=50 {mm} L2 {B L3 Item Load factors n Note (1) Max. movable load W B L2 Examine W.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

162.5 139 17 Stations L1 L2 L3 L4 11 298 287.5 267 15.5 13 14 15 16 12 310.5 300 283 13.5 323 312.5 299 12 348 337.5 315 16.5 360.5 350 331 14.5 373 362.5 347 13 40

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L4 31 Series VQZ Base Mounted Type Dimensions: VQZ300 VQZ300 (mm) VV3QZ35C Stations Port size (35) (5.5) 2-4.5 Mounting holes 42 (11) Grommet (G) N7T: One-touch fitting for 1/4" n-N7T, N9T, N11T, 02T 34 (7.5) (3) DIN rail clamp screw 23.5 N9T: One-touch fitting for 5/16" N11T: One-touch fitting for 3/8" 02T: 1/4 NPTF U side n A 2 A 2 5 Manual override Scale: 30% 4 (L4) 3 (L3) L2 L1 2 P=

Rotary Actuator/Vane Type

L1 = E2 = E4 = L3 = X = [mm] Size CRB2, CRBU2 Y L1 max L4 D2 10 4 to 8 Y-2.5 L2 + 1.5 3 15 4.5 to 9 Y-3 L2 + 1.5 3 to 4 20 5 to 10 Y-3.5 L2 + 2 3 to 5 30 7 to 13 Y-5 L2 + 3 3 to 6 [mm] Size CRB2 CRBU2 X L1 max L3 D1 X L1 max L3 D1 10 6 to 14 X-4.5 L1 + 1.5 3 4 to 14 X-2.5 L1 + 1.5 3 15 7 to 18 X-5.5 L1 + 1.5 3 to 4 4.5 to 18 X-3 L1 + 1.5 3 to 4 20 8 to 20 X-6.5 L1 + 2 3 to 5 5 to 20 X-3.5

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 531 Speed Controller: Standard Type In-line Push Locking Type Series AS RoHS Model/Specifications Lock speed setting, with the touch of a button It can be locked only by pushing the handle after adjustment.