SMC Corporation of America
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Circuit (of Class 2) which is of maximum 30 Vrms (42.4 V peak) or less, with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer. The Pressure Sensor is a UL approved product only if it has a mark on the body. Use the specified voltage. Otherwise failure or malfunction can result. Use the specified measurement flow rate and operating pressure.

Element 2 O-ring 3 Bracket BP-25S BP-16S BP-17S 1112 Series ZFC Air Suction Filter / In-line Type With One-touch Fittings Dimensions ZFC05 Applicable tubing O.D. L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Thread ZC(D)UKQ Cylinder bore Stroke D 10 4/2.5 Urethane tube (TU0425) or Port size Seal washer 2 x 3.2 through Soft nylon tube (TS0425) 2 x M5 x 0.8 ZA ZX ZR ZM 1.5 through ZMA ZQ 2 x 3.2 through 4 x 6 depth 5 counterbore ZH 7 + Stroke 36 + Stroke 70 + 2 x Stroke ZU ZL ZY Port size 16 to 32 ZF 2 x M5 x 0.8 (32: 2 x 1/8) 2 x P through ZP Seal washer SP Vacuum port size Socket (Only 16) ZCUK

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: D [1 NPN Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: Bracket for w/o Flow Adjustment

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: Bracket for w/o Flow Adjustment

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

SYJ514--S With valve 16 Release valve (N.C.) 1072 Multistage Ejector Series ZL112 Dimensions: Series ZL112 (Without valve) 2 x 5.4 Mounting hole 50 117 Label Exhaust port P Standard ZL112 20 V 4.5 166 ZA 56 Exhaust port Rc 1/2 35 ZX (1/2-14 NPTF, G 1/2 1/2-14 NPT) ZR P Port exhaust ZL112P V ZM ZMA 14 2 x 5.4 Mounting hole ZQ Exhaust port Vacuum pressure gauge ZH P With vacuum pressure gauge

Regulator for 2 MPa ARX 20 How to Order ARX2 0 01 Regulator Options None Nil 1348112 G36 10 01 G46 10 02 G36 4 01 G46 4 02 G36 P10 N01 G46 P10 N02 G36 P4 N01 G46 P4 N02 1348110A B Regulating pressure range Bracket 0.05 to 0.85MPa 0.05 to 0.30MPa 0 1 ARX20 Nil F ARX21 Nil F Thread type G Pressure gauge Rc NPT G Nil N F ARX20N ARX21N P Port size Panel nut 1/8 1/4 01 02 Option

M3 ,M5 ,U10/32 R NPT Nil ASN N AQ Model 4 6 8 10 12 5/32"1/4" 5/16"3/8" 1/2" Applicable tubing O.D. (mm) Effective area (mm 2) IN OUT OUT EXH.

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

-www.stevenengineering.com -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting force (N) Lifting force (N) Selection Graph (1)-2 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (50 to 250) Selection Graph (2)-2 Pad Diameter Selection Graph by Lifting Force Vertical Lifting

Note 2) Fixed unit: kPa Nil F N T Rc 1/2 G 1/2 1/2-14 NPT 1/2-14 NPTF Digital vacuum pressure switch specifications Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 For E (ZSE4) EB (ZSE4B) Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 25 26 65 Lead wire length 0.5 (2.9) m Rated voltage Lead wire length 0.5 (2.9) m DC specifications

B G P BG GP 1 Specialty Regulators ARX Series Regulator for 290 psi (2 MPa) ARX20, 21 Flow Characteristics ARX20-N02 130.5 ARX20-N01 Conditions: Supply pressure 290 psig 130.5 116 116 101.5 101.5 Secondary pressure (psig) Secondary pressure (psig) 87 87 72.5 72.5 58 58 43.5 43.5 30 30 15 15 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3 0 3.5 7.1 10.6 14.1 17.7 21.2 24.7 28.3 31.8 35.3

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: T (Panel Mount Adapter for w/o Flow Adjustment Valve)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C4 [ø4 (5/32") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate)