PFxx-OMJ0005CN

01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I PFM7S-(N)01/(N)02/F01 17 2 -61No.PF-OMJ0005CN-I PFM7S-(N)01L/(N)02L/F01L 2 17 -62No.PF-OMJ0005CN-I PFM7-F02 21 2 -63No.PF-OMJ0005CN-I PFM7-F02L 2 21 -64No.PF-OMJ0005CN-I PFM7S-F02 21 2 -65No.PF-OMJ0005CN-I PFM7S-F02L 2 21 -66No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7 2 -67No.PF-OMJ0005CN-I PFM7-C4L/C6L/C8L/N7L

TABLE OF CONTENTS

Media Table for Valve Series 2 W.N.C. 2 W.N.O. Series 20, 30 2 W.N.C. & All 3 W. 2 W.N.O. 30, 50, 70 Series 20 Series 20, & All 3 W. & E20 & 30 50, 70 & E20 Series 20 Media S.S. Body Brass Body S. S.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

ASP ASN How to Order AQ 2 2 0 0 01 M AS ASV Body size M5 standard 1/8, 1/4 standard Type AK Made to Order Refer to the below for details. 1 2 2 Direct cylinder elbow type VCHC Lock nut option Option None With seal Nil S Nil J Hexagon lock nut Round lock nut Control type 0 1 ASR ASQ Meter-out Meter-in M5 and U10/32 are not available with seal.

ZSE40/ISE40

SET [N] H (Fixed hysteresis) = 3 digits H H ON ISA2 Window comparator mode OFF OUT1: Selection of the output mode NO n-1 n-2 IS High pressure (for positive pressure/compound pressure) High vacuum (for vacuum pressure) ZSM Auto Preset (For adsorption confirmation) PF2 1. Auto preset mode 2. Preparation for auto preset 3. Auto preset of OUT1 IF Data SET Press the SET button.

7.4

type) 2 x 1/8 3(R) port = Thread type Manual override 72.8 (Double solenoid dual 3-port) 50.3 (Single solenoid) 2 x 4.5 Mounting hole 81 (Closed center) R 3 P 1 X 36.5 9 32 24.1 P 1 15.6 2 x 1/8 1(P) port = Thread type 10.2 Indicator light Stations 1 2 3 4 5 6 7 8 n D side U side 39.7 With plug connector/light B 2 B 2 20 14 A 4 A 4 5 14.6 2n x C2, C3, C4, M5, N1, N3 <4(A), 2(B) port>

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) VQZ100 VQZ100-S-01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

AR20-B to AR60-B

Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Piston speed V (mm/s) 9-14-3 4 Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 M5BW Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Piston speed V (mm/s) 9-14-3 4 Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 M5BW Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

ML1C

DPiston speed V (mm/s) -X 1107 Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 H M5BW Made to Order Refer to page 1109 for details. Number of auto switches Bore size (mm) 25 32 40 25 mm 32 mm 40 mm Nil S n 2 pcs. 1 pc. n pcs.

5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

Title not found

absorbers Intemal shock absorbers ' M S O P / B 1 , 2 . 3 & 7 o n y .

5 Port Solenoid Valve SY Series

Z 12 or less 15 or less 2 position single 10 or less 10 or less 13 or less 2 position double 15 or less 16 or less 20 or less 3 position Type R, U Type S, Z 33 or less 38 or less 2 position single 27 or less 28 or less 30 or less 2 position double 50 or less 50 or less 56 or less 3 position SY9000 SY5000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa)

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50

Title not found

Longrudinal mounlng space s rduced because there is no protrlsion from adtlshent bolts or nlernal shockabsorbeis sEe e pol J- a a a a a a a a a a a a a a a a MSo E Options " Except sEe 1, 2, 3,7, 10 and 20 2 pcs. 1 p c n pcs Body size a Lead wire length Eos.--l E s . I E s.

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal