Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C8 (ø8 (5/16") one-touch fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow Adjustment Valve

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Bottom, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount Adapter for w/o Flow Adjustment Valve

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø8 (5/16") one-touch fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Stations: 7 Stations, Port Size: N7 (1/4" One-touch Fitting), Thread Type: N (NPT), Kit Name: SDZEN (EtherNet/IP), SI Unit COM: N (-COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)]

Stations: 9 Stations, Port Size: N7 (1/4" One-touch Fitting), Thread Type: N (NPT), Kit Name: SDZEN (EtherNet/IP), SI Unit COM: N (-COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)]

Stations: 8 Stations, Port Size: N7 (1/4" One-touch Fitting), Thread Type: N (NPT), Kit Name: SDZEN (EtherNet/IP), SI Unit COM: N (-COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)]

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Stations: 4 Stations, Port Size: N7 (1/4" One-touch Fitting), SI Unit: QN (Device Net, -COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 2 (M12, 4 Inputs), Input Block COM: N [NPN (-)], Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust), US Option: X160US (Preferred US Option)

Stations: 12 Stations, Port Size: N7 (1/4" One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 1 (Input Block 1 pc.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: N [NPN (-)], Option 1: N (Name Plate)

Stations: 5 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: SDA3 (32 Outputs, 1 to 12 Stations), Unit COM: N (-COM), Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 2 Stations, Port Size: N7 (1/4" One-touch Fitting), Wiring Specification: N (-COM), Lead Wire Length: 1 (1.5m Cable), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Stations: 4 Stations, Port Size: N7 (1/4" One-touch Fitting), Wiring Specification: N (-COM), Lead Wire Length: 1 (1.5m Cable), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Stations: 6 Stations, Port Size: N7 (1/4" One-touch Fitting), Wiring Specification: N (-COM), Lead Wire Length: 1 (1.5m Cable), Option 1: None, Option 2: None, Option 3: N (Name Plate)

Stations: 7 Stations, Port Size: N7 (1/4" One-touch Fitting), Kit Name: SDA3 (32 Outputs, 1 to 12 Stations), Style: N (-COM), Option 1: N (Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)