A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

ZR

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Supply pressure (MPa) Suction flow (l /min (ANR)) Supply pressure (MPa) Suction flow (l /min (ANR)) ZL ZR1-W13L1 ZR1-W20L1 ZY Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) Air consumption (l /min (ANR)) Suction flow (l /min (ANR)) ZQ

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

G H Grommet (G), (H): SYJ3 40-M5 M5 x 0.8 (A, B port) 10 5 10 2-3.2 (For mounting) 15.3 32 22 3 2.5 Manual override B A 11 A B 37.5 [39.7] G: Approx. 300 H: Approx. 600 (Lead wire length) 91.7 [96.1] (Light/surge voltage suppressor) 41.5 [48.5] + 35.6 26.1 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector

•

r 140-150 16,9'8 Tube Connection Male thread Female thread 12",:18 M5XO.8,M6 x l M4 x 0.7,M5 x 0,8 Mounting Thread dia 110-1)6 M5XO.8,M6 x l M5 x 0.8,M6 x 1 12Q'9'32 M6X1,M8 x 1 M5 X0,8,M6xl ,M8 x 1.25 r ~40 150 M6Xl,M8X1 M6 x l,M8 x l ,25 Pad type Aat type FI, at with rib Deep type Bellows type Pad Oia.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6

Table of Contents

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 152 175 185.5 141 162.5 173 130 150

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

() Blue DC () When used as an IO-Link device Brown L + L + Black C/Q Main circuit C/Q IO-Link master Gray NC White NC Blue L L 19 3-Screen Display High-Precision Digital Pressure Switch ZSE20(F)/ISE20 Series Dimensions ZSE20(F) ISE20 ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order Piping specification M5 For 20 25

MHZ2/MHZJ2

Max. screw-in depth l mm Maximum torque Nm Model Bolts M3 x 0.5 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 5 8 10 12 0.69 2.1 4.3 7.3 Maximum torque Nm Max. screw-in depth l mm Model Bolts M4 x 0.7 Without clearance M5 x 0.8 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 0.88 2.1 4.3 7.3 6 8 10 12 Impact load M6 x 1 Using the body through hole Hole depth mm Bore mm 11H9 17H9 21H9

Table of Contents

1 Hexagon socket head screw Steel M5 x 50 M5 x 50 M5 x 50 !2 Detent assembly AXT510-9 Refer to How to Order Pilot Valve Assembly on page 3-8-86. Pilot valve assembly !

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

4/5 Port Air Operated Valve Series SYJA3000

0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 SS5YJ3-32-C4 SYJ33 1/8 SS5YJ3-S32-M5 SS5YJ3-S32-C4 SS5YJ3-41-M5 Base mounted for internal pilot SS5YJ3-41-C4 SYJ34 1/8 SS5YJ3-S41-M5 SS5YJ3-S41-C4 SS5YJ3-46-M5 SS5YJ3-46-C4 1/8 M5 x 0.8 SYJ34 SS5YJ3-S46-M5 SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct by specifying the

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

Hydraulic

YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 25 76 60 41 32 +0.07 0 16 12.5 20 M20 x 1.5 16 l +0.084 0 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 16 20 M24 x 1.5 20 C B-series +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75 60 E 30 20 24 M30 x 1.5 31.5 dH10 L L +0.1 0 M6 x 1.0 M8 x 1.25 40 145 115 75

MG

M5 x 0.8 Nil Slide bearing Ball bushing bearing M L NPT Rc N G TF Copper-free For bore size 16, M5 x 0.8 is only available.

CQS

x 35l x 40l x 45l x 50l M5 x 55l x 60l x 65l x 70l x 75l x 80l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 10 6.5 7 10 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer.

High Vacuum Angle Valve

(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ L plug connector (L): VQZ22(R)-L-C4/C6/M5 DIN terminal (Y): VQZ22(R)-Y-C4/C6/M5 VZ VS Indicator light 84 300 VFN (Lead wire length) 30.5 <35.5> 87 Max. 10 Applicable cable O.D. 3.5 to 7 Pg.7 Cover diameter 1.5 Cross section 0.23 mm2 Indicator light < >: AC 61.5 M plug connector (M): VQZ22(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 89 78 Indicator

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector