Table of Contents

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section

7.4

31.2 31.2 7 11.5 10 M5 x 0.8 2(B) port With plug connector/light 5.7 S07 5(R)-mM(O)-M5 2 A B C 8.4 18.6 19.5 M5 x 0.8 4(A) port M3 x 0.5 External pilot port (External pilot type only) 748 Base Mounted Single Unit S0700 Series Plug Lead Type Dimensions 3-Position Closed Center Grommet: S0735(R)-mG-M5 M5 x 0.8 1(P) port 21.2 SJ 11.4 5.2 7.7 M5 x 0.8 3(R) port SY 3 1 SY S0700 S0700 S0700 Manual

CA2

2 A A-A' Piston rod section A' !1 !3 !4 Component Parts Note Description Material No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASQ Metric Size Inch Size A Model A Weight (g) Weight (g) d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 Model d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 M1 AS131F-M5-23D AS131F-U10/32-01D 1/8" 8.4 3.2 8.4 19.8 19.8 17.5 12.7 17.5 12.7 28.7 10 28.7 AS131F-M5-04D AS131F-U10/32-03D 4.7 10.8 5/32" 9.3 20.3 M5 x 0.8 8 9.6 9.3 0.7 27.4 4 9.3 20.3 10 31 4.7 0.7 37.4 10.8 10-32 UNF 8 9.6 9.3 31 AS131F-M5-06D

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

B B Dimensions Dimensions (mm) (mm) D Y F A B C E A B C D E N F Model Model ZPR10F-0-B5 ZPR20F-0-B5 M5 x 0.8 1.5 39.5 12.5 10 12 10 23.4 20 22 ZPR13F-0-B5 ZPR20F-0-B8 M8 x 1.25 13 15 2 40 23.9 13 10.5 12.5 15.5 29.3 46.5 ZPR16F-0-B5 ZPR25F-0-B5 M5 x 0.8 16 18 25 28 ZPR25F-0-B8 M8 x 1.25 Dimensions by Tubing Diameter ZPR32F-0-B5 M5 x 0.8 (mm) 13 16 29.8 47 32 35 ZPR32F-0-B8 M8 x 1.25 Q: 4

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Male Thread) ZPT 20/25/32 F-B5-A10 (Without Buffer/Male Thread) M10 x 1 M5 x 0.8 Width across flats 14 Width across flats 12 M5 x 0.8 M8 x 1 5 3 20 D 3 5 Y Width across flats 16 15 D 3 3 F Width across flats 12 Width across flats 12 F Width across flats 10 Width across flats 2 Width across flats 3 3 C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F Model Model ZPT10F-B5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Type, Elbow Type (Metal Body) Dimensions L4 D3 H (Hexagon width across flats) T2 AS ASP A L2 ASN D1 AQ L3 ASV AK ASS ASR D2 T1 L1 ASF Dimensions AS120-U10/32-D 10-32 UNF 10-32 UNF AS120-M5-D M5 x 0.8 8 M5 x 0.8 Model T2 H D1 T1 D2 D3 L1 L2 L3 L4 A 9 9 4.7 10 31 10.3 0.7 27.4 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6

Vacuum Pad: Ball Joint Type

thread) M10 x 1 M5 x 0.8 Hexagon width across flats 14 M5 x 0.8 M8 x 1 5 Hexagon width across flats 12 3 20 D 3 5 Y Hexagon width across flats 16 15 D 3 3 F Hexagon width across flats 12 Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 F Hexagon width across flats 3 3 C C 2 2 A A B B Dimensions Dimensions (mm) (mm) A B C D F Y A B C D F Model Model

CL

is locked without a load.

CL

If there is a risk of contact, provide safety measures such as a cover or a system that uses sensors that will activate an emergency stop before contact is made. 2. Use a balance circuit in which lurching of the piston is taken into consideration.

KA

<M5, M6> <M5, M6> A D2 M L1 L2 D1 Part No.

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 L2 M A D1 D2 L1 Part No.

Fieldbus System

DIN rail clamping screw 8 R R 11.5 63.5 62.5 56.6 3 3 X X 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 20.5 P = 10.5 34 L2 = L1 10.5 L3 = 10.5 x n1 + 65.5 L4 = L3 + 97.5 + 47 x n2 L5 = (L1 L4)

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

3 Port Solenoid Valve

Screwing in fittings When screwing fittings into valves, tighten as follows. 1) M3, M5 (1) When installing SMC fittings, etc., follow the procedures below. After tightening by hand, tighten an additional 1/4 rotation for M3 and 1/6 rotation for M5 with a tool. However, when using a miniature fitting, tighten an additional 1/4 rotation with a tool after tightening by hand.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4 x M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4 x M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0 10 9.5 4 Section AA B D Mounting

S070

Grommet type 16.5 3 7 15 21 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150 (Lead wire AWG#26) 22 5 6 22 20.5 3 2 11 1 7 6 5 12 12.3 12 25 M5 x 0.8 3 (EXH) port M5 x 0.8 2 (OUT) port M5 x 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

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Flow Rate and Effective Sectional Area Note) Use caullon with soft nylon or polyurethane at maximum operating pressures. ,< , AI'Ipj;30f , Modil .A$P3;IDF " . 111iR,d30F ,. ';'A,pP4:?cF , 06, a8 010 0 10 012 rv,iIljme:tersi~e 06 08 08 01 /4" Tube out&ide . Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow .