VQZ1000/2000/3000

C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Grommet (G) n 5 Manual override VQC B 4 4 SMC SMC 2 A SQ (L4) (L3) L2 L1 5 18 P = 16 B 4 3 SMC SMC 2 A VQ0 B 4 2 SMC SMC 2 A B 4 VQ4 SMC 1 SMC 2 A VQ5 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Series SV

21 22.5 13.5 M5 x 0.8 (External pilot port) 99.2 84.9 23.4 M5 x 0.8 (Pilot EXH port) 2-4.3 (Mounting hole) 21 21.5 A B PE 38 46 A B A B SMC B A X Manual override (non-locking) A side: Orange B side: Green EA EB P 21.5 21 61 69 19.4 (Light/Surge voltage suppressor) (L = 300 to 5000) 134.4 128.8 M12 waterproof connector 60.5 58.7 26.5 13.5 5-Rc 3/8, 1/4 (Piping port

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 21 22.5 13.5 86.2 M5 x 0.8 (External pilot port) 71.9 10.4 21 21.5 M5 x 0.8 (Pilot EXH port) 2 x 4.3 (For mounting) A B PE SMC 38 46 A B A B B A X Manual override P A side: Orange B side: Green EA EB 21.5 21 61 69 6.4 (Light/surge voltage suppressor) (L = 300 to 5000) 121.4 115.8 M12 waterproof connector 60.3 58.5

Check Valve Series AK 1

00 Straight type AKH 04 A 01 S Male connector type With seal (Standard) M5 and 10-32 UNF types are not required.

VEX1

R mm2 02 02 03 04 04 06 10 10 12 14 20 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

Information

G Stainless steel Body material Applicable tubing O.D. 04 06 08 10 12 4 6 8 10 12 Body size 2 Elbow Type 2 3 4 5 6 M5 1/8 1/4 3/8 1/2 Control type Port size 0 1 Meter-out Meter-in M5 01 02 03 04 M5 x 0.8 R1/8 R1/4 R3/8 R1/2 With one-touch fitting 1 Series ASG Needle Valve: Flow Characteristics ASG220F-M5 ASG221F-M5 ASG320F-01 ASG321F-01 ASG420F-02 ASG421F-02 1.5 Inlet pressure: 0.5 MPa Inlet

Table of Contents

A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

Series VQ Metal Seal/Rubber Seal Body Ported

(Specify a model with 9 to 16 stations by using a manifold specification form.) Manifold Specifications Series Porting specifications Applicable stations Port location Port size P, R A, B C3, C4, M5 C3, C4, C6, M5 C4, C6, C8 C6 C6 C10 VQ0 VQ1000 VQ2000 Side Side Side Max. 16 Max. 16 Max. 16 SA applicable to Series EX300 SB applicable to MELSECNET/MINIS3 Data Link (Mitsubishi Electric.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A 2 x Port size 1(IN), 2(OUT) port B B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

KB

Style Tube size/ Connecting female thread size Body size KBV1-M5 KBV1-M6 KBV2-M5 M5 X 0.8 M6 X 1 M5 X 0.8 M6 X 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 KBV3-12 12 KBV4-12 KBV4-16 Tube O.D. Part No.

modular-press-e

switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Modular F.R.L. Pressure Control Equipment

switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Y14-M5 Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

REA/REB

MQQ M Table (1) Recommended Speed Controller Bore size (mm) Model Elbow type RHC Straight type In-line type MK(2) AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1001F-04-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

PA300/500/700

26.1 3.5 7 (Bottom existing hole) M5 x 0.8 through hole 1(P) 3(R) 77.2 A B Body ported: VPA542V26.1 31 3.5 NO NC 2(A) 32 26 Switch mark 24.2 41.5 (Mounting hole) 24.2 Bracket (Mounting groove for M5 thread) 2-R 2.7 (PA port) Rc 1/8 PA 45.9 40.5 45 45 28 4.5 1.6 41.6 22 60 50 9 90.9 (Piping port) Rc 1/4, 3/8 30.7 26.1 3.5 7 1(P) 3(R) (Bottom existing hole) M5 x 0.8 through hole 77.2 5-5-17

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Modular Type Lubricators Series AL

Modular Type Lubricators Series AL AC-A Lubricator Series AL Model AF-A Port size Option AF-A AL10 M5 x 0.8 AR-A AL20 1/8, 1/4 AL-A AL30 1/4, 3/8 AW-A AL40 1/4, 3/8, 1/2 Bracket AC AL40-06 3/4 AF AL50 3/4, 1 AF AL60 1 Pages 508 through to 513 AR AL AL AW AG E AV AF 507 Lubricator AL10 to AL60 Symbol Lubricator AL20 AL40 How to Order AL 30 03 B Option/Semi-standard: Select one each for a

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Table of Contents

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25