7

Note2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.

VDW

L Dimension (mm) n (stations) Dimension 2 3 4 5 6 7 8 9 10 L1 44 66 88 110 132 154 176 198 220 L2 53 75 97 119 141 163 185 207 229 L3 62 84 106 128 150 172 194 216 238 2 stns. x 1 Manifold composition 2 stns. + 3 stns. 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 Note) Manifold base is consisted of the junction of 2

IIIIIIIIII

CONTACT FORM Single Pole, Double Throw TERMINATIONS .110 Quick-Connect AGENCY COMPLIANCES UL/CSA Approved Microswitch OPERATING SPEED 25 MSEC MATERIALS Body..Polysulfone Diaphragm..Polyurethane Spring..Stainless Steel Others..Nylon, Carbon Filled Nylon, Acetal TEMPERATURE RANGE 40 TO 150 F [4-66 C] REPEATABILITY < +/2% F.S.

CG1

(162) 17 (18) 12 (13) M12 X 1.25 M8 X 1.25 Depth 16 90 (102) Up to 300 301to1200 40.5 20 12 (14) 58 150 (162) 17 (18) 22 22 12 (13) M10 X 1.5 Depth 16 90 (102) M14 X 1.5 Up to 300 301to1200 47.5 20 16 (20) 71 182 (196) M10 X 1.5 Depth 22 108 (122) Up to 300 301to1400 60.5 20 16 (20) 71 182 (196) 108 (122) 110 100 Up to 300 301to1500 71 M12 X 1.75 Depth 22 Note 1) ( ): Long stroke Note

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Type Nozzle model Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 Nozzle size Standard type Nil 01 02

Modular F.R.L. Unit

220 77.5 80 50 40 18 9 88 35 9 4.6 74 3 226 187 38 110 235 93 96 70 50 20 11 115 44.5 11 6.4 84 3.3 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

Table of Contents

Specifications. 96 97 98 99 100 100 100 102 103 105 108 108 110 111 112 112 113 113 113 114 114 116 117 117 118 120 126 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 126 126 127 127 131 131 131 132 133 133 134 135 144 144 145 145 149 149 150 151 152 153 153 153

HRL

Polyester band Hanging position Cardboard box 60 or less Forklift insertion side Forklift insertion side Less than 150 mm Wooden skid Less than 150 mm Forklift insertion side Weights and Dimensions When Packaged Model Weight [kg] Dimensions [mm] HRL100-A-20 300 Height 2020 x Width 1200 x Depth 893 HRL200-A-20 327 Forklift insertion side HRL200-A-20 4.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Relative: 150 Numerical data defining operation The operation starts by changing the Movement MOD and Position in step data No.1 temporarily by defining numerical data from the PLC. 160 Operation t [Define numerical data in the Movement MOD and Position in Step No.1.] Movement MOD: 2 (Relative) and Position: 150 are defined from the PLC.

C95Series

Part S humber ore size (mm) .B fA TL TU Te TX TE TO TFl OTT TS TH TF 'z TD~HO MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 a9 12j.o10 MB-S04 40 52 80 60 10 60 63 97 17 9 17 12 45 60 93 16 "'0 .010 50 65 60 60 10 92 75 \09 17 9 17 12 45 60 105 16 _g om Mounting plate (Double clevis) MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 BO 105 20 ...0 a64 .20 ~,084 80 95 100 70 \5 \30 110 150

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet style. 3 98 70 6 158 130 8 198 170 10 238 210 20 438 410 2 78 50 4 118 90 5 138 110 7 178 150 9 218 190 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 Station L1 L2 1.2-69 Series SYJ7000 42 Type Manifold: Side Ported/SS5YJ7-42Station -C6, C8 Grommet(G), (H) 4-4.5 (Mounting holes)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

XM, XY

Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268 29 36 44 10.5 9 9 78 99 116 487 Stainless steel High Vacuum Angle/In-line Valve 2 Stage Control, Single Acting/Bellows, O-ring Seal XMD, XYD Series PAT.

CS1

Bore (mm) 125 140 160 180 200 250 300 H A H1 L1 H A I type single knuckle Y type double knuckle 125 65 125 140 160 180 / 200 250 300 100 156.5 I-12 Y-12 125 3.5 65 50 110 105 161.5 I-14 Y-14 140 3.5 76 50 110 110 170.5 I-16 Y-16 155 3.5 83 56 120 125 193.5 I-18, I-20 Y-18, Y-20 160 3.5 88 63 135 160 245.5 I-25 Y-25 195 3.5 106 71 160 175 266.5 I-30 Y-30 210 3.5 115 80 175 Accessory SCS1

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...