C95

63 63 100 80 CP95 200 200 50 40 50 50 100 100 C95 63 Load weight: m [kg] Load weight: m [kg] 32 50 40 50 40 30 50 40 30 C92 32 20 20 CA1 [Example] 10 10 CS1 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 s] Maximum speed: V [m m/ s] Maximum speed: V [m m/ Graph 7 Graph 4 0.5MPaP 0.5MPaP 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series MB/CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series MB/CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ7140-02 Cylinder is in extending.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Coil voltage 1 Note) Refer to p.2.10-39 for sub-plate part No. 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others When requiring AC specification of grommet and/or special voltage, consult SMC. 2 3 4 5 6 9 2.10-24 VQZ100/200/300 Base Mounted How to Order Valve VQZ200/300 VQZ 2 1 5 5 M Series 2 3 VQZ200 Body width 15mm VQZ300 Body width 18mm

CQ2

, 63/10 to 50 2.3-70 MU Axial piping (Centralized piping) 12, 16, 20, 25 32, 40, 50, 63, 80, 100 12, 16/5 to 30 20, 25/5 to 50 32, 40/5 to 100 50 to 100/10 to 100 Double acting Single rod CQP2 2.3-82 Spring 12, 16, 20 25, 32, 40 50 Single acting 12 to 40/5, 10 50/10, 20 2.3-90 return/extend CQP2 Large bore size Single rod CQ2 125, 140 160 2.3-100 10 to 300 Double acting Double rod CQ2W 125

Table of Contents

PF2A751/551 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 20 40 Pressure loss (kPa) Pressure loss (kPa) 15 30 10 20 5 10 Flow rate (l/min) 0 200 0 50 100 150200250 300 400 350 450 500 20 50 100 150 Flow rate (l/min) Sensor Unit Construction PF2A710/750 PF2A510

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

LEF-OM002xx

V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

With light/surge voltage suppressor With surge voltage suppressor With surge voltage suppressor Note) Standard lead wire length: 300 mm. Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

MNB

/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 100 80 200 200 50 40 50 100 100 63 Load weight: m(kg) Load weight: m(kg) 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

500 600 700 800 900 1000 50 100 150 200 300 400 500 600 700 800 900 32 40 50 63 80 100 125 48 4 15 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 37.5 50 88 54 4 17 75 250 225 200 175 188 313 150 163 288 125 138 263 23 100 113 238 36 75 100 213 54 12.5 25 37.5 50 88 69 5 24 87 250 225 200 175 200 325 150 175 300 125 150 275 25 100 125 250 51 75 112

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

[mm] Load position [mm] Load [N] High rigidity guide LEKFS LEFS 25 0.022 (50% reduction) 0.044 25 200 32 0.036 (50% reduction) 0.072 30 450 40 0.027 (50% reduction) 0.053 37 500 MZero table clearance Table Clearance 300 mm Size Displacement due to table clearance [mm] High rigidity guide LEKFS LEFS 25 0 0.079 Amount of displacement from the 300 mm position 32 0 0.068 40 0 0.052 1 Electric

Compact 5-Port Solenoid Valve

400 500 600 700 800 6 CJ2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 60 mm 10 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 63 80 0 100 200 300 400 500 600 700 800 Average speed [mm/s] * Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

With (1) Without (1) Coil voltage 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others (1) With With (Without light) 1 (1) 2 Note 1) DIN is applicable to VQZ 200 and 300.

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30 40 Work load [kg] Work load [kg] LEJS40B LEJS63B 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ3140-M5 Cylinder is in extending.

Series VQ Base Mounted Metal Seal/Rubber Seal

Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 4 2.7 (0.15) VQ0 (Metal seal) 4 3.6 (0.2) VQ0001 (Rubber seal) Series VQ1000 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 300mm Series CM2 Pressure 0.5MPa Load factor 50% Piping length 5m Speed controller

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of