Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

AZ1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Single Axis Electric Actuator Series LJ1

to 80 5 phase to 80 2 phase to 100 Sanyo Denki Co., Ltd. 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 30 5 phase to 30 2 phase to 80 5 phase to 80 2 phase to 100 LXSH5SB LXSH2SB LXSH5SA LXSH2SA LXSH5BC LXSH2BC LXSH5BD LXSH2BD LXSH5SB-B LXSH2SB-B LXSH5SA-B LXSH2SA-B LXSH5BC-B LXSH2BC-B LXSH5BD-B LXSH2BD-B 5 phase to 200 2 phase to 200 5 phase to 100 2 phase to 100 5 phase to 30

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

VFR

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 L3 L4 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 20 Stations 341 328 304 296 2 Stations 53 40 16 8 680 Manifold specifications

MXS

0.020 MXS2030 MXQ 0.02 0.04 MXS2020 MXS2050 MXS2040 0.015 MXS2010 MXS2030 MXS2020 MXS2010 0.010 MXF 0.01 0.02 0.005 MXW 100 200 300 0 0 0 100 200 300 160 120 80 40 240 200 Load (N) Load (N) Load (N) MXP 25 25 25 Lr=154mm MG 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 MGP 0.06 MXS25-125 MXS25-150 MXS25-125 MXS25-100 MXS25

SQ1000/2000

P-80 (D)

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

CLS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed:

MXS Series Air Slide Table

0.03 0.06 MXS2075 0.020 MXS2030 0.02 0.04 MXS2020 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 0 100 200 300 160 120 80 40 240 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 25 25 25 Lr=154mm 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25

MTS

0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

SMC Pneumatic Clean Series

3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40/50/63/80/100 Bore size Suction flow rate l/min (ANR) 20/25/32/40 50/63/80/100 1.5MPa

Modular F.R.L. Unit

G 30 41 41 50 50 H 24 35 35 40 40 B 132 184 187 222 224 E 41.5 55 55 72.5 77.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AC20C AC25C AC30C AC40C 50 71 71 88 88 2 Note 1) 80 80 80 105 105 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20C only, the position of the pressure gauge is above the piping center.

Modular F.R.L. Unit

77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model L1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

Ejector Valve Unit Series ZYY/ZYX 1

(OUT1: Red, OUT2: Green) Setting trimmer rotation angle 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17 mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) Current consumption 0.2 MPa Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5 MPa is applied for 1 second or less.