Modular F.R.L. Unit

AF40-06 AF50 AF60 Model Model AF30 AF30 AF40 AF40-06 AF50 AF60 AF20 1/4 3/8 1/2 1/4 3/8 1/2 3/4 1/4 1/4 3/4 1/8 Port size Port size 3/4 1 3/4 1 1 3/8 3/8 1 1/4 How to Order How to Order AF 30 B X430 03 AF 30 B X425 03 Body size Body size For high pressure 20 30 40 50 60 For high/low temperature 30 40 50 60 3/8 1/2 3/4 1 1/8 3/8 1/2 3/4 1 X430 X440 Low temperature High temperature Option

CL

to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 30 35 35 40 40 50 50 56 59 67 73 77 85 112.5 121 133 44 52 64 78 92 115 128 144 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 69 78 84 92 100 141.5 150 167 16 20 20 25 30 36 36 40 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

MNB

side) 1 10 60 65 75 80 85 2 (Different sides) 2 (Same side) 70 75 80 85 70 75 80 85 35 55 35 + 30 (n 2) n = 2, 3, 4 70 + 30 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 n (Different

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(With screws) 30, 40 1/4, 3/8, 1/2 VXZ30S-14A-1 50, 60 3/4, 1 VXZ50S-14A-1 Brass, Stainless steel 1/8, 1/4, 3/8 JSX20-12A-4 30 1/4, 3/8 20 Aluminum 1/8, 1/4, 3/8 VX021N-12A 30 1/4, 3/8 VX022N-12A Stainless steel Piping 2.

MXS Series Air Slide Table

F A F Lr 6 6 6 Lr=24mm 0.020 0.04 0.04 0.015 0.03 0.03 Table deflection mm Table deflection mm Table deflection mm MXS6-10 MXS6-20 MXS6-30 MXS6-30 MXS6-20 MXS6-10 MXS6-40 MXS6-50 0.010 0.02 0.02 MXS6-20 MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 0 10 20 30 40 0 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 8 8 8 Lr=50mm 0.020

CY1

124 150 176 188 TB 14 14 W 50 50 50 60 60 70 X 25 30 40 40 60 70 ZZ 132 137 156 182 180 192 Model CY1B20 CY1B25 CY1B32 CY1B40 CY1B50 CY1B63 Mounting nut/included (2pcs.)

MGG

(mm) Bore size (mm) Stroke range (mm) AC AF AB AE AA AD AP N M L F K C E J A B D G H I 20 25 32 40 50 75, 100, 125, 150, 200 11 30 16.5 M5 x 0.8 depth 10 12 75 25 45 25 80 60 92 55 99 24 5.5 M8 x 1.25 depth 14 108 60 30 9.5 depth 6 13 16.5 30 M6 x 1 depth 12 16 85 30 54 35 100 70 113 65 109 26.5 6.6 M10 x 1.5 depth 18 130 65 35 11 depth 8 75, 100 125, 150 200, 250 300 16 35 19 M6 x 1 depth

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

REA/REB

Model determination 3 Series REA Model Selection 2 Design Parameters 1 Selection Method 25 40 32 500 500 300 400 300 300 Recommended driving force Fn (N) 200 Recommended driving force Fn (N) Recommended driving force Fn (N) 200 200 100 100 100 50 40 20 30 40 50 20 30 40 50 20 30 Usable range Usable range Usable range

Applicable Auto Switch Model

(Tolerance 30%) 5.3-30 Solid State Switch/Band Mounting D-H7C Applicable Actuator Series Connector Series Bore size (mm) CDJ2 6, 10, 16 CDVJ3, CDVJ5 10, 16 CDLJ2 16 CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, REC 20, 25, 32, 40 CDG1, MGG 20, 25, 32, 40, 50, 63 RSDG 40, 50 MGC 20, 25, 32, 40, 50 RHC, MLGC 20, 25, 32, 40 Specifications PLC: Programmable Logic Controller D-H7C (With indicator light

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, Different sides DD-A44 n Same side -X 10 20 100 75 80 90 75 80 90 100 100 100 1 Different sides

CM2

20 33.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 137 146 30 15 30 9 14 22 30 62 9 10 10 13 25 8 45 26 34.5 37.5 5.5 M10 X 1.25 1 to 300 19.5 17 6 M26 X 1.5 139 148 30 15 9 14 22 30 64 9 10 12 13 32 8 45 26 21 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1 to 300 22 8 177 188 39 11 18 24 38 88 10 15 14 16 40 11 50 32 With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 51 to 100 1 to 50 51 to 100

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

IDG

173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

C85

40 4.5 22 26 11 25 73 68 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23