Booster Regulator/Air Tank

150 500 250 250 824 846 (mm) A 531 570 494 527 B 444 479.8 444 479.8 C 3/8 1/2 3/8 1/2 D Note) 519 543 Booster regulator model The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

SMC Pneumatic Clean Series

Ejector Vacuum regulator Outside of clean room Outside of clean room Vacuum pump Duct piping Front matter 10 System Circuit in Clean Room Clean blow system Example of equipment to suit each clean blow grade 100 Line A Particle diameter: 0.1 m or more Valve operating frequency: 0.5Hz Particle generation Particles/min 80 Line A: For oil-free air blow Line B: For clean blow Line C: For clean

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1.5 30 27 22.4 9 19 60 255 25 22 18 7 14 55 250 M16 x 1.5 0.025 0.064 +0.052 0 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 285 30 27 22.4 9 19 60 280 M20 x 1.5 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 28 11 24 70 327.5 M24 x 1.5 0.030 0.076 +0.062 0 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 35.5 13 30 80 367.5 M30 x 1.5 0.030 0.076 0.036 0.090 100 100 80 65 M48 x 1.5 75

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

VFR

Material Description Pilot valve assembly M8 x 80 VFS6000-15 VFR61 VFS6000-15 VFR62 M8 x 80 VFS6000-15 VFR63/64/65 NBR Hexagon socket head screw Gasket o M8 x 80 Refer to How to Order Pilot Valve Assembly on page 3-5-94. Steel !0 !

MXW Series Long Stroke Slide Table

1 640 7 138 109 210 360 225 300 65 80 MXW25-275 1 690 7 163 134 232 395 245 320 60 60 52 MXW25-300 2 740 8 188 159 153 MXW Series Long Stroke Slide Table Auto Switch / Suitable Mounting Position at Stroke End Detection Reed switch: D-A90 (V), D-A93 (V), D-A96 (V) Switch operation range Stroke (mm) Model 25 50 75 100 125 150 175 200 225 250 275 300 A 52.5 31.5 27.5 27.5 27.5 27.5 B 79.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

When female thread is used, use a washer etc. to prevent the contact part at the rod end from being deformed depending on the material of the workpiece. 3.5 H ZZ + Stroke (mm) P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 ZZ H H2 H1 B2 B1 80 80 82 108 KA FL 10.5 10.5 10.5 13.5 A 20 25 32 40 GB 6 8 10 12 GA 8 8 8 11 AL 18 22 22 24 D 15.5 19.5 19.5 21 WA 31 31 31 36 E 8 10 12 14

240

0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 200 200 250 250 160 160 Me 200 200 L3 [mm] L3 [mm] L3 [mm] L3 [mm] 120 120 m L3 150 150 Z 80 80 100 100 40 40 50 50 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L4 L4

Compact and Lightweight

ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 250 100 250 100 100 100 Vacuum pressure Vacuum pressure ZL Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 200 80 200 80 80 80 Vacuum

Non-contact Gripper

] Consumption flow rate [L/min (ANR)] 250 100 160 200 80 120 150 60 40/60/80 80 100 40 40 50 20 0 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) Air Consumption [Low Profile Cyclone Type] Size: 20/25 35 Consumption flow rate [L/min (ANR)]

CQS

CQ2 Mounting Bolt for CDQSK MU Mounting bolt Mounting bolt C' D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 Model C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 Special long bolt for through hole mounting is available as an option. How to Order: Specify the required bolts.

SMC Pneumatic Clean Series

3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40/50/63/80/100 Bore size Suction flow rate l/min (ANR) 20/25/32/40 50/63/80/100 1.5MPa

A

63 16.5 IS1000E-303 38 IS1000M-6 15 100 72.5 23 54 AC3000 IS1000E-304 12 40 80 63 17.5 *Without Yoke Clip.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

5H10 depth 8 8-M5 x 0.8 thread depth 8 45 20 Cable entry side Body mounting reference plane 5H10 depth 6 Z section detail 100 201 60 50 Z section 43 Stroke + 125 (table movement range) 192 3.3 30 A section 90 83 5.8 1.7 4.8 80 Stroke + 360 A section detail (Switch groove) 11.5 40 (T-slot pitch) 36 45 3-5H10 depth 5 9.4 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting

NCA1

Fully adjustable cushion For further information, please consult CAT: N304-EX or contact your local SMC sales office. 6-15-4 4 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Specifications Non-rotating rod Type Standard Double rod Air Air Fluid Air Non-lube Non-lube Lubrication Non-lube 250 psi (1.75 MPa) 250 psi (1.75 MPa) Max. operating pressure 250 psi (1.75 MPa) 8 psi

NCA1

Fully adjustable cushion For further information, please consult CAT: N304-EX or contact your local SMC sales office. 6-15-4 4 Series NCA1 NFPA Interchangeable Air Cylinder Medium Duty Series Specifications Non-rotating rod Type Standard Double rod Air Air Fluid Air Non-lube Non-lube Lubrication Non-lube 250 psi (1.75 MPa) 250 psi (1.75 MPa) Max. operating pressure 250 psi (1.75 MPa) 8 psi

VZ100/300/500

If the socket will be used again, first spread the hook outward. 80 A DXT170 Lead wire color Lead wire length Lead wire with socket Lead wire length L mm Symbol Note Symbol Socket only (2 pcs.)

Series AP3500

Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 14 to 160F (10 to 71C) (No freezing) 2.8 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 4 x 10-9 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10in.(0.25 m), 7in.(0.18 m), 5in.(0.13 m) Face seal, Tube weld 80 to 100 psig (0.55 to 0.7 MPa) 10-32 UNF thread Side Bottom mount 0.76

CXT

QW RW T W X Y Z Bore size (mm) S 140 32 60 33 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 Long Stroke X Y Z Bore size (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 40 125, 150, 175, 200, 250, 300 55 14 14 8-27-9 10 Series CXT Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch Solid state switch A B W D-A9 D-M9 D-F9BAL