High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing CY1S6 to 40 !

Mounting: B (Through Hole), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 30mm

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50/10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Through

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50/45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Through

Mounting: B (Through Hole), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 25mm, First Stroke: 10mm

Mounting: B (Through Hole), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 10mm

Mounting: B (Through Hole), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 45mm

Mounting: B (Through Hole), Bore Size: 32mm, Thread: TN (NPT Thread), Full Stroke: 50mm, First Stroke: 5mm

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50/10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Through

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 50/45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket: Through

Mounting: Through Hole, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 25mm, First Stroke: 10mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Through Hole, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 5mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Through Hole, Bore Size: 32mm, Thread: NPT Thread, Full Stroke: 50mm, First Stroke: 30mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

MXW

40 40 (Y) (Y) 10 Operating direction (B) 6H9 +0.030 depth 5.5 0 41 160 (Hexagon socket head taper thread plug) 10.5 Operating direction (B) (A) 9.5 11 24 24 16 12.5 A 30.5 60 50 32.5 A Cross section AA Z 5-M6 x 1 thread depth 12 4 x H G depth 5.5 6H9 +0.030 H 7 Bottom through-hole 5.1 0 F E 6H9 +0.030 depth 5.5 0 (mm) Z H G F E Model MXW20-100 337 48 75 168 87 MXW20-125 362 52 79.5 185 91

Modular Type Filter Regulator Series AW

54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model Port size B 160 214 251 255 B 234 272 275 B 208 246 249 B 209 247

Cylinder with Lock Series CLS

20 40 80 40 18.5 130 74 to 1200 (mm) Bore size (mm) Stroke range (mm) 125 140 160 J K KA L M MM N P RR S U W H Z ZZ M14 x 1.5 15 31 65 19 M30 x 1.5 35 1/2 29 98 35 110 383 412 to 1000 M14 x 1.5 15 31 75 19 M30 x 1.5 35 1/2 32 98 40 8 110 393 425 to 1000 M16 x 1.5 17 36 80 22 M36 x 1.5 39 3/4 36 106 45 9 120 438 474 to 1200 With rod boot (mm) Stroke range (mm) Bore size (mm) 125 140 160

MLGP

static load) N 157 245 402 629 982 1559 2513 3927 Standard Strokes Bore size (mm) Standard stroke (mm) 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed

MLGP

static load) N 157 245 402 629 982 1559 2513 3927 Standard Strokes Bore size (mm) Standard stroke (mm) 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 W 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 Minimum Auto Switch Mounting Stroke Manufacture of Intermediate Strokes (mm) Spacers installed Spacers are installed