Rotary Table/

61 60 28 40 22 6 65 67 65 32 48 19.5 30 6 76 13.5 67 65 32 48 22 6 68 77 75 35 54 21.5 34 7 87 15.5 77 75 35 54 24 7 77 Dimensions other than above are identical to the high precision type.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Silicon rubber Urethane rubber Fluororubber EPR 50-01-A18 75-01-A18 289 147 ZCUK 75-01-A18 ZPT100HBNJ25-01-A22 535 168 40 50 63 80 100 125 1 0 ZPT50HBNJ25-01-A18 50-01-A22 575 143 AMJ 2 0 50-01-A18 75-01-A22 620 163 3 0 75-01-A18 100-01-A22 659 201 AMV 6 0 ZPT63HBNJ25-01-A18 ZPT125HBNJ25-01-A22 719 208 12 1 50-01-A18 50-01-A22 228 759 AEP 22 3 75-01-A18 75-01-A22 249 804 ZPT80HBNJ25-01-A18

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

KJ

Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

DXT170-75-1 Connection/Disconnection of socket with lead wire Connection Insert lead wire and crimped socket into square holes (indicated as A, B, COM) of connector. Press the socket in fully until the hook of the socket locks into the groove of the connector housing. Confirm the locked position by lightly pulling on the lead wire.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-16 XMC-25 XMC-40 XMC-50 XMC-63 XMC-80 40 50 65 70 88 90 26 28 36 38 45 56 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYC/In-line type C D G Fd C (K flange) B J H 45 E A Fn (KF flange) (mm) Model A 85 115 129 158 189 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H J XYC-25 XYC-40 XYC-50 XYC-63 XYC-80 100.2 130 178 209 268 28 36 38

CJ5-S

, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CJ5-S

, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 RS H A Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Made to Order 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Page 34 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,

Modular Type Filter Regulator Series AW

Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B 173 201 239 C 73 86 92 D 52 59 75 E 40 57 73 G 45 50 70 A 40 53 70 H 63 66 76 J 27

Shock Absorbers and Rate Controls

UN .75 1.98 5.50 |,l/A 1.50 1.15 N/A N/A Pn?r 00rt t2.9 rI.) 2.48tln ?Yr-l? ul .75 L98 2.257.50 [/A 1.503.75NlA r{/A Pl 2t 50tt t, -2, .3 t7.9i18.62 2.48{ln 2Y2'12 UN .75 2.38 2.38 9.50 N/A t.50 4.15 N/A N/A All dimensions in nches. Sh*ck Absorbens Non-Adjustable Hydraulic Series qigfE.

Integrated Controller

Size Non-rotating accuracy 16 1.1 25 0.8 32 0.7 + Force Conversion Graph (Guide) EQY32 EQY16 800 700 600 500 400 300 200 100 0 160 Lead 4: EQY32C Lead 2.5: EQY16C 140 120 Lead 8: EQY32B Lead 5: EQY16B Force [N] Force [N] 100 Lead 16: EQY32A Lead 10: EQY16A 80 Lead 24: EQY32H 60 40 Min. 25% Max. 45% 20 Min. 30% Max. 70% 0 15 20 25 30 35 40 50 45 10 20 30 40 50 90 70 80 60 Pushing force set

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 65 40 45 50 55 60 65 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M3 x 40L x 45L x 50L x 55L x 60L x 65L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L

XL

SMC specified parts should be used for service parts. 45 Series XL Specific Product Precautions 5 Be sure to read before handling.

Cylinder with Lock Series CLS

20 40 80 40 18.5 130 74 to 1200 (mm) Bore size (mm) Stroke range (mm) 125 140 160 J K KA L M MM N P RR S U W H Z ZZ M14 x 1.5 15 31 65 19 M30 x 1.5 35 1/2 29 98 35 110 383 412 to 1000 M14 x 1.5 15 31 75 19 M30 x 1.5 35 1/2 32 98 40 8 110 393 425 to 1000 M16 x 1.5 17 36 80 22 M36 x 1.5 39 3/4 36 106 45 9 120 438 474 to 1200 With rod boot (mm) Stroke range (mm) Bore size (mm) 125 140 160

MXF

36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E Stroke Model Stroke A 100 30 50 75 20 10 100 75 50 30 20 10 8 (5.5) 11.1 (8.6) 13.8 (11.3) 18.7 (16.2) 8 (5.5) 3 (0.5) 11.1 (8.6) MXF8 9.5 10 5 10 27.1 (24.6) 23.8

High Vacuum Angle Valve, XL Series

80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas transmission Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas transmission {Torr l/s} External 40 45 60 60 95 105 XLG Operating time ms Note 2) 45 50 85 90 132 150 XLGV Flange type KF (NW), K (DN) KF (NW) Body: Aluminum alloy Bellows: Stainless steel Seal: FKM (fluoro rubber