MG

25 10 10 25 CX 20 20 5 5 D16 16 -X 201 1 Data 0.5 10 10 50 100 200 0.5 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) (3) 25 Stroke, V = 400 mm/s (4) Over 25 Stroke, V = 400 mm/s 300 300 100 100 200 200 80 80 100 100 63 63 50 50 50 Load weight m (kg) Load weight m (kg) 50 40 40 32 32 10 10 25 25 5 5 20 20 16 16 1 1 0.5 50 100 200 0.5 50 100 200 10 10 Eccentric distance l(

MY1

Maximum allowable moment and load weight Max. allowable moment (Nm) M1 6 10 15 30 59 6 10 15 30 60 Max. load weight (kg) m1 18 26 38 57 84 18 25 35 49 68 Bore size (mm) Model M2 3.0 5.0 9.0 m2 7 10.4 15 23 33 7 10 14 21 30 m3 2.1 3 4.5 6.6 10 2.1 3 4.2 6 8.2 M3 1.0 1.7 2.4 5.0 8.0 2.0 3.0 5.0 16 20 25 32 40 16 20 25 32 40 MY1MW 15 24 3.0 5.0 8.5 14 23 Parts list MY1CW No.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

78 80 80 27 32 38 48 59 72 59 71 8 10 12 14 16 18 16 17 17 17 17 18 10 7 4 5 5.5 6 7.5 0.5 1 1 1.25 2 3 5.5 6.5 7.5 8.5 10 14.5 Bore size (mm) Bore size (mm) S GA ZZ GB HD HH PD (17.5) (11.5) (19.5) (11.5) 20 25 32 40 50 63 20 25 32 40 50 63 12 6 6 6 8 10 10 77 77 79 87 102 102 12 12 12 12 13 13 24.2 114 13 13 13 16 20 20 0.25 stroke (22.5) (13) 10(12) 26.7 119 M10 x 1.25 (25) (13) 10(12

REA/REB

(Refer to page 10-2-25.)

REA/REB

(Refer to page 10-2-25.)

C85

10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13

Battery-less

X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Table of Contents

1/4, 3/8 LVC4 10 10, 12 3/8, 1/2 LVC5 16 12, 19 1/2, 3/4 LVC6 22 19, 25 3/4, 1 Model Orifice diameter Metric Tubing O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Duty ratio: 50% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000

MY1

MX 6.0 3.0 2.0 18 7 2.1 16 200 10 5.0 3.0 25 10 3 20 40 50 40 50 MTS 15 8.5 5.0 35 14 4.2 25 MY1C 30 14 10 49 21 6 32 100 30 MY 30 60 23 20 68 30 8.2 40 115 35 35 93 42 11.5 50 20 20 CY 150 50 50 130 60 16 63 50 The above values are the maximum allowable values for moment and load.

CQS

25 Note) 2 15 Note) 5 10 1.

15

10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 1 2 3 4 5 0 5 10 15 0 5 10 15 20 25 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 5 10 15 0 5 10 15 20 25 0 1 2 3 4 5 Work load

CY1

15 20 25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral piping

REA/REB

M1 = F x L A M2 = F x L M3 = F x L Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing type High precision guide type CY B 1 3 Guide non-integrated type Guide integrated type 6 10 15 20 25 32 40 50 63 CY R 1 3 Magnetically coupled rodless cylinder 6 10 15 20 25 32 40 CY1S 6 10 15 20 25 32 40 CY1L 10 15 20 CY1H 25 (Single axis) 25 (Double axis) 32 Bilateral piping type Centralized piping type Auto switch Shock absorber The piping type for CY1R6 is bilateral piping only

5 Port Solenoid Valve Series SY3000/5000/7000/9000

+ 25 18.5 10 0.8 16.9 13.1 10-SY3120-H-M5(-F2) G 22.5 (A, B port) M5 x 0.8 28.5[35.5] 28.5[35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) (For manifold gasket positioning) 2-1.5 die-cast hole 19 22.5 L plug connector (L): 10-SY3120-L-C6,N7(-F2) 1 1 C4,N3 M plug connector (M): 10-SY3120-M-C6,N7(-F2) C4,N3 M8 connector (WO): 10-SY3120-WO-C6,N7(-F2) C4,N3 1 28.5[35.5] 13.1

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph