IDU/IDF

Dryer A G F E D C B B 7kVA IDF120D 360 30 11 300 260 400 540 IDF-TR7000-8 94 Three phase compound 9kVA IDF150D 400 40 13 350 300 450 650 IDF-TR9000-8 109 220, 240, 380, 400, 415, 440V (50/60Hz) 200V (50/60Hz) 11kVA IDF190D 550 60 13 400 350 600 450 IDF-TR11000-8 131 4-F A 13kVA IDF240D 400 60 13 350 300 450 600 IDF-TR13000-8 138 D 18kVA IDF370B 400 40 13 350 300 450 650 IDF-TR18000-8 179

Table of Contents

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

High Vacuum Angle Valve

For 100/120C 1 XL Series High Vacuum Angle Valve Aluminum High Vacuum Angle Valve XL-2 Series New Variations Type Series Valve type Shaft seal type Application Flange size 16 25 40 50 63 80 100 160 XLA-2 Single acting (N.C.) Bellows seal Dust free, P.3 cleaned Single acting (N.C.)

Tie-rod Type Hydraulic Cylinder

Tie-rod Type Hydraulic Cylinder CHA Series CHQ CHK CHN CHM CHS CH2 CHA CHA Related Products DCHA Series Nominal pressure: 3.5 MPa Bore size (mm): 40, 50, 63, 80, 100, 125, 160 395 Tie-rod Type Hydraulic Cylinder Double Acting/Single Rod CHA Series 40, 50, 63, 80, 100, 125, 160 3.5 MPa How to Order Bore size 40 50 63 80 100 125 160 Cylinder options 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm 160

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

VK300

Unrestricted 300/50 m/s2 Manual override Lubrication Mounting orientation Impact/Vibration resistance Enclosure (2) Dustproof Note1) Based on dynamic performance test, JIS B 8419: 2010.

Micro Mechanical Valve Series VM1000

M5 x 8 Hexagon socket head cap screw Depth 15 4 x M6 x 1 At lever length 141.2 mm 3 x 1/8 50 T.T. 30 O.T. 20 P.T. 2.3 N F.O.F. 4 x 5.1 mounting hole 2316 5 Port Mechanical Valve Metal Seal Series VZM400 RoHS Specifications Compact design, large flow capacity High cycle rate, long life/300 c.p.m. or less Piping possible to any EXH port.

VK300

For details, refer to the Best Pneumatics Vol. 3. 4-5-1 2 Series VK300 How to Order Electrical entry D: DIN terminal DO: DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) For the connector part number, refer to page 4-5-10.

Air Slide Table Series MXQ

0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm

BP1000

MPa) Operating Parameters Operating pressure Gas Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Leak rate Connections Installation Internal volume Mass Select compatible materials of construction for the gas 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 90 psig (0.6 MPa) 180 psig (1.2 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 300 psig

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 8-30-57 58 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 8-30-57 58 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 MGF40 20MGF40 MGF40 10 10 10 MGF40 Data MGF40 10 5 4 3 5 4 3 2 2 5 5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 200 mm l = 300 mm Graph (3) Graph (4) v = 150 mm/s or less v = 200 mm/s or less Graph (7) Graph (8) 20 300 300 200 200 MGF100 MGF100 20 100 100

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

DIN terminal: VKF334-D-01 Base mounted Grommet: VKF334-G-01 33.5 16.7 26 4 Manual override (Non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 MAX.10 2-4.3 (Mounting hole) Applicable cable O.D. 4 to 6.5 48.5 300 26 4 Pg.7 3 27 (Lead wire length) Manual override (Non-locking) A 20.5 18.5 mPm 3 32 59 68 78 70.5 43.5 12 7.5 P R 7.5 12 43.5 13.5 11 33.5 P R 13.5 11 Refer to grommet type for other

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load

Guide Table Series MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 Load weight m0 (kg) MGF63 Load weight m0 (kg) Load

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

equipped with bracket. 1 Series VKF300 Standard specifications Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5MPa {5.1kgf/cm}) Note 1) Direct operated type 2 position single solenoid Air Maximum 50C 10ms or less (standard), 15ms or less (low power comsumption type) Non-locking push type Not required (if lubricated, use class 1 turbine oil ISO VG32) Unrestricted 300

VKF300

equipped with bracket. 1 Series VKF300 Standard specifications Type of actuation Fluid Ambient and fluid temperature Response time (at 0.5MPa {5.1kgf/cm}) Note 1) Direct operated type 2 position single solenoid Air Maximum 50C 10ms or less (standard), 15ms or less (low power comsumption type) Non-locking push type Not required (if lubricated, use class 1 turbine oil ISO VG32) Unrestricted 300

I/O Configurator (NFC version)

bytes) Increase and decrease by 128 points (16 bytes). b) System input 1280 points/ 160 byte Available This is not settable when the I/O mapping is set to "Auto". size 16, 128 to 1280 points (2, 16 to 160 bytes) Increase and decrease by 128 points (16 bytes).

I/O Configurator (NFC version)

bytes) Increase and decrease by 128 points (16 bytes). b) System input 1280 points/ 160 byte Available This is not settable when the I/O mapping is set to "Auto". size 16, 128 to 1280 points (2, 16 to 160 bytes) Increase and decrease by 128 points (16 bytes).