LEC-OM02904 (FR-BSF01FR-BLF) 11 26 11 (2) (a) () TDKZCAT3035-1330NECTOKIN ESD-SR-250 ZCAT3035-1330(TDK) [] [mm] [mm] 10100MHz 100500MHz 341 391 131 80 150 301 TDK (ZCAT3035-1330) ZCAT3035-1330 (b) () ACAC ON OFF MC MC SK 20cm 20cm ()CR-50500(OKAYA) C R [30%] [mm] AC[V] [F20] 625VAC50/60Hz 60s -2000VAC A W G 1 8 1 5 1 250 0.5 50(1/2W) 3 . 6 50/60Hz 60s C R 5 0 5 0 0 6 1 6 1 3 0 0 m i m 3 0 0
0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa
Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.
cylinder body Can be mounted on four sides CS1 1in = 25.4mm CQ2 Overall length mm Weight kg (lb) Series 180 219 16.6 (36.6) CQ2 200 226 20.6 (45.4) 180 30.4 (67.0) 385 CS1 200 39.5 (87.1) 390 Comparison with 100mm stroke and rod end male threads Variations Applicable auto switch models Rod end configuration Standard strokes Size Type Action Series 10 20 30 40 50 75 100 125 150 175 200 250
Exploded View: VQ1000-Plug Lead Unit (F, P, T, S kit) . 115 115 116 121 122 122 123 126 126 127 130 131 132 136 140 144 148 152 156 160 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 164 167 168 172 174 176 177 179 184 184 185 186 186 187 188 188 190 194 198 202
With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model B B 107 160 214 251 255 B B AC10A AC20A AC30A AC40A 208 246 249 234 272 275 209 247 250 AC40A-06 6 F.R.L.
A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80 160
A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80 160
materials Pad diameter: 63, 80 Compared with the ZP series ( ) * The pad material when weight was measured is NBR. 8 16.4 ZP (Current model) ZP3E ZP2/Flat type ZP3E/Flat type with groove Pad diameter Suction port Area [mm2] Suction port Area [mm2] 32 8.4 55.4 40 6 28.3 50 63 8 50.2 16.4 211 80 100 10 78.52 125 Pad diameter Weight [g] Weight [g] 32 56 40 91 57 50 110 75 63 230 150 80 270 160
151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 ARM2000 14-4-54 37 Manifold Regulator Modular Style Series ARM2500/3000 How to Order F.R.L.
151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 ARM2000 14-4-54 37 Manifold Regulator Modular Style Series ARM2500/3000 How to Order F.R.L.
Stations L1 L2 3 74 56 6 122 104 8 154 136 10 186 168 20 346 328 2 58 40 4 90 72 5 106 88 7 138 120 9 170 152 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1.2-45 Series SYJ5000 40 Type Manifold: Bottom Ported/SS5YJ5-40Station -M5 Grommet (G), (H) (Lead wire length) G: 300 H: 600 4-4.5 (Mounting holes) 13 (Pitch) P=16 21 103.2 (GZ, GS
l b --" ,m'i$;:f, 4ra 20 Standard Stroke lmm) 30 40 50 60 75 100 125 175 200 225 250 275 300 350 400 150 Y f r N t * w -l Yw Y Ns a a a a a a a a a a a a a o a a a a a a a a a a a a a a a a a '*?
Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.
Standard Strokes Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1mm increments, up to the maximum stroke. However, add "-XB10" to the end of the part number for non-standard strokes from 51 to 599.
Standard Stroke Standard stroke (mm) Maximum manufacturable stroke (mm) Bore size (mm) 16 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1000 25, 40 1500 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. However, add -XB10 to the end of the part number for non-standard strokes from 51 to 599.
500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401 to 1500 270 130 Max. acceleration/deceleration [mm/s2] 20 (Refer to pages 124 and 125 for limit according to work load and duty ratio.)
to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3 4 VEX3 02 5 7 9 VEX3 20 2 4 Air operated Base mounted External pilot solenoid valve VEX3 21 2 4 to 1 8 1 2 3.3 to 13 Internal
250 Note) Refer to p.3.11-5 for cautions on end lock.
Bernoulli Type Cyclone Type High lift Vibration reducing High lifting force: Max. 44 N* Amplitude of the workpiece during gripping: 0.01 mm*or less * Solar battery silicon cell (l125 mm, t = 250 m) * In SMC conditions (How to calculate: Page 730) Non-contact gripper * Outer body diameter: 100 Lifting force (Supply pressure: 0.4 MPa) Workpiece (Solar battery silicon cell) Amplitude 50 40