7

Q 200 VAC 9 50A N.C. S CAC408 50 50A Flange R 230 VAC G N.O.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Rated voltage Symbol Rated voltage Symbol Rated voltage 1 100 VAC 5 24 VDC B 24 VAC 2 200 VAC 6 12 VDC J 230 VAC 3 120 (110) VAC 7 240 VAC 4 220 VAC 8 48 VAC Symbol Port size Size 30 40 50 60 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V i Electrical entry o Oil-free option Symbol Option Nil None D Oil-free Symbol Electrical entry CE/UKCAcompliant Symbol Electrical entry CE/UKCAcompliant

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

200 LEY 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 LEPY LEPS 1000 1000 800 800 1500 1500 Horizontal L2 [mm] L2 [mm] L2 [mm] L2 [mm] LER L2 600 600 1000 1000 Y m Me 400 400 LEH 500 500 200 200 LEY -X5 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60

Guide Cylinder Series MGG

3 600st 2 400st 500st st: Stroke (mm) 100st 200st 300st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F (N) 5 Guide Cylinder Series MGG MGGM 63Stroke 7.5 7 (Slide bearing type) 6 Deflection Y (mm) 5 1100st 1000st 4 900st 3 800st 700st 2 600st 400st 500st st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360

Series AK1000

0.69 MPa) 30 psig (0.21 MPa) Inlet pressure: 50 psig (0.34 MPa) 60 0.41 50 0.34 Delivery pressure (psig) Dlivery pressure (MPa) 40 0.28 30 0.21 20 0.14 10 0.07 0 0.00 0 20 40 60 80 100 120 140 160 180 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

VZ100/300/500

Note) Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Surge voltage suppressor Indicator light DC: Diode, AC: ZNR DC: LED (Red), AC: Neon bulb Option Part no.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N

LEY-OM007

/ USB 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 CN4 50 200 50 200 3 3 CN3 CN2 CN1 DC24V /P.9 2.1 P.13 3.1 () AWG20(0.5mm 2) 8mm C24VM24VEMG DC24V OV UL ,UL1310 Class2 (DC24V) DC24V 24V 0V 0V M24V C24V EMG (DC24V) DC24V 24V 0V 0V M24V C24V EMG 1.2 (1) /CD-ROM (PDF) (2) ACT Controller -4- Easy OK (3) ON OK OFF OK SVRE ALARM

Rotary Table/

0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6

Booster Regulator/Air Tank

60 (370) OUT (307) 257 Tank OUT port 3/8 156 163 4 x 11 32 32 Drain port 1/4 100 160 200 349 338 The length may be longer than the specification if the plugs mounted on the tank are not fit to the end.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

MNB

100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

CXS

175 CXSW20-175 0.2 310 558 250 200 CXSW20-200 For CXSW20-10 only, a part of the switch rail (dimensions marked with an "") is notched to facilitate auto switch mounting. 37 Series CXSW Dimensions: 25, 32 ZZ CXSW25 SS 12 S 12 12 12 30 (30) Z 6 30 2-M8 x 1.25 x 6 (Hexagon socket head set screw) 2-6.9 through 2-11 counterbore with depth 6.3 2-R3.5 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 35 80

Secondary Batteries

mounting style Mounting style B L F D Basic style Cylinder standard stroke (mm) Axial foot style 10 16 15, 30, 45, 60, 75, 100, 125, 150 Rod side flange style 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Double clevis style (Except 6) *Manufacture of intermediate strokes at 1 mm intervals is possible.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30

Title not found

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

MVGQ

Nil: Non-locking push type Manual override Body option B: Locking type B (Slotted) 0: Pilot valve individual exhaust type Manual override Manual override Rated voltage 1 2 3 4 5 6 7 9 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other C: Locking type C (Manual) R port P/E port Manual override Light/Surge voltage suppressor