Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A 50 bore size is selected. 50 100 40 32 25 20 50 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 8-25-6 6 Model Selection Series MGZ/MGZR 2.

Modular F.R.L. Unit

53 70 70 90 90 C 26 36 38 40 38 41 45 K 8.4 8 10.5 10.5 13 13 A B 77 115 142 176 176 250 268 D 25 40 53 70 70 90 95 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 E 47 47 P 28 57 73 73 G 27 40 54 54 66 66 F 30 41 50 50 70 70 R 50 80 95 120 120 120 120 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 25 40 53 70 75 90 95 Optional specifications

MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VFS Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm VS4 Series MB, CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series VQ7 EVS 800 700 600 500 400 300 200 100 0 749 749 Perpendicular, upward actuation Horizontal actuation 610

CQS

45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Special long bolt for through-hole mounting is available as an option.

AC

Coef. for compensation 20 10 0 10 30 40 50 60 Air temp.

Square Tube Type Air Cylinder Series MB1

Switch spacers Applicable bore size (mm) 32, 40 50, 63 80, 100 Weight table (kg) BMP1-032 Switch spacer Bore size (mm) 32 80 63 50 40 100 Mounting brackets/Part nos.

MXS Series Air Slide Table

30 55 65 70 GA 16 16 16 16 51 61 109 159 KA NA 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 HA 40 40 40 50 30 70 70 70 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 Note) Refer to "Dimensions" of MXS 16

ISO Standard Hydraulic Cylinder

/A6/A59W cannot be mounted to 40, 50.

XL

XL [V]-40 XLD [V]-50 XL [V]-50 XLD [V]-63 XL [V]-63 XLD [V]-80 XL [V]-80 Construction No.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

High Vacuum Angle Valve, XL Series

XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Courtesy of

REA/REB

Model selected 10-2-8 8 Series REA Model Selection 2 Caution on Design 1 Selection Method RE A B 25 40 32 500 500 REC 200 300 400 300 200 300 200 Recommended driving force Fn (N) Recommended driving force Fn (N) CX Recommended driving force Fn (N) 100 100 100 CY 50 40 20 30 40 50 20 30 40 50 20 30 MQQ M Usable range

Compact Guide Cylinder

/MGPKM Horizontal Mounting m m MGPKFM12 to 50 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 100 100 50 50 50 50 32, 40 32, 40 32, 40 10 10 32, 40 25 25 Load mass m [kg] Load mass m [kg] 20 20 25 20 16 16 25 20 12 12 16 1 1 16 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50

CHKD/CHKG

JIS Standard Compact Hydraulic Cylinder Compact Hydraulic Cylinder CHKD/CHKG Series CHQ CHK CHK CHN CHM CHS CHKD Series CH2 CHA Related Products DNominal pressure: 10 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 CHKG Series Nominal pressure: 16 MPa Bore size (mm): 20, 25, 32, 40, 50, 63, 80, 100 263 JIS Standard Compact Hydraulic Cylinder 20, 25, 32, 40, 50, 63, 80, 100 CHKD Series

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

) H J I Stroke 20 3 +10 0 30 +7 +20 50 +52 +40 +25 13-11-116

REA/REB

x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 High Precision Guide Type REAH 150 60 40 182 10 19 REA 50, 63 14 2 -Rc 1/4 L 0 -0.2 NA 33 14 Max.

RSQ

Bore size RHC 40 50 40 mm 50 mm Nil Without auto switch Auto switch MK(2) Piping For the applicable auto switch model, refer to the table below.