LEC-OM02704CN

PB26) kpps pulse r/min (6) (PB28) 9 14 9 9.6.4 (1) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0001 (ON/OFF ) PB28 CDT 100 ms PB33 VRF1B Hz PB34 VRF2B Hz (b) (CDP) OFF ON OFF CDP CDT100ms 100 4.0 10.0 4.0 120 84 120 3000 4000 3000

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Air Slide Table Series MXQ

140 180 200 25 5 6 13 + 0.2S 10 23 23 30 140 170 210 250 315 385 35 10 10 40 26 + 0.2S 23 30 35 47 335 340 380 450 490 745 655 70 23 25 100 43 + 0.2S 40 53 60 75 605 610 670 735 835 1250 1400 1000 105 40 45 160 55 + 0.2S 65 120 115 170 1100 1100 1100 1200 1400 2350 2650 2900 1750 130 65 80 310 166 + 0.5S 110 140 180 220 1750 1750 1750 1950 2400 3450 4300 4700 2750 200 110 130 560 240

MXS Series Air Slide Table

0.03 0.06 MXS2075 0.020 MXS2030 0.02 0.04 MXS2020 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 0 100 200 300 160 120 80 40 240 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 25 25 25 Lr=154mm 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25

Electromagnetic Digital Flow Switch

Model Flow range 0.5 L/min 2 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 0.5 L/min 20 L/min LFE1 0.4 L/min 24 L/min 0.4 L/min 24 L/min 2.5 L/min 100 L/min LFE2 2 L/min 120 L/min 2 L/min 120 L/min 5 L/min 200 L/min LFE3 4 L/min 240 L/min 4 L/min 240 L/min Rated flow range Display flow range Set flow range 21 These safety instructions are intended to prevent hazardous situations

CM2

With Rod Boot Data l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 160 173 185 198 223 248 273 25 36 17 32 72 85 97

SX

100 0 SX3140-01 900 800 700 600 500 400 300 200 100 0 SX5140-02 900 800 700 600 500 400 300 200 100 0 SX7140-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 L3 L4 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 20 Stations 341 328 304 296 2 Stations 53 40 16 8 680 Manifold specifications

CM2

26 13 8 45 25 34.5 37.5 M10 X 1.25 1 to 300 19.5 17 32 6 8 15 5.5 M26 X 1.5 64 22 12 122 26 13 8 45 32 21 M14 X 1.5 21.5 42.5 46.5 1 to 300 22 41 8 10 7 M32 X 2 88 24 14 154 32 16 11 50 40 With rod boot (mm) Symbol Bore h ZZ l Stroke e f 1 to 50 51 to 100 1 to 50 101to150 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 151 to 200 201 to 300 101 to 150 151 to 200 201 to 300 20

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

, 300 10 -X 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 20100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 Data 2 axes 1500 32 Note) Please contact SMC if it is used by exceeding the maximum stroke length.

MY2

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

16 16 16 L = 120 mm L = 120 mm L = 120 mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N)

AC

120 120 120 81.5 122 142 177 177 254 268 25 40 53 70 75 90 95 25.5 38 38 41 39 45 45 M5 X 0.8 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 SAC1000, #3 SAC2000, #3 SAC2503, #3 SAC4000, #3 SAC4006, #3

V

www.stevenengineering.com I 2.82 SOLENOID VALVES SERIES VQZ100/200/300 BODY PORTED 3 PORT SOLENOID VALVE BODY PORTED / PLUG LEAD TYPE SERIES VQZ100/200/300 T E C H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid

Table of Contents

mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Vacuum Unit

135 150 165 L2 45 60 75 90 105 120 135 150 165 180 L3 56.8 71.8 86.8 101.8 116.8 131.8 146.8 161.8 176.8 191.8 L4 67.5 82.5 97.5 112.5 127.5 142.5 157.5 172.5 187.5 202.5 L5 62.5 75 87.5 112.5 125 137.5 150 162.5 187.5 200 L6 73 85.5 98 123 135.5 148 160.5 173 198 210.5 Metric size 06 8.3 4 9.7 8.7 08 11.4 6 Inch size 07 9.7 4.76 12.3 11.3 09 11.4 6 1 Common pilot pressure supply (PS

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point