ZP

Form w 1 Material e Vacuum inlet B2 10 25 2.5 Construction p. 117 13 27.5 16 29 20 32.5 4 25 33 32 38 10 Adapter Assembly p. 121 B5 M5 x 0.8 5 8 25 2.5 13 27.5 16 29 20 32.5 4 25 33 32 38 40 47.5 4.9 12 50 51.5 20 M6 x 1 6 8 B6 N S U F GN GS ZP T B 38.5 3.5 M8 x 1.25 8 12 25 39 32 44 40 47.5 6.6 50 51.5 10 B8 31 2.5 13 33.5 16 35 20 38.5 3.5 25 39 32 44 40 47.5 7 50 51.5 Rc1/8 NPT1/8 NPTF1

MY1

, 25, 32, 40, 50, 63, 80, 100 Slide Bearing Type Series MY1M P. 23 to 37 16, 20, 25, 32, 40, 50, 63 Cam Follower Guide Type Series MY1C P. 39 to 53 16, 20, 25, 32, 40, 50, 63 High Precision Guide Type Series MY1H P. 55 to 76 10, 16, 20, 25, 32, 40 High Rigidity/High Precision Guide Type Series MY1HT P. 77 to 89 50, 63 Protective Cover Series MY1MW/CW Series MYMW/CW P. 90 to 95 16, 20, 25

CM2

Height/ Single Acting, Spring Return (S) Reed switch Solid state switch D-C7/C8 D-B5/B6/B59W D-A33A/A34A D-A44A D-C73C/C80C Proper Auto Switch Mounting Position/Spring Return (S) Auto Switch Mounting Height A dimension Auto switch model Bore size (mm) Auto switch model Bore size (mm) 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 Hs B 151 to 200 102 107 108 113

ZP

/Thin flat with ribs Flat with ribs Deep Bellows 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

CQS

CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Built-in magnet Rod end male thread Rubber bumper Foot/Flange style Double clevis style Clean Series Non-rotating rod, double acting double rod is available, too.

C85

D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs Hs Hs Hs Hs Hs Hs Hs 20 25 8 10 12 6 7.5 1 1 2 16 18.5 19 25 19 21.5 23.5 8 18 17 19.5 19 25 20 21.5 23.5 10 18 12 18.5 21 20.5 26.5 21 22 23 25 19.5 16 20.5 23 20.5 26.5 23 22 23 25 19.5 D-A79W 2 16 20 22.5 25 23.5 29.5 25 25 26 29 22.5 25 20 25 25 27.5 26.5 32.5 27.5 28 29 32 25.5 5 6.5 Aim

CL

R +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 8 +0.4 +0.2 8 16 20 22 34 41 42 20 25, 32 40 8.5 10.5 14 25 30 30 M8 X .25 M10 X .25 M14 X 1.5 10.3 12.8 12 11.5 14 14 16 20 22 21 34 41 42 25 30 30 10.3 12.8 12 20 8.5 M8 X .25 11.5 14 14 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 +0.5 +0.3 18 25, 32 40 10.5 16 M10 X 1.25 M14

Battery-less

500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg

CV/MVGQ

to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol CC S LS ZZ ZZ S LS ZZ LS S ZZ LS S ZZ LS S 20 25 32 40 20 25 32 40 21 8 20 M20 x 1.5 206 177 137 181 152 112 156 127 87 RB 25 8 20 M26 x 1.5 210 177 137 185 152 112 160 127 87 25 8 20 M26 x 1.5 212 164 204 179 237 139 187 154 114 162 129 89 J 27 10 23 M32 x 2 246 188 234 209 271 213 259 163 296 221 184 138 196 159

CV/MVGQ

to 150 151 to 200 201 to 250 Bore size (mm) Z Y X NN Bore (mm) Symbol CC S LS ZZ S LS ZZ ZZ LS S ZZ LS S ZZ LS S 20 25 32 40 20 25 32 40 21 8 20 M20 x 1.5 206 177 137 181 152 112 156 127 87 RB 25 8 20 M26 x 1.5 210 177 137 185 152 112 160 127 87 25 8 20 M26 x 1.5 212 164 204 237 179 139 187 154 114 162 129 89 J 27 10 23 M32 x 2 246 188 234 271 213 259 296 209 163 221 184 138 196 159

MGP

40 stroke 20 30 100 P=0.5MPa P=0.5MPa 200 80 100 25 10 20 50 50 40 Load weight m (kg) 3 4 5 16 40 20 30 32 12 2 Load weight m (kg) 1 25 20 10 0.3 0.4 0.5 5 4 16 12 3 0.2 2 0.1 10 100 50 200 40 30 20 1 Eccentric distance l (mm) 0.5 0.3 0.4 40 to 124 stroke 0.2 30 20 0.1 P=0.5MPa 10 100 50 20 30 40 200 25 20 10 Eccentric distance l (mm) Load weight m (kg) 2 3 4 5 16 12 Over 75 stroke 1 100

MY1

to 40) (25 to 40) Hard anodized (63) (50 to 63) (16 to 20) (25 to 40) (16 to 20) Seal List MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Qty.

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

ZP

Buffer body Bellows 20, 25, 32 Bellows 40, 50 Applicable tubing O.D.

CQS

12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,

CM2

28.5 32.5 25 27.5 31 35 60 62.5 66 70 69.5 72 75.5 79.5 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 LER LEH LEY -X5 1000 1500 1500 11LEFS 800 11LEJS 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 25A400 500 500 LEC 200 Ly Lx LEC S 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 LEC SS-T Work load [kg] Work load [kg] Work load [kg] LEC Y LEC Y Motorless

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

CY1

25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral piping only

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04