Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

IDG

0 10 20 30 40 50 60 50 60 40 30 20 10 0 10 20 30 Atmospheric pressure dew point ( C) 14-19-10 7 Membrane Air Dryer Series IDG Calculation of inlet air flow rate Q1, and confirmation of compressed air supply capacity.

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

High Vacuum Angle Valve, XL Series

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

XL

Fluid 5 to 40C (41 to 104F) Operating temperature C 0.2M to 1 x 10 -6 {1.5k to 7.5 x 10 -9} Operating pressure Pa {Torr} 5 8 5 8 Conductance l/s 1.3 x 10 -8 {1 x 10 -7} at ordinary temperatures, excluding gas permeation 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Internal External Leakage Pa m3/s {Torr l/s} KF16 KF25 KF16 KF25 Flange type/size Principle materials

AC

G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.

1

Clip Approx. 80 to 90 or b Auto switch mounting band Fig. 1-5 Fig. 1-4 a Switch holder Enlarged view of clip M2.5 set screw (Accessory) e i Auto switch r Reinforcing plates w q y u c M3 set screw 5.1 or more 0 to 5 t Reinforcing plates M3 set screw Nut M3 set screw Nut The end of the set screw is protruding.

ZQ-OM01401

--1 ZQA-J25LO--1 ZQA-Q15LO--1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y

VQ5000

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

PSxx-OMR0001CN

1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4

Electric Actuator/Slider Type

20 30 40 0 5 10 15 20 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 1,000 1,000 1,000 Mey Horizontal m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500

Valve Mounting: Pilot Valve Opposite of A Port, Stations: 08

Valve Mounting: Pilot Valve Opposite of A Port, Stations: 08

Modular F.R.L. Unit

Model Description AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 G-27-10-R1 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD37 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD47 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48

5 Port Solenoid Valve SY Series

SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1 SGP10A x 1 m AS420

VQ5000

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5

Table of Contents

bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3

SZ3000

They can be ordered in multiples of 10 pieces.

SZ3000

Purchasing order is available in units of 10 pieces.