•

20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...) oe.4 1 5.5 7 2.5 ZJri'Otl 8 ,1\ ZPY32~ 32 35 14.5 Deep type I r.sXI 1., . "" , 1: t.i5 XQ! 'I U4!"'

ZP

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

CNG

A1 E1 L1 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 16 20 22 +0.4 +0.2 8 16 34 41 42 2 25, 32 40 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 8 10 10 21 11.5 25 30 30 20 34 41 42 8.5 M8 x 1.25 10.3 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 20 M10 x 1.25 25.6 14 M10 x 1.25 12.8 25, 32 40 10.5 16 +0.5 +0.3 18 M14 x 1.5 41.6

CLA

aize (mm) 40 550 63 80 9 12 80 42 100 51 216 43 11.2 59 224 ~6 20 27 % 42 11 20 45 153 8 60 30 ~ 46 10 21 50 168 0 70 9 12 90 50 11 0 58 238 52 11 .2 66 ""246 y. ~ Siroke 13.5 18 130 76 160 71 297 65 12.5 60 ~ 13.5 18 150 92 180 72 316 65 14.0 81 ~ 11 .5 15 105 59 130 58 255 52 11.2 66 0/. 16 31 ~ 48.5 13 23 60 182 0 86 37 ~. 55 15 23 70 208 0 102 1 14 40 \; 56.5 15 25 80 226 0 116 100

HRX-OM-Q026

EC DECLARATION OF CONFORMITY Original declaration SMC Corporation 4-14-1 Soto-Kanda, Chiyoda-ku, Tokyo 101-0021 Japan declares under our sole responsibility that the following equipment: Thermo Chiller HRSH Series Serial No.: *o001 to *Z999 conforms with the following directive(s) and harmonized standards: Directive Harmonized standards Machinery Directive 2006/42/EC EN ISO12100:2010 EN60204

MG

12 M10 x 1.5 22 M10 x 1.5 8.6 14 44 9 20 1/4 16 9 12 21.5 64 47 14 40 11 148 M8 32 32 46 77 16.5 M10 x 1.5 22 M10 x 1.5 8.6 14 49 9 20 1/4 16 14 12 28 78 55 16.5 50 13.5 162 M10 39 39 58 WA R S T U VA VB WB Bore size (mm) X XA XB XC XL YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 33 Over 25 st to 100 st 83 Over 100 st to 200 st 121 Over 200 st

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 Bore (mm) 25 32 40 50 63 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Applicable pin CD-MU02 CD-MU03 CD-MU04

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

MU

MU-D02 MU-D03 MU-D04 MU-D05 MU-D06 8 10 10 14 14 8 10 10 14 14 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 Applicable pin DZ 8 10 10 14 16 CZ 8 10 10 14 16 DY 9 11 13 16 16 CX 9 11 13 16 16 DX 18 22 26 32 32 CT 9.5 11 14 17 20 DT 9.5 11 14 17 20 CR 5.3 6.4 8.4 10.5 13 DR 5.3 6.4 8.4 10.5 13 CL 26 42 54 64 72 DL 26 42 54 64 72 Part No.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion Air cushion type is not available for 21-/22-CJ2.

VQ4000

Polarity Lead wire color Dot marking Release valve SOL.A 1 1 () (+) Black None SOL.B 14 14 (+) () Yellow Black 1 station 1 14 1 2 3 Stations Pressure switch SOL.A 2 2 () (+) Brown None 2 U side 15 VQC SOL.B 15 15 (+) () Pink Black 2 stations 3 16 4 SOL.A 3 3 () (+) Red None SOL.A 17 D side 5 SOL.B 16 16 () (+) Blue White 3 stations SQ SOL.B 18 6 19 SOL.A 4 4 () (+) Orange None SOL.A 7 SOL.B

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

14 LS LZ 42 42 25 25 LY LX 33 33 2.3 2.3 NB 20.5 20.5 NA M10 x 1.0 M12 x 1.0 S 9.5 9.5 Z 54 55 Bore size 72 73 With air cushion With air cushion type is not available for 21-/22-CJ2.

LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

CJ5-S

41 10.5 20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS + 0.5 + 0.3 + 0.058 0 I-G04SUS Y-G04SUS 40 40 22 10 10 18 18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070 0 I-G05SUS Y-G05SUS 50, 63 50, 63 28 14 14 22 22 56 18 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 M18 x 1.5 IY-G05SUS + 0.070 0 I-G08SUS Y-G08SUS 80 80 38 18 18 28 28 71 21

CJ5-S

41 10.5 20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com + 0.5 + 0.3 + 0.058 0 I-G04SUS Y-G04SUS 40 40 22 10 10 18 18 42 14 30 M14 x 1.5 12 14 42 16 22 41.6 30 M14 x 1.5 36 12 14 IY-G04SUS + 0.5 + 0.3 + 0.5 + 0.3 + 0.070

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5

CL

RR1 RR1 E1 L1 MM A A1 U1 NDH10 NX +0.058 0 +0.058 0 +0.058 0 0.2 0.4 0.2 0.4 0.3 0.5 0.4 0.2 0.4 0.2 0.5 0.3 +0.058 0 +0.058 0 +0.058 0 16 20 22 I-G02 I-G03 I-G04 16 34 41 42 8.5 10.5 14 25 30 30 M8 x 1.25 10.3 12.8 12 11.5 14 14 20 25, 32 40 8 10 10 8 10 18 Y-G02 20 8.5 25 30 30 M8 x 1.25 10.3 12.8 12 16 20 36 21 IY-G02 IY-G03 IY-G04 34 41 42 11.5 14 14 8 8 20 M10 x 1.25 Y-G03 25, 32 40

CXS

B Model A B C D E F G CXS6 9 2.1 3.25 6.5 7 1.2 x 12 10 CXS10 9 2.1 5 10 7 2.5 x 14 10 G CXS15 12 2.1 6 12 7 3 x 16 13 CXS20 15 3.1 7 14 10 4 x 20 16 CXS25 20 3.1 7 14 10 5 x 22 21 CXS32 26 4.1 9 18 12 6 x 32 27 Dimensions other than those listed above are the same as for the standard type. 6 -XC18 NPT finish piping port Specifications CXS XC18 Bore size Stroke Auto switch Slide bearing

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10