Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Lubrication Equipment

Description Material Aluminum die cast Aluminum die cast Top cover Bottom cover q w No.

With Factory Installed

Q) ~ 0.3 1 '"' l' Q. Q) Q. Cautions on Use o ~ ~ 0 0.2 I:". When the primary pressure has been released, the residual pressure (secondary pressure) cannot be removed. If removal of residual pressure is needed, please contact SMC. ---... 0.1 O.l SiHI---t-t---t--t--t--+--t,., . 7 . r" " 1 I':.

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Speed Controller with

2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

CE2

W Recommended Pneumatic Equipment CC Brake valve VFS21O VFS21O VFS21O VFS31O VFS31O Bore size (mm) Directional control valve VFS24OR VFS24OR VFS34OR VFS44OR VFS44OR Silencer AN200-02 AN200-02 AN300-03 AN300-03 AN400-04 Speed controller AS4000-02 AS4000-02 AS4000-03 AS420-03 AS420-04 Regulator AR425 AR425 AR425 AR425 AR425 Piping Nylon 8/6 or larger Nylon 10/7.5 or larger Nylon 12/9 or larger

JIS Standard Hydraulic Cylinder

95 297 35.5 M30 x 1.5 45 42 13 30 80 282 0.030 0.076 0.036 0.090 0.23 0.3 0.18 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 327 45 M39 x 1.5 60 57 15 41 100 312 371 CH2E/CH2F/CH2G/CH2H Series Dimensions Single clevis type: CH2ECA, CH2FCA, CH2GCA, CH2HCA 2 x Rc P CDH9 GB GA R H + Q + l J H MM D E e 10 f l CX 0.1 0.4 NB Air release Air release C NA T B SS + Q + l + Stroke U ZZ + Q + l + Stroke

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01

Round Type Hydraulic Cylinder

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

25

Static Neutralization Characteristics q Installation Distance and Discharge Time (Discharge Time from 1000 V to 100 V) IZS40, 41 1) Without air purge 0 2 4 6 8 10 12 14 16 18 20 Discharge time (s) 10 Hz 5 Hz 15 Hz 30 Hz Sensing AC 1 Hz 0 100 200 300 400 500 Installation distance (mm) 2) With high speed de-ionizing cartridge, With air purge 3) With energy saving type de-ionizing cartridge,

CM2

S Q P N1 WB G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 37 62 15 24 M20 x 1.5 1/8 6 8 8.5 13 17.5 21.5 25 25 25 152 41 62 15 30 M26 x 1.5 1/8 6 8 13 17.5 10.5 24.5 32 32 32 154 41 64 15 34.5 M26 x 1.5 1/8 6 8 13 17.5 11.5 27 40 40 40 188 45 88 21.5 42.5 M32 x 2 1/4 8 11 16 21.5 15 32.5 6-4-33 34 Series

JXCx-OMT0061CN

- [] PLC RWw RWw bit 10.1.2 0 (2) [OUT]()[] (P.41) 1 ON OFF OFF 2 10.1.2 (2) [OUT]()[] (P.41) 3 4 5 0 6 ON ON *1 7 *1 8 *2 9 *1 *2 A *2 B (*1*2) C 17.

V

U B E Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 H O W T O O R D E R ZPR P A D H O R I Z O N TA L T Y P E 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 W I T H B U F F E R ZPR D I M E N S I O N S PA D D I A M E T E R S 40, 50 P A D D I A M E T E R M O U N T I N G T H R E A D 16 16 20 20 25 25 32 32 40 40 50 50 02 2 04 4 06 6 08 8 10 10 13 13 Symbol Thread Dia 2~8 10~16 40~50 20~32 A8 M8X1 Male

CM2

20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50 1 to 50 1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

L d m t l IY-G012 IY-J015 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 NTJ-015A NT-015A NT-02 NT-03 NT-04 NT-05 NT-08 NT-10 Type C 5 for axis M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 5 5 6 8 11 13 16 8 10 13 17 22 27 32 41 9.2 11.5 15.0 19.6 25.4 31.2 37.0 47.3 5 5 8 10 10 14 18 22 14.6 16.6 21 25.6 41.6 50.6 64 72 4.8 4.8 7.6 9.6 9.6 13.4 17 21 10.2 12.2