SYA3000/5000/7000

Single Double 2 position 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 C4 Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.42 [0.34] 0.21 [0.12] 0.59 0.29 0.15 40 42 Single Double 2 position 0.30 0.19 0.65 0.39 0.76 0.17 0.55 0.24 0.60 0.33 0.76 0.16

5 Port Air Operated Valve SYA3000/5000/7000 Series

Single Double 2 position 0.72 0.18 0.64 0.34 0.29 0.17 0.59 0.15 0.59 0.30 0.28 0.15 Closed center Exhaust center Pressure center C4 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.21 [0.12] 0.59 0.29 0.42 [0.34] 0.15 40 42 Single Double 2 position 0.76 0.19 0.65 0.39 0.30 0.17 0.76 0.24 0.60 0.33 0.55 0.16

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

The drawing shows a plug-in type. 46 Base Mounted Type Series VQ5000 U side end plate assembly part no. 2. U side end plate assembly part no. (for F, L, S & T1 kits) D side end plate assembly 1. D side end plate assembly part no.

CL

BT-08 BT-12 BT-12 BT-16 Rod side flange style CA-F06 CS1-F16 CS1-F14 CS1-F12 CA-F05 CA-F10 CA-F04 CA-F08 DBD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BS1-125 BS1-140 BS1-160 CA1-F06 CS1-F16 CS1-F14 CS1-F12 CA1-F05 CA1-F10 CA1-F04 CA1-F08 Head side flange style CA1-C06 CS1-C16 CS1-C14 CS1-C12 CA1-C05 CA1-C10 CA1-C04 CA1-C08 Single clevis -X BA-04 BA-05 BA-06 BA-08 BA-10 Double clevis CA1-D06

smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR 42 $3 44 $5 46 Release piston seal NBR 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

ZR

(mm) Model Maximum suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Weight (With bracket) (kg) ZR1-W10S ZR1-W13S ZR1-W15S ZR1-W18S ZR1-W20S 1.0 1.3 1.5 1.8 2.0 22 38 54 62 84 46 78 95 150 185 0.132 0.134 0.136 0.154 0.156 ZX ZR Model/Max. Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Including Bracket, Screw, Set Screw) Applicable bore size (mm) Cylinder series C96 32 BT-03 40 BT-03 50 BT-05 63 BT-05 80 BT-06 100 BT-06 125 BT-08 The following stainless steel mounting screw kit (including set screws) is available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)

CL

BT-08 BT-12 BT-12 BT-16 Rod side flange style CA-F06 CA-F05 CA-F10 CS1-F12 CA-F04 CA-F08 CS1-F14 CS1-F16 DBD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BS1-125 BS1-140 BS1-160 CA1-F06 CA1-F05 CA1-F10 CS1-F12 CA1-F04 CA1-F08 CS1-F14 CS1-F16 Head side flange style CA1-C06 CA1-C05 CA1-C10 CS1-C12 CA1-C04 CA1-C08 CS1-C14 CS1-C16 Single clevis -X BA-04 BA-05 BA-06 BA-08 BA-10 Double clevis CA1-D06

Free Mount Cylinder

(mm) DQ HQ HP 2.6 19.5 36.5 4.8 19.5 36.5 7 19.5 36.5 9 19.5 36.5 7 20.5 37.5 9 20.5 37.5 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 DQ HQ HP 18 29 50 15 27.5 48.5 12 25 46 9 20.5 42.5 7 20.5 42.5 18 25 46 12 24 45 18 21.5 42.5 15 21 42 12 21 44 9 19.5 41.5 DQ HQ HP 7 19.5 41.5 2.6 19.5 41.5 4.8 19.5 41.5 ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 12 21 44 15 21 44 18 21.5 44.5 23 23 46 28 23 46 35 23.5 46.5 12 24 47

Brake mechanism added

Bore size (mm) Auto switch model 40 50 63 80 100 D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9A/M9AV BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 D-A5/A6 D-A59W D-F5/J59 D-F5W/J59W D-F59F/F5NT BT-04 BT-04 BT-06 BT-08 BT-08 D-A3C/A44C D-G39C/K39C D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 Mounting example of D-A9(V)/M9(V)/M9W(V)/M9A(V) BA4-040

ZX

R Right side (PV port on the right side) L Left side (PV port on the left side) 02 2 B Both sides (PV port on both sides) Nil All stations 1 Station 1 only 08 8 1 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Air Cylinder

60 74 8 90.4 74 46 46 71 Bore size Z 20 24 25 25 32 25 40 27 50 29 63 29 Head Trunnion (T) with Pivot Bracket TS Bracket mounting range B TH TT TW TY 4 x TF TV TX +0.10 0 TE ZZ + Stroke Z + Stroke Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z ZZ 20 38 10 5.5 25 28 3.2 35.8 42 16 28 93 (101) 114 (122) 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 98 (106) 119 (127)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

Intrinsically Safe Valve

0.27] 2position 0.75 0.36 0.19 3.8 3.2 0.34 0.82 0.26 0.86 53-SY5 20-C4 C10 10 Onetouch fitting 0.78 [0.71] 0.27 0.44 [0.37] 0.57 0.21 [0.18] 0.84 2.8 0.59 0.27 0.21 0.67 2.4 53-SY7 20-C10 3position 4position dual 3 port 2.7 [2.0] 0.38 [0.38] 0.70 [0.56] N.C.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

5 Port Solenoid Valve Series SQ1000/2000

L6 (for 6) C4 (for 4) C10 (for 10) L6 (for 6) Side SQ2000 C8 (for 8) 35 J kit: Flat cable 1 to 8 stations SQ230 SQ231 Option SS5Q23 580 Note 2) L4 (for 4) Built-in Silencer Direct exhaust C6 (for 6) Top C8 (for 8) Note 1) One-touch fittings for inch sizes are also available.