Modular F.R.L. Unit

Port size B Center of F.R.L. body D A Note) Applicable model D 14 B 14 A 10 Model E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 AC10, AW10, AF10, AR10, AL10 AC20 AF20, AR20, AW20 AL20, AFM20, AFD20, AWM20, AWD20 28 23.5 30 Piping adapter AC25, AC30 AF30, AR30, AW30 AL30, AFM30, AFD30, AWM30

Environment

Note 14) For an actuator with lock, add the power consumption for the lock.

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

Possible to transfer a workpiece at low-speed.

(mm) ND NC NB NA K GE GD GC GB GA EF EE ED EC EB EA Size 10 20 30 50 91.4 112.4 118.7 145.8 M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 20 25 27 32 15.6 19.5 21.5 28 11 14 14 18 7.5 9.5 9.5 11.5 45.2 56.4 61.5 72.9 10 14 14 19 5.5 8 8 8.5 12.5 16.5 16.5 19.5 4 4 4 6 47.1 57.1 58.4 74.4 44.3 55.3 60.3 71.4 33.5 43 46 56 14 18 19.5 22 80 100 110 130 Dimensions other than the above are the same as standard

LX

Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3. T-slots l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) LXP M5 x 0.8 7.4 8.5 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body.

VK3000

Caution Corresponding mark (Concave part) Corresponding mark (Concave part) Mounting Screw Tightening Torques M3: 0.6 Nm 1422 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Dimensions: Body Ported Grommet: VK3120-G-M5 Port size: M5 DIN terminal: VK3120-D-M5 2 x 3.2 (Manifold mounting hole) 74.1 Max.10 14 9 (Bracket) 5 x M5 x 0.8 (Piping port) 4A 4A 2B 13 4 2B 2 x 3.2 (Lead

Round Type Hydraulic Cylinder

M10 x 1.25 M14 x 1.5 M16 x 1.5 12 M4 10 10 7 5.5 5.5 6.5 M4 set screw (1 pc.) 30 10 16 22 60 46 30 12 M4 10 10 7 5.5 5.5 6.5 36 12 16 30 80 56 40 12 M5 12 13 7 9 7 10 M5 set screw (1 pc.) 44 12 24 30 88 64 43 16 M5 12 13 9 9 10 10 Y-type double knuckle joint Bracket pin 20: Y-020B 25: Y-032B 32: Y-04D 40: Y-04B 2 x D drill through RR1 RR1 C1 Chamfer NDH10 NDH10 MM C E1 E1 C1 Chamfer NZ NZ

CE

20 18 36 10 57.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 46 177.4 95 9 9 91 80 92 60 203 238 14 224 20 30 22 44 14 89.5 84.5 97 109.5 113 107 108 Dimensions for auto switch model D-F79W. 16 Series CEU Series

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

female thread ZS-46-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.

Basic Type/Direct Mount Type

45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5 7 8 9 9.5 K 7 9 14 11 15 13 15 25 24 G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 GP 20 27 33 39 44 55 65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11

ZP3

M5 x 0.8 Use the connection thread. M5 x 0.8 Use the connection thread. Use the connection thread.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(External pilot port) 4 B A Insulation: Black () 23 PE B A 38 46 Insulation: Red (+) X EB EA P 21 69 6.4 21.5 123.3 67.2 M5 x 0.8 (Pilot EXH. port) 71.2 (For E type) L (Lead wire length) 4.1 1.55 0.3 mm2 26.5 11.5 13.5 20.5 20.5 5 x 3/8", 1/4" (Piping ports) 33 L plug connector with cover (LL) 52-SY7140 (R) -LL02 03 L 118.2 (Lead wire length) Insulation: Red (+)

MXW Series Long Stroke Slide Table

100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust the auto switch after confirming the operating condition in the actual setting.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3 52.5 40 40 40 121 (130) 12 (15) 123 11 25 53 285 55 75 44.5 58.5 50 50 50 137 (149) 14 (16) 140 16 26 59 Note) ( ): Denotes the dimensions for long stroke.

Rotary Actuator/Vane Type

36 M4 x 0.7 depth 13.5 11 M4 x 0.7 depth 7.5 M5 x 0.8 24.5 10.5 50.5 59 22 14 21 30 50 40 13 22 80.005 0.020 16 0 0.043 5 2 8 12 1.0 26 14 43 M5 x 0.8 depth 18 16.5 M5 x 0.8 depth 10 M5 x 0.8 34.5 14 64 75 24 15.5 25 40 63 45 15 30 100.005 0.020 25 0 0.052 6.5 4.5 9 20 1.0 31 20 56 M5 x 0.8 depth 16 17.5 M5 x 0.8 depth 10 M5 x 0.8 39.8 17 79.5 90 30 21 31.6 57 B CRB2 Series Dimensions: Standard

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

across flats 24 70 25 70 4 x M5 x 0.8 Width across flats 60 4 x M5 x 0.8 G 11 11 G Width across flats 60 F F E E Y Y 8 10 40 40 C C A A B D B D Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT100HB-A16 ZPT100HB-B12 100 103 69 107 47.5 60.5 90.5 35.5 M12 x 1.75 100 103 69 107 47.5 60.5 35.5 ZPT125HB-A16 -B16 125 129 89 135 56 69 99 44 M16 x 1.5 ZPT125HB-B12 M12 x 1.75

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

3 Port Solenoid Valve Series SYJ300/500/700

M5 x 0.8 (A port) 14 5 10 2-3.2 (For mounting) 26.4 17 3 2.5 Manual override A 11 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.6 [50.8] (Light/surge voltage suppressor) 41.5 [48.5] + M5 x 0.8 (X port) 35.6 28.5 26.1 X R P 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 17.5 23 L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx. 300 (Lead