Vacuum Pad

Inlet 5 3 2 14 2 3 14 3 2 7 M3 x 0.5 7 M3 x 0.5 3 3 3 M3 x 0.5 14 Vertical 3 3 3 7 0.3 With Buffer: Vacuum Inlet 0.3 0.3 0.8 0.8 0.8 2 3.5 1.5 Lateral 2.5 4 2 With Adapter: Vacuum Inlet 5 5 5 5 5 Lateral Vacuum Inlet Dimensions With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-Y015U;-B3-U4 ZP3-Y02U;-B3-U4 ZP3-Y035U;-B3-U4 ZP3-Y015U;-B3-U2 ZP3-Y02U;-B3-U2 ZP3-Y035U;-B3

Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

SX

M3 Terminal screw Stations n 10 stations 11 12 13 14 15 16 17 stations A: Orange B: Green 248 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 237.5 237.5 237.5 250 262.5 27.5 287.5 300 213 223.5 223.5 234 244.5 255 265.5 286.5 (Rail mounting hole pitch 12.5) 17.5 12 12 13 14 15 16 12 1-6-102 103 Base Mounted Series SX3000/5000 SS5X3-45T1DStations U(18 pins) C4 C6 2n-One-touch fittings Note)

Table of Contents

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Fluoropolymer Piping Equipment

LQ1R35-M 8 5.5 LQ1R36-M 6 3.6 LQ1R39-M 10 1/8" 17 34.5 20.5 4.4 4.4 20 17 23 9 LQ1R4B-M3/8" 5.8 LQ1R4C-M1/2" 1/2" 24.5 32 9 LQ1R4D-M3/8" 5.8 LQ1R4G-M1/2" 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1R5A-M3/4" 1/2" 30.5 29 6 24 9 18 21 43 28 10 LQ1R310-M 8 4.4 LQ1R41-M 12 3/8" 23 9.4 LQ1R42-M 10 7.4 LQ1R43-M 12 1/2" 24.5 32 9.4 LQ1R44-M 10 7.4 LQ1R49-M 12 1/4" 27.5 7 29 14 28 26 54 33.5 39

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

MY1

Maximum allowable moment and load weight Max. allowable moment (Nm) M1 6 10 15 30 59 6 10 15 30 60 Max. load weight (kg) m1 18 26 38 57 84 18 25 35 49 68 Bore size (mm) Model M2 3.0 5.0 9.0 m2 7 10.4 15 23 33 7 10 14 21 30 m3 2.1 3 4.5 6.6 10 2.1 3 4.2 6 8.2 M3 1.0 1.7 2.4 5.0 8.0 2.0 3.0 5.0 16 20 25 32 40 16 20 25 32 40 MY1MW 15 24 3.0 5.0 8.5 14 23 Parts list MY1CW No.

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

42

check spacer with residual pressure exhaust (Top) + Individual SUP or Individual EXH (Bottom) Valve q AXT632-17-14 (M3 x 112) 3 For manifold w AXT632-41-2 (M3 x 78) 2 Spacer (Top) q AXT632-17-14 (M3 x 112) 3 For manifold The individual EXH and restrictor can be mounted on the top. w AXT632-41-2 (M3 x 78) 2 Spacer (Bottom) Valve + Interface regulator (Top) + Individual SUP, Individual EXH

CQS

Example) Bolt M3 x 25l 4 pcs. (Standard stroke) Bolt M3 x 75l 4 pcs.

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

SY

SS5Y33, #5 (#5 + #8 + #9 + #11) 4 3 2 5 6 7 8 9 10 11 12 13 14 15 16 Stations n L1 L2 L3 91.5 81 102 112.5 123 133.5 144 154.5 173 160.5 185.5 198 210.5 210.5 223 235.5 148 260.5 273 285.5 298 310.5 310.5 162.5 150 175 187.5 200 200 212.5 225 137.5 250 262.5 275 287.5 300 300 234 70.5 181.5 192 202.5 213 223.5 11.5 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 For 11 or more stations, two

Free Mount Cylinder

Note) 16 16 19 21.5 22 22.5 7 10 11 12 15.5 19.5 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 7 7 7 9 10 11 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

Electric Actuators

LC6D-507AD-Q (Refer to page 306 for details.) 0.05mm Holding plate: MB1 (1 pc.), Phillips countersunk head screw: M3 x 6l (1 pc.) Phillips binding head screw: M3 x 4l (2 pcs.), Toothed lock washer M3 (2 pcs.) Binding band: T18S (1 pc.)

MXQ

M3 x 10 M3 x 8 M3 x 8 0.9 0.9 0.9 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

smcmaintenancepartslist

MXF12 0.47 M2.5 x 8 MXF16 0.88 M3 x 10 MXF20 M4 x 14 2.06 Loctite No. 242 of Henkel Japan Ltd. or its equivalent is applied. 1-7.

ZP

M3 x 0.5 M3 x 0.5 M5 x 0.8 Use the connection thread. 1 Refer to 2 to 8 for the thin flat type and thin flat type with ribs.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

(Refer to page 8-14-26.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-3-14.

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-