Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: N7 (1/4" One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket)

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Power Saver, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: -

Electric Actuator with Integrated Guide

lead Series Series 6 Nil X10 F H L 6 8 Standard motor 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Nil G R Y Standard motor 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K E F Mitsubishi Electric Corporation 100W None Switch specification Yasukawa Electric Corporation 200W With brake Nil 1 2 3 4 5 6 7 A B Without switch

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

N1: 1/8 N3: 5/32 N7: 1/4 Y Note 2) Note 1) When specifying two or more options, enter symbols in alphabetical order.

5 Port Solenoid Valve Series SQ1000/2000

N1: 1/8 N3: 5/32 N7: 1/4 Top ports are indicated by LN.

Dedicated Controller

Controller model Mounting screw Mounting bracket assembly LC1-1H-N3 M3 x 0.5 LC1-1-N3 Power terminal: TB LC1-1H-N5 M5 x 0.8 LC1-1-N5 LC1-1H-L3 M3 LC1-1-L3 LC1-1H-L5 M5 LC1-1-L5 Communication connector: CN3 Motor power line connector: CN5 Mounting with T-nuts Regenerative absorption unit connector: CN6 Controller Command Setting List Actuator control commands Parameter value Classification

2

M Q Q Note) D is maximum diameter.

ZP

M-5AU-6 H H F Model A B C D2 E F G H Vacuum inlet direction q Pad dia.

Table of Contents

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: w/o Subplate, Bracket: None, CE-Compliant: Q (CE-Compliant)

Function: Normally Closed, Piping: Base Mounted, Body Option: Common EXH, Specifications: Standard, Rated Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Screwdriver Operated Style, Port Size: w/o Subplate, Bracket: None, CE-Compliant: CE-Compliant

Table of Contents

Grommet: G Conduit:C Q F D 300 280 D Q F C C G1/2 R R E E A H B B A H 2-P Port size 2-M Thread depth N 2-P Port size 2-M Thread depth N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L L K K DIN terminal:D Conduit terminal:T Cable 6 to 12 27.5 F F Q (Q) S 34 25 U

A

(E X C E S S I V E F O R C E I N T H E D I R E C T I O N O F R O TAT I O N A P P L I E D T O T H E P I S T O N R O D M AY D A M A G E T H E I N T E R N A L M E C H A N I S M.) R E F E R T O T H E F O L L O W I N G TA B L E F O R D I M E N S I O N S W I T H A R M 32/40/50/63S E R I E S MK2 T I G H T E N I N G T O R Q U E F O R M O U N T I N G.

Modular Design with Uniform Body Style

Y 34 03 D Cross spacer q w e r q Body size [Applicable AC size] Symbol Description 24 [AC20] 34 [AC30] 44 [AC40] 54 [AC40-06] 64 [AC50, AC60] w Pipe thread type Nil Rc V V V V V N NPT V V V V V Body type: Standard (Ym-mm-D) Body type: Front and back port selectable (Ym-mm-1-D) F G V V V V V + 01 1/8 V V 02 1/4 V V V v 03 3/8 V V V v 04 1/2 V V v 06 3/4 V v + OUT q (Port size) OUT q

Table of Contents

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

Table of Contents

Unit Series AC20D to 40D Dimensions AC20D A F N E P K C G G IN OUT Q F.R.L.

Modular F.R.L. Units

C B IN OUT OUT IN Q V R F Plate thickness AR10-A: Max. 3.5 T N S M U D J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S