Guide Table Series MGF ø40, ø63, ø100 1

Theoretical Output OUT (N) IN (N) (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 1256 OUT 251 376 502 628 753 879 1004 1130 1256 40 25 765 IN 153 229 306 382 459 535 612 688 765 3117 OUT 623 935 1246 1558 1870 2182 2493 2805 3117 63 36 2099 IN 419 629 839 1049 1259 1469 1679 1889 2099 7853 OUT 1570 2356 3141

MGQ

138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x 2 M14 x 2 M14 x 2 MGQL (Ball bushing bearing) A, DB, E Dimensions MGQM (Slide bearing) A, DB, E Dimensions Bore size (mm) A E DB Symbol Stroke A DB E 50 st or less 53 54 60 61 84 89 Over 50 st 90 90 102 102 143 153

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63 MGTL 199 212 226 243 170 186 127 143 MGTM 199 213 228 246 267 291 221 250 80 MGTL 180 192 205 220 237 255 154 62 MGTM 271 288 307 328 353 382 321 356 100 F MGTL 242 257 274 292 313 335 153

MLGP

Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5 29.5 174 196 199 36 46 41 136 153

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35 45 LW 84 88 M 6.0 7.5 N 20 25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 Bore size (mm) 16 20 90 110 PP SS 2.5 5.0 PA 40 50 PB PG 3.5 4.5 Q 153

10-clg1-e

.: GR-S-010 (10 g) Replacement Parts: Lock Unit CLG1B 40 TN N E Cushion Type Lock operation N A Spring locking (Exhaust locking) Rubber bumper Air cushion E P D Pneumatic locking (Pressure locking) Spring and pneumatic locking Port thread type Bore size (mm) Nil TN NPT Rc 153

LG1H

Maximum acceleration: 3000mm/s2 Positioning distance (mm) 400 200 100 10 1 10 40.4 20.4 10.4 1.4 0.5 Speed (mm/s) 100 4.5 2.5 1.5 0.6 0.5 250 2.1 1.3 0.9 0.6 0.5 500 1.4 1.0 0.8 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions. 153 8 Series LG1H20 Standard Motor High Rigidity Direct Acting Guide Without Coupling Motor Output Rolled Ball Screw 100W 15mm /20mm

PVC Quick Drain Valve

external diameter NPT1/8 Symbol 25A 32A 40A 50A 65A 80A 6 32 PA 38 8 48 60 B A 9 75 89 PB Standard Specifications Model LVW60 LVW80 LVW90 Nominal diameter 80A 40A 65A 32A 50A 25A Applicable pipe size external diameter 89 48 75 38 60 32 Operating pressure 0 to 0.02 MPa Orifice size 80 65 25 40 Pilot pressure 0.3 to 0.5 MPa Kv 169.7 43.7 131.1 18.8 71.1 8.5 Flow rate characteristics Cv 198 51 153

Cylinder Positioner IP200 Series

. *1 If the restrictor is clogged, the cylinder rod may not perform a stroke or hunching and overshoot may occur. 153

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

temperature range Operating: 0 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating/Stored: 35 to 85% RH (No condensation) Standards UL/CSA (E216656), CE, RoHS Port size Rc1/4, NPT1/4, G1/4 Piping Materials of parts in contact with fluid Sensor pressure receiving area: Silicon Piping port: C3604 (Electroless nickel plating), O-ring: HNBR Port size Rc1/4 153

0.5

m-m 4 x M4 x 0.7, depth 6 (Female thread mounting) 2 x 3.5, depth 1 144 55 25 12.5 179 195 36.6 (10.5) 20 40 Bracket IZF31-m-mBmm 162 (144) 90 2 x 25 (195) 4 x 4.5 211.5 163 144 47 148 3 x 5.5 40 2 x 5.5 45 45 45 17 Fan Type Ionizer IZF21/31 Series Dimensions IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153

Compact 5-Port Solenoid Valve

. * When CM is selected for mixed A, B port size and C6 (9 mm pitch) is included, refer to page 100 for dimensions. n: Stations L: Dimensions n L 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 107.5 114 120.5 127 133.5 140 146.5 153 159.5 166 172.5 179 185.5 192 198.5 L2 56.4 62.9 69.4 75.9 82.4 88.9 95.4 101.9 108.4 114.9 121.4 127.9 134.4 140.9 147.4 L3 135.5 148 148 160.5 160.5 173 173 185.5

15

Dimensions: Ball Screw Drive LEFS40R (2.4) 28 FF Motor flange Motor 6H9 (+0.030 +0 ) depth 7 Body mounting reference plane Note) 4 x M8 x 1.25 thread depth 13 LEF 153 LEJ 58 LEL LEM 6H9 (+0.030 7 +0 ) depth 7 74 60 LEY 106 (170) LES 62.4 86 A (Table traveling distance) L Motor side stroke end LEPY LEPS (86) 13 90 LER 61 68 53.8 LEH F 68 LEY -X5 31 M4 x 0.7 11LEFS 8 thread depth 8 (F.G. terminal

Lightweight and Compact

IDH Anchor bolt fixing position 1015 (Dimension of anchor bolt fixing bracket) 4 x 15 (Thermo-chiller dimension) (377) 173 102 Facility water outlet Rc1/2 597 (970) (Thermo-chiller dimension) 28 Facility water inlet Rc1/2 354 View A 208 Accessory: Y-strainer mounting view For water-cooled type Mount it by yourself on the circulating fluid return port. 153 Circulating fluid return port Rc1

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357 373 389 405 421 437 105 121 137 153

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Station L1 L2 Port size One-touch fitting 625 3 Port Pilot Solenoid Valve 10-SYJ500 Type 41 Manifold: Side Ported/10-SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5

Modular Type Lubricators Series AL

Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications With barb fitting Metal bowl Metal bowl with drain cock Metal bowl with level gauge B 161 195 195 269 287 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Options include auto switch capabilities, double and single acting, mounting from 4 directions.Miniature free mount , Space saving compact cylinder , Available in 4mm to 10mm bore size, Cyl, Free Mount, Dbl Acting, COMPACT CYLINDER, 153 lb

Size: 10 (ø10mm), Color: Y (Yellow), Roll Length: 153 [500' (153m)]