42

) 96.2 71.7 96.2 71.7 58.2 VFR 1/8" External pilot port 44 106 9 9 91 44 106 49.7 58.2 Station number 1/8" External pilot port 49.7 9 9 U side entry (LU) VQ7 D side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7 D-H7W D-H7F D-H7BAL Auto switch model D-C7/C8 D-C73C/ C80C D-H7W D-H7NF D-H7BAL D-H7 D-H7C C85 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL C95 Applicable bore size (mm) A B A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

Plug-in Unit

3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting 38.7 P=25 65.5 VQ5 VQZ VQD Manual override Indicator light L2 48 L1 6.5 65.5 P=25 A A A B A B A B A B A B 9 A A A A A A A 143 163 74.5 9 B B B B B 10 0.6 m, 1.5 m, 3 m Lead wire length n 1 2 3 4 5 6 7 Stations D-side 8 U-side

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

106 116 137.5 148 L1 L2 L3 L4 1.12-21 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 VV5QZ32 C (35) 34 Station (12) 2n-C6, C8, C10, 02 (7.5) (5.5) 26 C8: One-touch fittings for 8 C6: One-touch fittings for 6 (4) 44.5 Mounting holes Grommet (G) C10: One-touch fittings for 10 02: Rc(PT)1/4 U side DIN rail clamp screw n Manual override 5 A A A A 2 4 B 4 4 4 4 (L4) (L3) 2 L2 L1 3 B 2 2 P=19

V

A N I F O L D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SS5Y 4 A, B P O R T S I Z E M A N I F O L D S E R I E S Metric (mm) M5 M5x0.8 (SY3000 Type 41 Only) 01 Rc(PT)1/8 (SY5000 Type 41 & SY3000 Type 42 Only) 02 RC(PT)1/4 (SY5000 Type 42 Only) C4 One Touch Fittings for 4 (SY3000 Only) C6 One Touch Fittings for 6 (SY3000 & SY5000 Only) C8 One Touch Fittings for 8 (SY5000 Only) C10

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

ass'y for 6 C8: One-touch fitting ass'y for 8 Residual pressure release manual override (33) (41.5) 1.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n+24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266

Table of Contents

D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

Table of Contents

0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

CJ2

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped. When only a switch is shipped independently, BBA4 screws are attached. Be sure to read before handling. Refer to pages 6-20-3 to 6-20-6 for Safety Instructions and Actuator Precautions.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

B A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 SMC VQD 13 2-M4 clamp screw EXH outlet M5: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A),

Intrinsically Safe Valve

C4 C6 C8 C8 C10 C8 C10 C12 4 One-touch fitting (EA) 5 1 (P) 3 (EB) 6 One-touch fitting 53-SY5000 8 One-touch fitting 3-position closed center 2 (B) (A) 4 8 One-touch fitting 3 Note 1) 53-SY7000 10 One-touch fitting Bracket is not available for the 53-SY9000.

CM2

D-G39A D-K39A D-A44A D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-B5 D-B6 D-H7l D-H7C D-B59W D-G5NTL Bore 20 25 32 40 A B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2

5 Port Air Operated Valve Series SYA3000/5000/7000 1

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

, C10, 02 (11) 33.5 2-4.5 mounting hole (5.5) C8: One-touch fitting for 8 C6: One-touch fitting for 6 (7.5) 24 DIN rail clamp screw (2.5) C10: One-touch fitting for 10 02: Rc 1/4 U side n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P = 19 1 21 6 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

107 118 137.5 148 3 59 70 100 110.5 L1 L2 L3 L4 2.10-15 VQZ100/200/300 Body Ported VQZ300 VV3QZ32C Station C10: One-touch fittings for 10 C8: One-touch fittings for 8 C6: One-touch fittings for 6 n-C6, C8, C10, 02 (35) 33 (11) 2-4.5Mounting holes DIN rail clamp screw (5.5) Grommet (G) (7.5) 24 (2.5) U side 02: Rc(PT)1/4 n Manual override 5 A A A A 4 2 2 2 2 (L4) (L3) L2 L1 3 2 P=19 1 21 6

New

1A VXN Z 1 2 A A Enter standard product number.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 P=17.5 63.3 44.5 7.5 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4 : 6 : 8 L n Formula

MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.