Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Brake mechanism added

34 34 35 34 43.5 78 86 43.5 35 42.5 35 78.5 77 86.5 77 34 36.5 34 39 34 41 41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ1210 13-/22-MXQ1220 13-/22-MXQ1230 13-/22-MXQ1240

4/5 Port Air Operated Valve Series SYJA3000

2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-

VQ7-6/7-8

Branch code Please copy this page for use as needed. 34 Manifold Specification Sheet Series VQ7-8 1.

Types: Air Blow Gun Body and Nozzles, Nozzle Shape: Standard, Features: Standard, Air Supply Port Connection Type: One-Touch Connection, Nozzle Connection Port Type: Male Thread, Body Material: PBT (Polybutylene Terephthalate), Nozzle Material: Brass, Maximum Operating Pressure(MPa): 1, Nozzle Diameter(φ): 1, Piping exit direction: Down direction, Connector size: S coupler: KK4P, Body color

Piping: 1 (Bottom Direction), Body Color: BU (Dark Blue), Piping Type: Rc, Connection Size: 11 [S Coupler Plug (Rc Type Only)], Nozzle: 11 (High Efficiency Nozzle, KNH-R02-100)

MLGP

120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

MLGP

120 148 162 M6 34 35 38 34.5 27 32 39 16 20 20 14 44 52 64 77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25

VQ7-6/7-8

2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R 3.3 0.27 13 2.8 0.26 11 Rubber seal 50 or less VQ7-8-FPG-D7.0 7.2 Metal seal 60 or less Double check 1.98 VFR VQ7-8-FPG-D-R 7.0 7.2 Rubber seal 60 or less VQ7-8-FIG-D2.8 0.25 11 2.4 0.26 10 Metal seal 45 or less Pressure center VP4 0.75 Courtesy

3 Port Air Operated Valve Series SYJA300

) M5 x 0.8 34 2-3.5 Manual override (Mounting hole pitch) (For mounting) (Non-locking) 8 10.6 9 A 1 32 24 15 X 24.5 18.6 (37) (30) 1 1.5 14.5 3 R P 23 21 34 4 33 42 4 4 2-2.6 (2.3) 39 (25) (18) 46 (For mounting) 2-M3 x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter

Electric Actuator with Integrated Guide

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

0.4

L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 L dimension No. 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 L dimension No. 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 L dimension No. 420 SV SYJ SZ VF VP4 VQ 1/2 VQ 1/2 VQ 4/5 VQC 1/2 VQC 4/5 VQZ SQ VFS VFR VQ7 421 Construction

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Series KG Stainless Steel One-touch Fittings

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Stations 50 29.5 D side 75.5 300 3.8 (Lead wire length) Cover dia. 1.6 Cross section 0.34 mm2 64 62 11.5 R P 29.5 34 3 1 PE port 2-Rc 3/8 1(P) port M5 x 0.8 external pilot port 21 18 (Only external pilot style (R)) 44.5 2-Rc 1/4 11 50 The broken lines indicate the DIN rail mounting style [-D]. 3(R) port L plug connector (L) DIN terminal (Y) Indicator light 300 93 (Lead wire length) 89.5

VFR

Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

MXS Series Air Slide Table

12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Note) Refer to "Dimensions" of MXS25 on P. 64 for one with shock absorber as symmetric.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(32.5) 23 (21.5) 36 24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.