Vacuum Pad

68.5 14.3 15.1 15.5 16.6 44.5 52 61 68.5 14.3 15.1 15.5 16 .6 Lateral 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

NCA1

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

NCQ8

(Not available 20" (0.5 m)) Note 3) For solid state switches with flexible wire specification, add 61 at the end of the lead wire length. Note 4) Robot cable is available as standard for D-M9.

CRB2/CRBU2/CRB1

(mm) C2 F2 D1 G C3 A1 A2 B1 B2 B3 C1 D2 E1 E2 F1 R Model (size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 104 (120.5) 12 25 60 (61) 78 67 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 102 (136.5) 104 (120.5) 16 27.5 60 (61) 98 82 18 36 2.8 82.5 24 11.5 30 52 (53) 1/8 140 (155) 124 (139) 17 36 70 (71) 110 95 22 48 4 100 29 14 38 62 (63) 1/8 140 (155) 124 (139) 23.5 42.5 70 (71) 140 125

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 3) Make sure to indicate the type of solenoid valve when ordering. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 C1 Model (size) A1 A2 B1 B2 B3 D1 D2 E1 E2 F1 F2 G R CVRB1BW50 CVRB1BW63 CVRB1BW80 CVRB1BW100 120 (136.5) 60 (61) 82.5 78 67 18 36 2.8 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 82.5 98 82 18 36 2.8 16 24 11.5 30 52 (53) 104 (120.5) 27.5 1/8 140 (155

CC

(Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1/2 104 RB 223 92 116 123 61

MK

1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2 ML2B C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20 61

Table of Contents

With Pre-wired Connector. -50: No Indicator (Dark room) Specifications . -61: Oil Resistant, Flexible Cable Specifications . Technical Data. Plug-in Connector Assembly/ How to Use DIN Terminal.

MGQ

-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37 38 78 53 77 Bore size (mm) MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL Bearing type 10 21 27 34 38 20 18 22 28 30 51 55 70 71 25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61

CNA

Dd9 3 x 18l 0.040 0.076 10 CDP-2A CDP-3A CDP-4A CDP-5A CDP-6A CDP-7A 40 50 63 80 100 40, 50, 63 80 100 Polished round 10 3 4 46 38 3 x 18l 0.050 0.093 12 Polished round 12 3 4 55.5 47.5 4 x 25l 0.050 0.093 16 Polished round 16 4 5 71 61 4 x 25l 0.050 0.093 18 Polished round 18 4 5 76.5 66.5 m l 4 x 25l 0.065 0.117 20 Polished round 20 4 5 83 73 L 4 x 36l 0.065 0.117 25 Polished round

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2 235.8 Mounting of Auto Switch When mounting an auto switch, insert it into the cylinders switch groove from the direction shown in the drawing to the right.

Environment

155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 69.6 78.6 76.2 173.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61

Ionizer Nozzle type IZN10 Series IZS

61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions DIN rail mounting bracket/IZN10-B3 (Mounting angle adjustable range) 40 17 50 Internal mounting 2 x 3.4 33 20.5 30 30 44 70 61 70 55 26 17 11 8 x 3.4 9 (7.5) 40 5 2 x Hexagon socket head cap

Nozzle Type Ionizer

61 Pivoting bracket IZN10-B2 20 3.4 64 56 90 (Mounting angle adjustable range) 11.4 28 20 20 9 24 3.4 4 14 40 18 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x 6

Floating Joint

96 16 36 28 70 118 49 3 71000 5.3 Technical Data 200 JA200-45-150-X530 45 1.5 191 61 96 16 36 28 70 118 49 3 71000 5.4 1149 JA Series Flange Type: JAF JAF180 200--X530 4 x J Center of sphere M U U D 60 G P T B C H R A Dimensions (mm) Maximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C

Compact Cylinder

with the current CDQS series, 25, 10 mm stroke) CAT.ES20-239C JCQ Series Compact Cylinder JCQ Series Compact (Compared with the current product) [mm] Bore size CDQS JCDQ Weight 29 g 33% weight reduction 23 Weight 43 g 25 12 23 + Stroke 23 25.5 + Stroke 25 24% volume reduction Weight 37 g 35% weight reduction 26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61

44

24 27.2 13.8 15.6 13.8 15.6 16 17.8 20.4 13 17 12 17 17 21 30 34 38 55 59 68 54 58 67 59 63 72 57 60 69 98 106 4 2.5 3 1.8 10 8 13.5 5 L1 M L1 M 4 3 5 2.3 d 6 4 10 3.3 10 10 15 5.8 16 A L2 H2 8 6 H2 6.6 5.3 12 14 17.4 25 30 41 22.2 H1 Connection thread 25.6 10 7.5 6.8 27.5 2 x Applicable tubing 7.6 15 17 20.9 35 25.6 10 8 7.3 47 32 27.5 25.6 12 9 8 48 27.5 16 17 23.5 8.5 41 25.6 12 10 9 61

Support Guide/11-LEFG Series

The load factor for each direction can be obtained as follows. x = 0/400 = 0 y = 50/250 = 0.2 z = 200/1500 = 0.13 5. x + y + z = 0.33 1 LC3F2 2000 1000 2000 800 1500 1500 Lz 600 L1 [mm] L3 [mm] L2 [mm] 1000 1000 400 Ly 500 500 200 Lx 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 61 Support Guide 11-LEFG Series 11-LEFG16, 25

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

SY5440 (R) -LL-02 5 156 L (Lead wire length) Insulation: Red (+) Insulation: Black () 0.3 mm2 4.1 37.2 34.5 84.3 Cable type (TT) 3 52-SY5440 (R) -TT-02 Max.10 5 189.6 L (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 101.1 16 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 21 22.5 2-position single L plug connector (L) 52-SY7140 (R) -L13.5 02 03 79.2 41.7 61

Series AP500

Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61