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Recommended Straight line Mounting pitch A A Fig.1 Recommended piping Unit: mm Mounting pitch A Straight Tubing line length Nylon tubing Soft nylon Polyurethane size tubing tubing 6 84 or more 66 or more 39 or more 30 or more Not recommended 8 112 or more 88 or more 52 or more 40 or more Fig. 2 When using a tying band to bind the piping together 10 140 or more 110 or more 69 or more

B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D

Replace the switch with a new one if the problem is not solved. switch -18- Basic Construction Fig.5 MWPU63-40-5-** Assembly drawing Fig.6 MWPU63-40-5-** Assembly drawing Fig.7 MWPQ125-40-5-** Assembly drawing Fig.8 MWPQ125-40-5-** Assembly drawing -19- Fig.5 -20- Fig.6 -21- Fig.7 -22- Fig.8 -23- Revision history Initial Release SZ Edition A *Document report P.13 TP Edition B *Document report

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3

(Refer to Fig. (1) and (2).) E: Emitter C: Collector B: Base B: Base E: Emitter C: Collector Fig. (1) NPN type Fig. (2) PNP type 16-13-4 12 Glossary of Terms U Reversed output mode Refer to Hysteresis mode and Window comparator mode in Technical Information on page 16-13-8. Unit conversion Refer to Technical Information on page 16-13-13.

/Dimentions Male Quick Fastener Dimensions Table A 60.15 Port size (Quick fastener) Port size (Quick fastener) P7 P10 P7 P10 A B C D E 7 0 0.05 9.90.05 15 10 0 0.05 12.850.05 20 Clip part no. A B C D VDW30-CP7 26 7 9 14 VDW40-CP10 28 10 10 15 C D 2.50.1 9 or less 1.6 or more 2.5+0.25 0 2.5+0.25 0 D B 120.1 13 17 O-ring 2 or more O-ring dimentions P7 P10 (Nominal no.)

Option C . 8-1 8.1 Specifications . 8-1 8.2 Precautions for installation and handling . 8-1 Chapter 9 Option M . 9-1 9.1 Safety instructions for use . 9-1 9.2 Specifications . 9-2 9.3 Installation of Motor type Auto Drain . 9-3 9.4 Electrical circuit diagram . 9-3 Chapter 10 Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications . 10-1 10.3 Connection of power supply

Fig. 2 (3) The appropriate terminating resistor varies depending on the CC-Link cable used.

Hexagon wrench (Width across flats 4mm) 13 14 Spanner (Width across flats 13mm) Fig.1 13 Open Close Fig.2 10 XL-OMP0001 6.

Calculation D n W P t : Vacuum pressure (kPa) : Safety factor horizontal lifting: 4 or more vertical lifting: 8 or more : Pad diameter (mm) : Number of pads per workpiece : Lifting force (N) D = x x x t x 1000 1 P 4 3.14 W n Selection Graph After establishing the workpiece weight, number of pads to be used, and the vacuum pressure when adsorbing the workpiece, the pad diameters for horizontal

Model Orifice size Port size Material Body Seal 4.5 mm 10 mm 6 mm 8 mm 3 mm 2 mm VX21 1/8, 1/4 NBR 1/4, 3/8 Brass Stainless steel VX22 FKM 1/2 EPDM 1/4, 3/8 VX23 PTFE 1/2 Normally Open (N.O.)

Fig. 2 Caster adjuster-foot bracket (2 pcs.) Fig. 3 Fixing bolt (8 pcs.) 180 Optional Accessories HRSH Series e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating fluid. Refer to the Operation Manual for details. HRS Part no.

Fixing bolt (M8) (8 pcs.) Adjuster foot Unfixed caster (Caster O.D.: 2.9 inch [75mm]) Fig. 2 Caster adjuster-foot bracket (2 pcs.) Fixing bolt (M8) 4.6 [118] A B Fig. 3 Fixing bolt (8 pcs.) Fig. 1 Mounting view 19 Optional Accessories Series HRS100/150 e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating uid.

Fixing bolt (M8) (8 pcs.) Adjuster foot Unfixed caster (Caster O.D.: 75) Fig. 2 Caster adjuster-foot bracket (2 pcs.) Fixing bolt (M8) 118 A B Fig. 1 Mounting view Fig. 3 Fixing bolt (8 pcs.) 113 HRS100/150 Series e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating fluid. Refer to the Operation Manual for details. Part no.

Solenoid on side A 0 2 4 6 8 16 28 30 2 3 1 SV24 V +24 V for valve 5 2 SV0 V 0 V for valve Side D Side U URL http://www.smcworld.com 1 4 3 SW24 V +24 V for input (SI unit side) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 SW0 V 0 V for input 4 Output No.

Symbol: FG (2-Position), Solenoid: S (Single), Voltage: 3 (24V DC), Option: N (Indicator Light), Seal: R (Rubber Seal), Subplate: A03 (Side Ported 3/8)