100

0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows the

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Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 1Z (100VAC/50Hz, 115VAC/60HZ), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)

Seal Type: S (Metal), Configuration: FG (2-position), Number of Solenoids: D (Double), Voltage: 3EZ (24VDC), Pilot: V1 (External Individual Pilot Exhaust), Subplate: w/o Subplate, Option: X1 (External Pilot Supply)

Compact

-Light at ON .Ambrenllemperature--..',10 to 60.C .Operaling time-1 ms or tess .Shock resistance--1000m ,-s, /1O2c I Auto switch internal circuit Auto switch dimensions D-F9N D-FgI{/D-F9P/D.F9B o o Blue . o o o A Caution o Auto swilch mouniing tool lJse walch maker's screty driver wilh a gr,p diameter ot 5 lo 6 mm lo tighten the set screw which is clelived with Tightening torque The tightening

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Flow Control Equipment

AS42l1FE AS43l1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tube O.D.

PSxx-OMM0002CN

ON ON OFF OFF (/ /) 1 DC(+) DC(-) 2 ON DC(+) DC(-) NPN PNP () 3 OFF ( ) () DC(+) DC(-) () 4 5 (A/D ) 6 10 15 10 -45No.PS-OMM0002CN-F No. 80 mA () (Er1,2) (Er1,2) (Er0,4,6,7) "HHH" "LLL" (Er3) ( ) DC12~24V10% DC12~24V10% (Er0,4,6,7) 7 (HHH) (LLL) 10 () (Er3) DC12~24V10% DC12~24V10% DC(+) DC(-) 8 -46No.PS-OMM0002CN-F No.

ZL3-OM00801

3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2),

PSxx-OMS0004CN

-2No.PS-OMS0004CN-D / 1 1.5 *3) *3)1 1 [] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Residual Pressure Release Valve

O.D. 6 8 10 12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK 10 8 7 6 4 2 0 With One-touch fitting with a push button guard: KEB Release time S Release time of pressure in the cylinder Body (Red) Residual pressure release push button (Red) VCHC D With One-touch

AC Servo Motor Driver (MECHATROLINK-II type)

5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

PFMB.eng

The button is to increase and the button is to decrease the set value. 2 B D D Press the button continuously to keep increasing the set value. Connecting/Disconnecting When mounting the connector, insert it straight into the socket, holding the lever and connector body, and push the connector until the lever hooks into the housing, and locks.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

AS

C D E F G H J K L AS100P-04-04 AS200P-04-04 AS200P-06-06 AS250P-06-06 AS300P-08-08 AS300P-10-10 23.9 31.4 31.3 33.6 37 37.5 41.7 51.4 52.3 54.6 60.5 63.5 26.7 36.4 36.3 38.6 42 42.5 38.9 46.4 47.3 49.6 55.5 58.5 26 30 30 32 36 39 9.3 9.3 11.6 12.8 15.2 18.5 17 17.1 18 18 19 22 4 4 6 6 8 10 4 4 6 6 8 10 10 13.6 13.6 17 22 22 12.7 12.7 13.5 16.8 18.5 21 17.4 18.9 19.9 24.1 27 30.5 22.4 25.7

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: -, Subplate: -, Option: -