MHZ

9@0@2 MHZA-A0603C MHZA2-6C MHZA-A0607 MHZA2-6H Main body of adaptor Mounting screw for adaptor Seal kit MHZA-A0608 MHZA2-6K End boss assembly MHZA-A0609 MHZA2-6M MHZA-A0610 MHZA2-6E 12-2-18 18 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Construction: With Dust Cover MHZAJ2-6 Double acting/With fingers open Single acting/Normally open @2 i !

Parallel Style Air Gripper Series MHZ

Finger assembly MHZA2-6D MHZA-A0603 Piston assembly MHZA2-6S MHZA2-6C MHZA-A0603C MHZA2-6H MHZA-A0607 Main body of adaptor Mounting screw for adaptor Seal MHZA2-6K MHZA-A0608 End boss assembly MHZA2-6M MHZA-A0609 MHZA2-6E MHZA-A0610 The end boss assembly other than type E should be mounted on the special body.

AC Servo Motor Driver (Network card type ）

pulse) 3h VAR Monitor 35 2B2 Motor/load side position deviation I32 ro Servo motor-side/load-side speed 4h VAR Monitor 36 2B2 deviation (Unit: r/min) Motor/load side speed deviation I32 ro 18 117 18EtherCAT COMMUNICATION Da Inde Su Obje ta Acc ess Defa ct Name ult Description Ty pe x b 5h VAR Monitor 37 Internal temperature of encoder I16 ro Internal temperature of encoder (Unit: C) 2B2 6h

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Bore size (mm) Model Maximum operating pressure (Pv) (MPa) 6 10 Allowable load weight (Wv) (kg) CY1R 6H CY1R10H CY1R50H CY1R50L CY1R63H CY1R63L 0.55 0.55 0.65 0.40 0.65 0.40 1.0 2.7 75.0 44.0 115.0 70.0 50 63 Note) Use caution, since the magnetic coupling may be dislocated if it is used over the maximum operating pressure.

A_HEC-OM-K001

Signal 1 DC output 2 DC output 3 FG DC connector HED007-C2* (HED003-C2*, HED005-C2*) DDK D/MS3102A20-15S Connect the DC cable connector of Heat Exchanger. Pin No.

7.5

4(A) 2(B) KJL03-C2 5/32" one-touch fitting assembly (Elbow type) KJL02-C2 2 one-touch fitting assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly

7.4

) 22.8 10.5 7.4 58.5 39.7 41.8 9.2 22 28.5 22.9 20.4 10.5 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 8.7 With plug connector/light, built-in silencer S0716S-mM(O)-m 16.7 2-Position Double/4-Position Dual 3-Port Grommet: S07 6-mG-m 2 A B C 8 2 x 3.2 5.3 2 x C2, C4, N1, N3 <4(A), 2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(If not specifying dimension C2, indicate instead.)

Table of Contents

(If not specifying dimension C2, indicate instead.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(If not specifying dimension C2, indicate instead.)

CRB2/CRBU2/CRB1

(If not specifying dimension C2, indicate "" instead.) C1 = C (mm) (mm) Size Size L1 max. L2 max.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection C2 thread N S U F GN GS B3 M3 x 0.5 3 11 6 6 10 15 25 ZP T 10 13 16 UT Vacuum inlet: One-touch fitting J K A8 Applicable tubing O.D. J B5 M5 x 0.8 5 13 8 Width across flats H Dimensions Per Vacuum Inlet: One-touch Fitting G Model G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

Air Cylinder Series CM2

20 to 32 40 K N FT N CJP Z H F S + Stroke ZZ + Stroke CJ2 CM2 Boss-cut style With rod boot l 8 8 CG1 B3 Width across flats MB e MB1 JH ZZ + Stroke CA2 JW f h ZZ + Stroke CS1 Cushion needle (Width across flats 1.5) 45 With air cushion WA WA CS2 N1 N1 G G Built-in One-touch fittings One-touch fitting port size P Q (mm) H1 H G FY ZZ FZ AL FX Z A E F FT MM S B1 B B2 D FL FD K KA N NA NN P C2

SJ3A6

4(A) 2(B) KJL03-C2 5/32" one-touch fitting assembly (Elbow type) KJL02-C2 2 one-touch fitting assembly (Elbow type) SJ3000 4(A) 2(B) KJL07-C2 1/4" one-touch fitting assembly (Elbow type) KJL04-C2 4 one-touch fitting assembly (Elbow type) KJW01-C2 1/8" one-touch fitting assembly (Long elbow type) KJL06-C2-N 6 one-touch fitting assembly (Elbow type) KJW03-C2 5/32" one-touch fitting assembly

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) P=16 17.5 48 23.5 11.8 18.8 9.5 12.5 SJ 15.9 29.2 31.5 34.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A E 3/5 E 3/5 SY 52.7 53.9 E 3/5 E 3/5 67.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B C2 C2 P 1 P 1 P 1 P 1 SV PE PE X X C1 C1 2 x M12 SYJ One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port]

Air Cylinder

C2 H1 CJ1 D FY D B I E CJP AL A MM FX FZ CJ2 K Z H Width across flats NA FT AL A K F S + Stroke H + Stroke ZZ + 2 x Stroke JCM 20 to 32 40 CM2 CM2 CM3 With air cushion CG1 Cushion needle (Width across flats 1.5) 45 WA WA CG3 JMB MB MB1 CA2 Female rod end CS1 Thread depth A1 Female thread MM CS2 3.5 H ZZ + 2 x Stroke (mm) Bore size A AL B B1 B2 C2 D E F FD FL FT FX FY FZ G H H1 H2 I K KA

Micro Mechanical Valve Series VM1000

EXH.1 (C1) 2 (C2) 4 93.7 23 19 VH 18.5 18.5 12 CYL.2 CYL.1 14 12 21 20 3 (E1) 1 (S) 5 (E2) VHS 0.5 MPa supply 30.5 26.4 3 x 1/4 VHS T.T.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators C2 2 x P (Rc, NPT, G) M5 x 0.8 Effective thread length 2 x FL Width across flats B2 2 x NN B (This drawing shows the cases of 20 and 25.)

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

7ND9071en

Connections 1/4 NPT (S, C1, C2), converts also ND91_ connections to1/4 NPT. RC03 H127093 Cable assembly remote mount sensor cable 30 m, angle connector D3 D3B As D3 but two pressure gauges with connections 1/4 NPT (S, C2).