Table of Contents

(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 59 Simple Specials

ZP

M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 95l x 100l x 105l x 130l x 155l M3 x 45l x 50l x 55l x 60l x 65l x 70l M3 x 50l x 55l x 60l x 65l x 70l x 75l M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 125l x 150l 6.1 6.1 7 7.5 7.5 9 11 12.5 8 10 13.5 11 7.5 Auto Switch Mounting Bracket

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

Table of Contents

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

AS

Metric size Inch size 23 04 06 08 10 12 Thread type 01 03 05 07 09 11 13 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 Port size M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N Use 1/8" tube.

KJ

(mm) (2) <M5, M6> Connection thread R <M5, M6> (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x

CQ2

Standard Bore (mm) Stroke range (mm) (mm) Q N M J F I E K2 G H K1 Th9 B C D L P W Z A 0 0.043 0 0.052 5 to 30 12 15 3.5 10 32 25 5 1.5 5.2 6 6 3.5 37.2 30.2 M3 X 0.5 15.5 M5 X 0.8 15 5 to 30 16 15 3.5 38 31 20 10 38 29 6 1.5 6 8 8 3.5 M4 X 0.7 M5 X 0.8 20 0 0.043 0 0.043 5 to 50 20 5.5 25.5 17.5 43 34 9.5 47 36 8 2 8 7 10 4.5 M5 X 0.8 M5 X 0.8 13 5 to 50 25 5.5 28 19 47 37 11 52

ZP

x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) 34.5 28 R P 26.5 B B B B B B B B 18.5 11 Note 2) P = 10.5 18.4 6 2n-C3, C4, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 M5: M5 thread (7.5) This drawing shows the case of VV5Q04-T2-D.

ZP

M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27) ZPY16 ZPY20 38 (30) (30) 38 (29) 38 (30) (30) 38 (29) 38 (30) (30) 38 (28) 38 (30) (30) 38 (29) ZPY25 ZPY32 47 (34) 43 (36) 44 (38) 46 (33

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

ZP

1 8 M5 x 0.8 M6 x 1 M8 x 1.25 Rc M6 x 1 M8 x 1 M6 x 1 M8 x 1 4 6 8 10 13 16 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 1 8 M6 x 1 M8 x 1.25 Rc 1 8 13-11-2 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer How to Order Vacuum entry port Pad dia.

Table of Contents

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

SY

SS5Y31, #2 + #4 + #11 M type plug connector .

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-38-2A(-Q) M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 11 11 Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk 10-SY5000 SY5000-38-16A(-Q) 1 8 10-SY5000 SY5000-39-16A(-Q) 1 8 15 15 Note) The EXH port may be either on the lead wire side or on the end plate side. (An assembly is shipped under the condition shown in the figure.)

0.4

2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5