Table of Contents

-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer Standard Type Series AN00 How to Order Over 30 dB (A) noise reduction Low back pressure Compact and easy mounting AN 400 04 Port size Thread type Body size 02

CE

NTJ-015A NT-02 NT-04 NT-05 12 M5 x 0.8 4 8 9.2 7.8 H B 20 5 13 15.0 12.5 M8 x 1.25 32, 40 8 22 25.4 21.0 M14 x 1.5 50, 63 11 27 31.2 26 M18 x 1.5 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

CE

NTJ-015A NT-02 NT-04 NT-05 12 7.8 M5 x 0.8 9.2 8 4 H B 20 12.5 15.0 13 5 M8 x 1.25 32, 40 21.0 25.4 22 8 M14 x 1.5 50, 63 26 31.2 27 11 M18 x 1.5 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

Air Cylinder NCA1 Series

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

NCA1

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

4-channel Flow Monitor ( compatible)

(Linked to OUT1) Other parameter settings Item Page Default setting [F 3] Digital filter setting Page 42 0.00 sec.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

38 35 42 40.5 A 33 32.5 34 31 38 36.5 49.5 48.5 A B A B A B A B 20 25 32 40 50 63 80 100 B 24 (32) 24.5 (32.5) 25 (33) 27 (36) 32 (44) 33.5 (45.5) B 14.5 (22.5) 15 (23) 15.5 (23.5) 17.5 (26.5) 22.5 (34.5) 24 (36) 29 (43) 30 (44) B 20 (28) 20.5 (28.5) 21 (29) 23 (32) 28 (40) 29.5 (41.5) B 16 (24) 16.5 (24.5) 17 (25) 19 (28) 24 (36) 25.5 (37.5) 30.5 (44.5) 31.5 (45.5) Hs 27.5 30 33.5

Rotary Actuator

mark shows the dimensions of the solenoid valve VF3120K-1G1-02-X14. Drawing shows the auto switch mounted on the port side.

Title not found

-diameier r-t, L, | , u, E 3/16" 1t4" 07 09 1 1 3/8" 1/2" 6mm 8mm 10mm 12mm 06 08 1 0 H , T , U , X , N '10-32 UNF Thread 1/16" NPT 1/8" NPT 1/; NPT H, L, W, T, Y, U, E Double branch \" Male run tee Double branch universal elbow Branch unNersal elbow Branch universal female elbow Triple branch universal elbow M5 x 0.8 M6 x 1.0 PT1/8 PT1/4 PT3/8 Pr1/2 M6 0 t 02 03 o4 a a a a a a a a a a a

Air Slide Table

100 42 85 174.5 8 4 147 159 MXQ8B-100Z 36 14 66 36 100 42 110 199.5 10 5 172 184 MXQ 8BL-mZ Symmetric type 2 x M3 x 0.5 thread depth 5 13 20 27 40 42 21.7 Pilot port side 23 * Dimensions other than those listed above are the same as those for the standard type. 59 Air Slide Table/Low Thrust with High Rigidity Type MXQB Series Dimensions: MXQ 8B [Adjuster Option] MXQ 8B-m With adjuster option

SFOD-OMT0005CN

Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)

JXCx-OMT0028CN

IP config Next 5 Install IP config 6 IP config Installshield Wiazrd Completed Finish IP config 3 23 - 4)IP config 711IP config No. 7 (1)(3)IP config IP config GW Scan IP config GW (1) (2) 8 GW IP config MAC ) MAC =00-23-C6-02-F0 GW 9 IP addressSubnet maskIP Set ) IP =192.168.250.2 =255.255.255.0 10 GW DHCP OFF() DHCP DHCP DHCP ON()Set *GW DHCP ON() 11 IP DHCP ON/OFF

15

) x [ST]: 185 st or less 0.34 + (1.92 x 103) x [ST]: Over 185 st 0.48 + (2.91 x 103) x [ST]: 180 st or less 0.55 + (2.62 x 103) x [ST]: Over 180 st Other specifications Actuation unit weight [kg] (*[ST]: Stroke) 11LEJS Ball bushing bearing LEYGlL 0.33 + (1.69 x 103) x [ST]: 110 st or less 0.36 + (1.80 x 103) x [ST]: Over 110 st 0.50 + (2.40 x 103) x [ST]: 110 st or less 0.55 + (2.51 x 103

1

188 42 170 42 42 Series MXH Series MGC/MLGC Series MGG Table material: Aluminum Front plate material: Steel Front plate material: Steel NCA 2-D A B 2-C 2-E DMounting side Connecting port side Mounting side Connecting port side -X 20Data D LX B C D A 4-C2 Dimensional Range Not Possible to Machine Additionally E A B C D Bore size (mm) 20 25 32 40 50 63 80 100 Dimensional Range Not Possible

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

98 153.5 B 42 C 63 Model A 63 ZPT63HJ25-01-A18 F 121.5 63 ZPT63HJ50-01-A18 65 14.5 156.5 B 65 C 14.5 D 26 26 26 28 28 28 E 66 101 137 68 103 139 Y 3.5 3.5 3.5 4.5 4.5 4.5 194.5 63 ZPT63HJ75-01-A18 65 14.5 192.5 40 ZPT40HJ75-01-A18 42 134 189.5 50 ZPT50HJ25-01-A18 52 63 118.5 80 ZPT80HJ25-01-A18 83 16.5 123.5 50 ZPT50HJ50-01-A18 52 98 153.5 80 ZPT80HJ50-01-A18 83 16.5 158.5 80 ZPT80HJ75-01

MY1

Y = 6.525 x 9.8 x 29.6 x 103 = 1.89 (Nm) Y Load factor 2 = M3/M3max = 1.89/60 = 0.03 MTS m4 M3 MY 5.

Stability of suction position,

ZP3EU-F6-YB12 [Weight: 249 g] ZP2 ZP2V 18 M12 x 1.75 18 M12 x 1.75 11.5 11.5 ZP A-A A-A 6 6 40 19 65 ZPT ZPR Rc1/8 Rc1/8 40 19 65 22 22 XT661 A A A A 26 26 11 11 32 32 42 11.11) 42 4 4 11.11) 30 30 (Rotating angle) (Rotating angle) Applicable pad part no. ZP3E-125UM ZP3E-100BM 93.8 78.6 Applicable pad part no.