XM, XY

Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 491 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal XMH, XYH Series RoHS How to Order XMH XYH 16 25 Angle type In-line type q w e w Flange type XMH q Flange size XMH XYH Symbol Nil C Applicable flange size 16, 25, 40, 50

MXS Series Air Slide Table

19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121 146 171 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 MXS20-10 MXS20-20 MXS20-30 MXS20-40 MXS20-50 MXS20-75 MXS20-100 MXS20-125 MXS20-150 169 223 275 62 Air Slide Table MXS Series Dimensions MXS 20 With shock absorber (20) MXS20BS, BT, B 47.5 34

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type Vane Style Size: 1, 3, 7, 20 . How to Order . Specifications. Construction. Dimensions .

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

I/O Configurator (NFC version)

Detailed information of units 41 3.4.1. Information tab 41 3.4.2. Details of I/O monitor tab 50 4. Setting Function 57 4.1. Edit TAG 57 4.2. Software Control 57 4.3. Forced output 60 4.3.1. Forced output conditions 60 4.3.2. Forced output procedure 60 4.3.3. Forced output release procedure 63 4.4. Export Settings 64 4.5. Import Settings 66 4.6. Reading of the initial value 67 4.7.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators Operating port 2 x M5 x 0.8 41 6.3 16.5 20 8.5 13 Other dimensions are the same as basic type. 810 MXQ 1322Air Slide Table Dimensions: MXQ12L / Symmetric Type 1322Basic ZZ Z Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

CP95

5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

For double vane style, rotation tolerance of 90 actuators will be for size 10 actuators only. 11-3-6 41 Series CRBU2 Rotary Actuator: Free Mount Type Vane Style Construction: 10, 15, 20, 30, 40 Single vane type Standard: CRBU2W10/15/20/30/40-S (3 female threads (one of them is indicated with ) spaced equally apart in 120 are not available for size 10.)

CP95

5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71

LEC-T1_C

.121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B

LJ1H

Refer to page 204 regarding brake wiring. 600 a = 2000 a = 1000 400 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 145 for deflection data. 40 41 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Standard Motor/Vertical Mount Specification Series

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Compact Guide Cylinder

Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165

LX

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Air Slide Table Series MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

MXW Series Long Stroke Slide Table

200 186 226 174 216 118 139 6 2 495 24 50 50 149 MXW Series Long Stroke Slide Table Dimensions MXW 20 Stroke: 100, 125 Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 (mm) 144 20 Scale: 20% 10 Width across flats 13 Operating port Rc (PT) 1/8 8-M5 x 0.8 thread depth 13 (Helisert) Operation direction A 6H9 +0.03 depth 5.5 0 7 Taper thread plug with hexagonal hole 48 98 72 41

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

MU

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 Foot MGZ-L05 MGZ-L06 MGZ-L08 47 71 94 118 141 165 189 212 236 Flange MGZ-F05 MGZ-F06 MGZ-F08 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151 189 227 265 302 340 378 324 486 648 811 973 1135 1297 1459 1621 MGZ32 16 Switch spacer 121